公开(公告)号：US20040256961A1

公开(公告)日：2004-12-23

申请号：US10865125

申请日：2004-06-10

Applicant: MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.

Inventor： Akihiko Namba ,  Keiji Onishi ,  Katsu Takeda

IPC: H01L041/047

CPC classification number: H03H9/564 ,  B41J2002/14266 ,  H03H3/04 ,  H03H9/173 ,  H03H9/174 ,  H03H9/175 ,  H03H2003/0435 ,  H03H2003/0478 ,  Y10T29/42 ,  Y10T29/49005 ,  Y10T29/49128 ,  Y10T29/4913 ,  Y10T29/49135

Abstract: An electronic component includes a substrate; a piezoelectric material layer supported directly or indirectly by the substrate; a first electrode arranged on a surface of the piezoelectric material layer on an opposite side of the substrate; and a second electrode arranged on a surface of the piezoelectric material layer on the substrate side. The piezoelectric material layer is sandwiched between the first electrode and the second electrode. The first electrode has a smaller surface area than the piezoelectric material layer. A portion where the piezoelectric material layer is exposed from the first electrode includes a portion that is thinner than a thickness of the piezoelectric material layer between the first electrode and the second electrode. Thus, it is possible to configure a resonator with a higher frequency than its ordinary resonance, and it is easy to achieve an adjustment of the resonance frequency of the resonator, as well as improving the yield of the component and enabling the configuration of an electronic component that includes a plurality of resonators of different frequencies.

Abstract translation: 电子部件包括基板; 由衬底直接或间接支撑的压电材料层; 布置在所述压电材料层的与所述基板相反的一侧的表面上的第一电极; 以及设置在基板侧的压电体层的表面上的第二电极。 压电材料层夹在第一电极和第二电极之间。 第一电极具有比压电材料层更小的表面积。 压电材料层从第一电极露出的部分包括比第一电极和第二电极之间的压电材料层的厚度薄的部分。 因此，可以构成具有比其普通谐振更高的频率的谐振器，并且容易实现谐振器的谐振频率的调节，以及提高元件的产量并且能够构造电子 该组件包括多个不同频率的谐振器。

公开(公告)号：US06437667B1

公开(公告)日：2002-08-20

申请号：US09497880

申请日：2000-02-04

Applicant: Bradley Paul Barber ,  Linus Albert Fetter ,  George E. Rittenhouse ,  Michael George Zierdt

Inventor： Bradley Paul Barber ,  Linus Albert Fetter ,  George E. Rittenhouse ,  Michael George Zierdt

IPC: H03H954

CPC classification number: H03H9/564 ,  H03H3/04 ,  H03H9/568 ,  H03H2003/0435

Abstract: The present invention provides a method for tuning a thin film resonator (TFR) filter comprising a plurality of TFR components formed on a substrate. Each of the TFR components has a set of resonant frequencies that depend on material parameters and construction. TFR bandpass filter response for example can be produced by shifting the set of resonant frequencies in at least one of the series branch TFR components so as to establish the desired shape of the bandpass response and the desired performance of the filter. The shifting may be advantageously performed by removing piezoelectric material from the series branch TFR component, providing a TFR filter with bandwidth and attenuation advantages over that conventionally achieved by down-shifting resonant frequency sets of the shunt TFR components by adding metal material. Additionally, the above method can be used to produce a stopband TFR filter with a desired response by removing piezoelectric material from the shunt branch TFR component, to up-shift the shunt TFR components' set of resonant frequencies with respect to the series branch TFR components.

Abstract translation: 本发明提供了一种用于调谐薄膜谐振器（TFR）滤波器的方法，该滤波器包括形成在基板上的多个TFR分量。 每个TFR组件具有取决于材料参数和结构的一组谐振频率。 TFR带通滤波器响应例如可以通过在串联分支TFR分量中的至少一个中移位谐振频率的集合来产生，以便建立期望的带通响应形状和滤波器的期望性能。 可以有利地通过从串联分支TFR组件去除压电材料来实现移位，从而提供比通过添加金属材料降低分流TFR分量的谐振频率组通常实现的带宽和衰减优点的TFR滤波器。 另外，上述方法可以用于通过从分流分支TFR分量去除压电材料来产生具有期望响应的阻带TFR滤波器，以使相对于串联分支TFR分量的分流TFR分量的谐振频率集合上移 。

公开(公告)号：US20020089395A1

公开(公告)日：2002-07-11

申请号：US09755007

申请日：2001-01-05

Inventor： Juha Ella ,  Helena Pohjonen

IPC: H03H009/58

CPC classification number: H03H9/589 ,  H03H3/04 ,  H03H2003/0428 ,  H03H2003/0435 ,  H03H2003/0471 ,  Y10T29/42

Abstract: A method of fabricating a plurality of bulk acoustic wave (BAW) resonators on a single substrate, and the corresponding product, the BAW resonators having substantially different resonant frequencies, the method including the steps of: providing a substrate having an upper facing surface; depositing an isolation structure on the upper facing surface of the substrate; depositing a first metallic layer on the isolation structure, the first metallic layer serving as a bottom electrode; and depositing piezolayer material on the bottom electrode so as to have thicknesses corresponding to each of the different resonant frequencies, each different thickness located in a location where a resonator having a resonant frequency corresponding to the thickness is to be located. In one of several embodiments, the step of depositing piezolayer material on the bottom electrode itself includes the steps of: depositing piezolayer material to a thickness corresponding to the lowest frequency resonator; providing hard mask material over areas where the lowest frequency resonators are to be located; and removing the piezolayer material down to the thickness of the next higher frequency resonators. In some applications of the method, the isolation structure is an acoustic mirror, and the method further includes the step of providing the acoustic mirror, interposed between the substrate and the bottom electrode, according to a design that imparts to the acoustic mirror a desired reflection coefficient over a predetermined range of frequency including the substantially different resonant frequencies.

