Abstract:
A substrate processing apparatus includes a processing vessel evacuated by an evacuation system and including therein a stage for holding thereon a substrate to be processed, the processing vessel defining therein a processing space, a processing gas supply path that introduces an etching gas into the processing vessel, a plasma source that forms plasma in the processing space, and a high-frequency source connected to the stage. The processing vessel includes therein a shielding plate dividing the processing space into a first processing space part including a surface of the substrate to be processed and a second processing space part corresponding to a remaining part of the processing space, wherein the shielding plate is formed with an opening having a size larger than a size of the substrate to be processed.
Abstract:
An object is to provide a compact power transmission device which comprises a small number of parts and is compact in size, and which can transmit the rotation of a rotary shaft to a wheel with a high reduction ratio.A rotary shaft 11 is provided so as to be coaxial with an inner member 11 which comprises a hub ring 4 and a bearing inner ring 5. External gears 16a and 16b are rotatably provided around eccentric portions 14a and 14b formed on the rotary shaft 11. The external gears 16a and 16b mesh with internal teeth 18 formed on the inner periphery of a casing 1. When the rotary shaft 11 rotates, the external gears 16a and 16b mesh with the internal teeth 18 one after another, so that their centers rotate about the axis of the rotary shaft. When the rotary shaft 11 rotates once, the external gears 16a and 16b rotate about their own axes by an amount corresponding to the difference in number between the external teeth 17 and the internal teeth 18. The rotation of the external gears about their axes is transmitted through a torque transmission means 20 to the inner member 3, thereby rotating the inner member 3 at a reduced speed.
Abstract:
A motor-driven wheel driving apparatus has two planetary reduction gear mechanisms arranged within the outer member, forming a part of the wheel bearing. The apparatus is positioned at the outboard side end of the inner member.
Abstract:
An object is to improve fuel consumption efficiency. Accordingly, a fuel gradual addition delay time when starting (engine water temperature) TMKSTDLYT which changes in a decreasing trend with an increase in the engine water temperature is set (step S10). A fuel gradual addition delay time when starting (state of charge)TMKSTDLYQ which changes in an increasing trend with an increase in the state of charge QBAT is set (step S12 and S14). A fuel gradual addition delay time when starting (vehicle speed) TMKSTDLYV which changes in a decreasing trend with an increase in vehicle speed VP is set (step S13 and S15). Then the greatest value of; the fuel gradual addition delay time when starting (engine water temperature)TMKSTDLYT, the fuel gradual addition delay time when starting (state of charge)TMKSTDLYQ, and the fuel gradual addition delay time when starting (vehicle speed) TMKSTDLYV is set as a fuel gradual addition delay time when starting TMKSTDLY (step S16).
Abstract:
A rectangular screen is defined on the front surface of a second enclosure coupled to a first enclosure. The second enclosure rotates relative to the first enclosure around a first rotation axis established along a first side of the rectangular screen and around a second rotation axis defined within a plane perpendicular to the first rotation axis. A fingerprint sensor is located on the front surface of the second enclosure outside a second side of the rectangular screen intersecting with the first side. When the second enclosure takes an upright attitude relative to the first enclosure, or when the back surface of the second enclosure is received on the front surface of the first enclosure based on the rotation around the first and second axes, the authentication of fingerprints can reliably can be achieved in a facilitated manner irrespective of the relative position between the first and second enclosures.
Abstract:
An image processing apparatus performs variable-length compression on the image data of each block included in one page, and adds a bit to the resultant code data of each block to make it have a constant data length. The apparatus stores the data length of the added bit. On the other hand, the apparatus stores a variable-length code from which the added bit is erased in a storage. If it is determined that respective bits are added to all blocks to make them have the constant data length, the apparatus adds respective bits of different data lengths to variable-length codes read from the storage, thereby converting the data lengths of the blocks into a shorter constant data length than the constant data length.
Abstract:
A control apparatus for a hybrid vehicle which comprises an internal-combustion engine and a motor as a power source, and connects at least one of the internal-combustion engine and the motor to driving wheels of the vehicle through a transmission so as to transmit a driving force to the driving wheels, comprises: a target torque setting device which sets a target torque with respect to a crank end torque, which is a torque at the end of a crank shaft, of the power plant torque output from the power plant being the internal combustion engine and the motor, based on a change of accelerator pedal opening from fully opened to fully closed; and a torque allocation device which allocates the target torque corresponding to the accelerator pedal opening, to an engine torque instruction, being a required value with respect to the output torque from the internal combustion engine, and to a motor torque instruction, being a required value with respect to the output torque from the motor. The generation of torque fluctuations which are not expected by the occupants of the vehicle are suppressed, and a torque which unerringly reflects the driver's intention is output.
Abstract:
An FI/AT/MGECU in a control unit calculates an EV travel capable battery terminal discharge power which is the dischargeable power from a battery during EV travel which is travel under the driving force from the motor, according to a state of charge of the battery and a vehicle travelling speed. Based on the calculated EV travel capable battery terminal discharge power and a predetermined limit value, an energy management charge-discharge required battery terminal power is calculated. Then an energy management charge-discharge required torque corresponding to the energy management charge-discharge required battery terminal power, that is the motor torque capable of being output, is calculated based on; a predetermined PDU-MOT overall efficiency efima which is the conversion efficiency of the electric power and the motive power between the power drive unit and the motor, a rotation frequency of the motor, and a predetermined torque limit value for protecting the motor.
Abstract:
In a color image-forming medium, a substrate is coated with a color-developing layer which is composed of at least one kind of heat-sensitive color-developing component, and a plurality of pressure-sensitive microcapsules. Each of the pressure-sensitive microcapsules is filled with a dye exhibiting a first single-color, and features a pressure/temperature characteristic to be broken when being subjected to a predetermined pressure within a first temperature range. The heat-sensitive color-developing component features a thermal color-developing characteristic to develop a second single color within a second temperature range defined by a first critical temperature and a second temperature. The first critical temperature is in the first temperature range, and the second critical temperature exceeds an upper limit temperature of the first temperature range.
Abstract:
The invention relates to a fuel electrode for high-temperature solid electrolyte fuel cells and a process for manufacture of the electrode. The fuel electrode of the invention is a porous element composed of a high-melting metal, such as ruthenium, osmium, rhodium or iridium, or an alloy containing the metal. The process for manufacture of the fuel electrode comprises coating an electrode material with a solution or dispersion of the high-melting metal and/or its chloride, sintering the same and finally reducing the product.