公开(公告)号：US20060033057A1

公开(公告)日：2006-02-16

申请号：US11189868

申请日：2005-07-27

Applicant: Shing-Dar Tang ,  Sean Chang

Inventor： Shing-Dar Tang ,  Sean Chang

IPC: G01N21/86 ,  G01V8/00

CPC classification number: G01N21/8422 ,  G01B11/0625

Abstract: A deposition system and film thickness monitoring device thereof. The film thickness monitoring device for monitoring thickness of a thin film coated on an optical substrate includes a laser light source, a retro-reflector, and a light receiver. The laser light source and the retro-reflector are disposed on opposite sides of the optical substrate. First, a light beam is emitted by the laser light source and then passes through the thin film along a first path. Second, the light beam is reflected by the retro-reflector and then passes through the thin film again along a second path parallel to the first path. Third, the light beam is received by the light receiver.

Abstract translation: 一种沉积系统及其膜厚监测装置。 用于监测涂覆在光学基板上的薄膜的厚度的膜厚监视装置包括激光光源，后向反射器和光接收器。 激光源和后反射器设置在光学基板的相对侧上。 首先，激光光源发射光束，然后沿第一路径穿过薄膜。 第二，光束被后向反射器反射，然后再次沿着平行于第一路径的第二路径穿过薄膜。 第三，光束被光接收器接收。

公开(公告)号：US07321129B2

公开(公告)日：2008-01-22

申请号：US11189868

申请日：2005-07-27

Applicant: Shing-Dar Tang ,  Sean Chang

Inventor： Shing-Dar Tang ,  Sean Chang

IPC: G01N21/86

CPC classification number: G01N21/8422 ,  G01B11/0625

Abstract: A deposition system and film thickness monitoring device thereof. The film thickness monitoring device for monitoring thickness of a thin film coated on an optical substrate includes a laser light source, a retro-reflector, and a light receiver. The laser light source and the retro-reflector are disposed on opposite sides of the optical substrate. First, a light beam is emitted by the laser light source and then passes through the thin film along a first path. Second, the light beam is reflected by the retro-reflector and then passes through the thin film again along a second path parallel to the first path. Third, the light beam is received by the light receiver.

Abstract translation: 一种沉积系统及其膜厚监测装置。 用于监测涂覆在光学基板上的薄膜的厚度的膜厚监视装置包括激光光源，后向反射器和光接收器。 激光源和后向反射器设置在光学基板的相对侧上。 首先，激光光源发射光束，然后沿第一路径穿过薄膜。 第二，光束被后向反射器反射，然后再次沿着平行于第一路径的第二路径穿过薄膜。 第三，光束被光接收器接收。

公开(公告)号：US09659769B1

公开(公告)日：2017-05-23

申请号：US10972084

申请日：2004-10-22

Applicant: Bhadri Varadarajan ,  Sean Chang ,  James S. Sims ,  Guangquan Lu ,  David Mordo ,  Kevin Ilcisin ,  Mandar Pandit ,  Michael Carris

Inventor： Bhadri Varadarajan ,  Sean Chang ,  James S. Sims ,  Guangquan Lu ,  David Mordo ,  Kevin Ilcisin ,  Mandar Pandit ,  Michael Carris

IPC: H01L21/31 ,  H01L21/02 ,  H01L21/3105 ,  H01L21/477 ,  H01L21/26

CPC classification number: H01L21/02348 ,  H01L21/0217 ,  H01L21/02211 ,  H01L21/02274 ,  H01L21/26 ,  H01L21/3105 ,  H01L21/477

Abstract: A highly tensile dielectric layer is generated on a heat sensitive substrate while not exceeding thermal budget constraints. Ultraviolet (UV) irradiation is used to produce highly tensile films to be used, for example, in strained NMOS transistor architectures. UV curing of as-deposited PECVD silicon nitride films, for example, has been shown to produce films with stresses of at least 1.65 E10 dynes/cm2. Other dielectric capping layer film materials show similar results. In transistor implementations, the stress from a source/drain region capping layer composed of such a film is uniaxially transferred to the NMOS channel through the source-drain regions to create tensile strain in the NMOS channel.

公开(公告)号：US20130330926A1

公开(公告)日：2013-12-12

申请号：US13888077

申请日：2013-05-06

Applicant: Anand Chandrashekar ,  Raashina Humayun ,  Michal Danek ,  Aaron R. Fellis ,  Sean Chang

Inventor： Anand Chandrashekar ,  Raashina Humayun ,  Michal Danek ,  Aaron R. Fellis ,  Sean Chang

IPC: H01L21/48

CPC classification number: H01L21/486 ,  H01L21/28556 ,  H01L21/32136 ,  H01L21/76865 ,  H01L21/76877

Abstract: Methods and apparatuses for filling high aspect ratio features with tungsten-containing materials in a substantially void-free manner are provided. In certain embodiments, the method involves depositing an initial layer of a tungsten-containing material followed by selectively removing a portion of the initial layer to form a remaining layer, which is differentially passivated along the depth of the high-aspect ration feature. In certain embodiments, the remaining layer is more passivated near the feature opening than inside the feature. The method may proceed with depositing an additional layer of the same or other material over the remaining layer. The deposition rate during this later deposition operation is slower near the feature opening than inside the features due to the differential passivation of the remaining layer. This deposition variation, in turn, may aid in preventing premature closing of the feature and facilitate filling of the feature in a substantially void free manner.