Abstract translation: 一种在单个衬底上制造多个体声波（BAW）谐振器的方法，以及相应的产品，具有基本上不同谐振频率的BAW谐振器，该方法包括以下步骤：提供具有上表面的衬底; 在衬底的上表面上沉积隔离结构; 在隔离结构上沉积第一金属层，第一金属层用作底部电极; 以及在底部电极上沉​​积压电层材料，以便具有对应于每个不同谐振频率的厚度，每个不同的厚度位于具有对应于厚度的谐振频率的谐振器的位置。 在几个实施例中的一个实施例中，在底部电极本身上沉积压电层材料的步骤包括以下步骤：将压电层材料沉积到对应于最低频率谐振器的厚度; 在最低频率谐振器所在的区域上提供硬掩模材料; 并将压电层材料移至下一个更高频谐振器的厚度。 在该方法的一些应用中，隔离结构是声反射镜，并且该方法还包括提供介于基板和底部电极之间的声反射镜的步骤，该设计赋予声镜以期望的反射 系数在包括基本上不同谐振频率的预定频率范围内。

公开(公告)号：US06307447B1

公开(公告)日：2001-10-23

申请号：US09432040

申请日：1999-11-01

Applicant: Bradley Paul Barber ,  Yiu-Huen Wong ,  Peter L. Gammel

Inventor： Bradley Paul Barber ,  Yiu-Huen Wong ,  Peter L. Gammel

IPC: H03H954

CPC classification number: H03H9/564 ,  H03H3/04 ,  H03H2003/0428 ,  H03H2003/0435 ,  Y10T29/42

Abstract: The present invention is a method for adjusting different resonant frequencies of a plurality of mechanical resonators formed on a common substrate, in a case where the resonant frequencies of the resonators are a function of each resonator thickness. According to this method the resonators are each formed with an etchable top electrode layer which includes a material having different etching properties as a topmost layer for each of the resonators having different resonant frequencies. By selectively etching these etchable layers one at a time in the presence of the others, one may adjust the resonant frequencies of each of the resonators without need to mask the resonators during the etching process. Associated with this method there is a resonator structure having a top electrode structure having a topmost layer having different etching characteristics for different resonators.

Abstract translation: 本发明是在谐振器的谐振频率为每个谐振器厚度的函数的情况下，调整形成在公共基板上的多个机械谐振器的不同谐振频率的方法。 根据该方法，谐振器各自形成有可蚀刻的顶部电极层，其包括具有不同蚀刻性质的材料作为具有不同谐振频率的每个谐振器的最顶层。 通过在其他存在的情况下一次一个地选择性地蚀刻这些可蚀刻层，可以调整每个谐振器的谐振频率，而不需要在蚀刻过程期间掩蔽谐振器。 与该方法相关联的是具有顶部电极结构的谐振器结构，其具有不同谐振器的具有不同蚀刻特性的最顶层。

公开(公告)号：US5698928A

公开(公告)日：1997-12-16

申请号：US516221

申请日：1995-08-17

Applicant: Luke Mang ,  Sung P. Pack ,  Dean Barker

Inventor： Luke Mang ,  Sung P. Pack ,  Dean Barker

IPC: C23C14/06 ,  C23C14/08 ,  C23F4/00 ,  H01L21/306 ,  H01L41/09 ,  H01L41/22 ,  H03H9/17 ,  H04R17/00 ,  H01L41/08

CPC classification number: H03H9/172 ,  H03H9/02133 ,  H03H2003/0435

Abstract: An array of thin film piezoelectric resonators are formed on a substrate and connected in parallel to form a single piezoelectric resonator with enhanced piezoelectric coupling. The array includes a first conductive layer positioned on the substrate and defining a first electrode, a plurality of columns of piezoelectric material positioned on the conductive layer and each defining a separate piezoelectric resonator, and a second conductive layer positioned on the plurality of columns and defining a second electrode. The columns are selectively deposited or deposited as a single layer and etched into columns.

Abstract translation: 薄膜压电谐振器阵列形成在基板上并联连接，形成具有增强的压电耦合的单个压电谐振器。 所述阵列包括位于所述衬底上并限定第一电极的第一导电层，位于所述导电层上的多个压电材料列，每个限定分离的压电谐振器，以及定位在所述多个柱上的第二导电层，并且限定 第二电极。 柱被选择性地沉积或沉积为单层并蚀刻成柱。

公开(公告)号：US1996241A

公开(公告)日：1935-04-02

申请号：US58570132

申请日：1932-01-09

Applicant: RCA CORP

Inventor： DAVID GRIMES

IPC: H03H9/17 ,  H03H9/19

CPC classification number: H03H9/17 ,  H03H2003/0435