公开(公告)号：US20060033057A1

公开(公告)日：2006-02-16

申请号：US11189868

申请日：2005-07-27

Applicant: Shing-Dar Tang ,  Sean Chang

Inventor： Shing-Dar Tang ,  Sean Chang

IPC: G01N21/86 ,  G01V8/00

CPC classification number: G01N21/8422 ,  G01B11/0625

Abstract: A deposition system and film thickness monitoring device thereof. The film thickness monitoring device for monitoring thickness of a thin film coated on an optical substrate includes a laser light source, a retro-reflector, and a light receiver. The laser light source and the retro-reflector are disposed on opposite sides of the optical substrate. First, a light beam is emitted by the laser light source and then passes through the thin film along a first path. Second, the light beam is reflected by the retro-reflector and then passes through the thin film again along a second path parallel to the first path. Third, the light beam is received by the light receiver.

Abstract translation: 一种沉积系统及其膜厚监测装置。 用于监测涂覆在光学基板上的薄膜的厚度的膜厚监视装置包括激光光源，后向反射器和光接收器。 激光源和后反射器设置在光学基板的相对侧上。 首先，激光光源发射光束，然后沿第一路径穿过薄膜。 第二，光束被后向反射器反射，然后再次沿着平行于第一路径的第二路径穿过薄膜。 第三，光束被光接收器接收。

公开(公告)号：US07321129B2

公开(公告)日：2008-01-22

申请号：US11189868

申请日：2005-07-27

Applicant: Shing-Dar Tang ,  Sean Chang

Inventor： Shing-Dar Tang ,  Sean Chang

IPC: G01N21/86

CPC classification number: G01N21/8422 ,  G01B11/0625

Abstract: A deposition system and film thickness monitoring device thereof. The film thickness monitoring device for monitoring thickness of a thin film coated on an optical substrate includes a laser light source, a retro-reflector, and a light receiver. The laser light source and the retro-reflector are disposed on opposite sides of the optical substrate. First, a light beam is emitted by the laser light source and then passes through the thin film along a first path. Second, the light beam is reflected by the retro-reflector and then passes through the thin film again along a second path parallel to the first path. Third, the light beam is received by the light receiver.

Abstract translation: 一种沉积系统及其膜厚监测装置。 用于监测涂覆在光学基板上的薄膜的厚度的膜厚监视装置包括激光光源，后向反射器和光接收器。 激光源和后向反射器设置在光学基板的相对侧上。 首先，激光光源发射光束，然后沿第一路径穿过薄膜。 第二，光束被后向反射器反射，然后再次沿着平行于第一路径的第二路径穿过薄膜。 第三，光束被光接收器接收。