Abstract translation: 提供了以基本上无空隙的方式用含钨材料填充高纵横比特征的方法和装置。 在某些实施方案中，该方法包括沉积含钨材料的初始层，然后选择性地去除初始层的一部分以形成沿着高纵横比特征的深度差异钝化的剩余层。 在某些实施例中，剩余层在特征开口附近比在特征内更加钝化。 该方法可以继续在剩余层上沉积相同或其它材料的附加层。 由于剩余层的差分钝化，在该后续沉积操作期间的沉积速率在特征开口附近比在特征内部的沉积速率更慢。 这种沉积变化又可以有助于防止特征的过早闭合并且有助于以基本无空隙的方式填充特征。

公开(公告)号：US08460403B2

公开(公告)日：2013-06-11

申请号：US11982509

申请日：2007-11-02

Applicant: Michael Pozin ,  Sean Chang

Inventor： Michael Pozin ,  Sean Chang

IPC: H01M4/58

CPC classification number: H01M4/58 ,  H01M2/1235 ,  H01M4/0471 ,  H01M4/1397 ,  H01M4/364 ,  H01M4/581 ,  H01M4/5815 ,  H01M4/587 ,  H01M4/621 ,  H01M4/622 ,  H01M4/625 ,  H01M6/16 ,  H01M10/0587 ,  H01M2004/028 ,  Y10T29/49108 ,  Y10T29/49115

Abstract: A primary cell having an anode comprising lithium and a cathode comprising iron disulfide (FeS2) and carbon particles. The electrolyte comprises a lithium salt dissolved in a solvent mixture. Iron disulfide powder and carbon black is preferably premixed and stored. A cathode slurry is prepared comprising iron disulfide, carbon black, binder, and a liquid solvent. The mixture is coated onto a substrate and solvent evaporated leaving a dry cathode coating on the substrate. The cathode coating is then baked at elevated temperatures in atmosphere under partial vacuum or in an atmosphere of nitrogen or inert gas. The anode and cathode can be spirally wound with separator therebetween and inserted into the cell casing with electrolyte then added.

Abstract translation: 具有包含锂的阳极的主电池和包含二硫化铁（FeS 2）和碳颗粒的阴极。 电解质包含溶解在溶剂混合物中的锂盐。 二硫化铁粉末和炭黑优选预混合并储存。 制备包含二硫化铁，炭黑，粘合剂和液体溶剂的阴极浆料。 将混合物涂覆在基材上并蒸发溶剂，在基材上留下干燥的阴极涂层。 然后将阴极涂层在高温下在大气中在部分真空下或在氮气或惰性气体的气氛中进行烘烤。 阳极和阴极可以用分离器螺旋卷绕并插入电池壳体中，然后加入电解质。

公开(公告)号：US20120009785A1

公开(公告)日：2012-01-12

申请号：US12833823

申请日：2010-07-09

Applicant: Anand Chandrashekar ,  Raashina Humayun ,  Michal Danek ,  Aaron R. Fellis ,  Sean Chang

Inventor： Anand Chandrashekar ,  Raashina Humayun ,  Michal Danek ,  Aaron R. Fellis ,  Sean Chang

IPC: H01L21/768 ,  C23F1/08

CPC classification number: C23F4/00 ,  C23C16/045 ,  C23C16/06 ,  H01L21/76877

Abstract: Methods and apparatuses for filling high aspect ratio features with tungsten-containing materials are provided. The method involves providing a partially fabricated semiconductor substrate and depositing a tungsten-containing layer on the substrate surface to partially fill one or more high aspect ratio features. The method continues with selective removal of a portion of the deposited layer such that more material is removed near the feature opening than inside the feature. In certain embodiments, removal may be performed at mass-transport limited conditions with less etchant available inside the feature than near its opening. Etchant species are activated before being introduced into the processing chamber and/or while inside the chamber. In specific embodiments, recombination of the activated species is substantially limited and/or controlled during removal, e.g., operation is performed at less than about 250° C. and/or less than about 5 Torr.

Abstract translation: 提供了用含钨材料填充高纵横比特征的方法和装置。 该方法包括提供部分制造的半导体衬底并且在衬底表面上沉积含钨层以部分填充一个或多个高纵横比特征。 该方法继续选择性地去除沉积层的一部分，使得在特征开口附近更多的材料在特征内部被移除。 在某些实施方案中，可以在质量传输限制条件下进行移除，在特征内可用蚀刻剂较少，而不是靠近其开口。 在引入处理室之前和/或在室内时，蚀刻剂物质被激活。 在具体实施方案中，活化物质的重组在除去期间基本上受到限制和/或控制，例如在小于约250℃和/或小于约5托下进行操作。

公开(公告)号：US07594239B2

公开(公告)日：2009-09-22

申请号：US11153549

申请日：2005-06-16

Applicant: Chii-How Chang ,  Sean Chang

Inventor： Chii-How Chang ,  Sean Chang

IPC: G11B17/03

CPC classification number: H01F7/066 ,  H01F7/122

Abstract: A magnetic actuator. The magnetic actuator comprises a first magnet, a second magnet, a first yoke, and a first coil. The second magnet is arranged axially with respect to the first magnet with repulsion therebetween. The first yoke is disposed between the first magnet and the second magnet, and the magnetic field lines produced by the first magnet and the second magnet extend from the first yoke. The first coil surrounds and corresponds to the first yoke. When a current is occurred in the first coil, the magnetic force generated between the first magnet and the second magnet will actuates the first coil to move axially with respect to the first and second magnets.

Abstract translation: 磁力驱动器。 磁致动器包括第一磁体，第二磁体，第一磁轭和第一线圈。 第二磁体相对于第一磁体轴向布置，在它们之间具有排斥力。 第一磁轭设置在第一磁体和第二磁体之间，由第一磁体和第二磁体产生的磁场线从第一磁轭延伸。 第一线圈围绕并对应于第一轭。 当在第一线圈中发生电流时，在第一磁体和第二磁体之间产生的磁力将致动第一线圈相对于第一和第二磁体轴向移动。

公开(公告)号：US07455466B2

公开(公告)日：2008-11-25

申请号：US11194566

申请日：2005-08-02

Applicant: Chii-How Chang ,  Sean Chang

Inventor： Chii-How Chang ,  Sean Chang

IPC: G03B9/02 ,  G03B9/08

CPC classification number: H02K41/0358 ,  H01F7/066

Abstract: A magnetic actuator. A yoke comprises a first opening and a second opening, a frame, and a path. A first magnet is disposed in the first opening in the vicinity of the frame. A second magnet is disposed in the second opening in the vicinity of the frame. A coil comprises a wire surrounding the path. A light shield is connected to an end of the coil. When current passes through the coil, the coil moves along the path by magnetic induction between the first magnet and the second magnet such that the iris diaphragm is adjustable by the light shield.

Abstract translation: 磁力驱动器。 轭包括第一开口和第二开口，框架和路径。 第一磁体设置在框架附近的第一开口中。 第二磁体设置在框架附近的第二开口中。 线圈包括围绕路径的线。 灯罩连接到线圈的一端。 当电流通过线圈时，线圈通过磁感应在第一磁体和第二磁体之间沿着路径移动，使得光圈可以通过光屏来调节。

公开(公告)号：US20080213104A1

公开(公告)日：2008-09-04

申请号：US12081185

申请日：2008-04-11

Applicant: Lee-Long Chen ,  Shih-Ming Huang ,  Sean Chang ,  Wen-Shi Huang

Inventor： Lee-Long Chen ,  Shih-Ming Huang ,  Sean Chang ,  Wen-Shi Huang

IPC: F04B17/00

CPC classification number: F04D29/051 ,  F04D25/062 ,  F16C17/08 ,  F16C39/063 ,  F16C2360/46 ,  H02K7/09 ,  H02K7/14

Abstract: A motor includes a stator, a rotor, a top magnetic structure, and a bottom magnetic structure. The stator is disposed in a frame. The rotor is also disposed in the frame, corresponding to the stator. The rotor includes a shaft extending axially from the rotor. The bottom magnetic structure is at the bottom of the frame. The top magnetic structure is on the top of the frame. The top and bottom magnetic structures are opposite to each other in an axial direction. Magnetic attraction generated between the first magnetic structure and the shaft, and the second magnetic structure and the shaft positions the shaft therebetween such that the first magnetic structure, the second magnetic structure, and the shaft are coaxially aligned.

Abstract translation: 电动机包括定子，转子，顶部磁性结构和底部磁性结构。 定子设置在框架中。 转子也布置在框架中，对应于定子。 转子包括从转子轴向延伸的轴。 底部磁性结构位于框架的底部。 顶部磁性结构位于框架的顶部。 顶部和底部磁性结构在轴向方向上彼此相对。 在第一磁性结构和轴之间产生的磁吸力，并且第二磁性结构和轴将轴定位在其间，使得第一磁性结构，第二磁性结构和轴同轴对准。

公开(公告)号：US20080118215A1

公开(公告)日：2008-05-22

申请号：US11976420

申请日：2007-10-24

Applicant: Yu-Chuan Chen ,  Sean Chang

Inventor： Yu-Chuan Chen ,  Sean Chang

IPC: G02B6/00 ,  B29C65/54

CPC classification number: G02B6/0096

Abstract: A light tunnel structure includes a plurality of plates and an adhesive (a bonding glue). The plates are connected to each other to form a light tunnel with at least one gap formed at each of the junctions. The adhesive (bonding glue) is filled within the gaps at the junctions. In addition, a manufacturing method of the light tunnel structure is disclosed.

Abstract translation: 光通道结构包括多个板和粘合剂（粘结胶）。 板彼此连接以形成在每个连接处形成有至少一个间隙的光通道。 粘合剂（粘合胶）填充在接合处的间隙内。 此外，还公开了一种光通道结构的制造方法。