公开(公告)号：US20030142306A1

公开(公告)日：2003-07-31

申请号：US10327313

申请日：2002-12-20

Inventor： W. Daniel Hillis ,  Bran Ferren

IPC: G01J003/28

CPC classification number: G01N21/31 ,  G01J3/42 ,  G01N2021/1795 ,  G01N2021/3513

Abstract: A method and apparatus for obtaining atmospheric spectroscopy measurements from an observation platform using retroreflectors is disclosed. The observation platform is located above the surface of a planetary body, and at least one retroreflector is located on the surface of the planetary body. Electromagnetic radiation from a radiation source that is incident upon the retroreflector is reflected to a spectrometer located on the observation platform. By analyzing the received radiation, the spectrometer obtains atmospheric spectroscopy measurements for the atmospheric region through which the incident and reflected radiation pass.

Abstract translation: 公开了一种使用后向反射器从观测平台获得大气光谱测量的方法和装置。 观察平台位于行星体的表面上方，并且至少一个后向反射器位于行星体的表面上。 来自入射到后向反射器的辐射源的电磁辐射被反射到位于观察平台上的光谱仪。 通过分析接收到的辐射，光谱仪获得大气区域的大气光谱测量，通过该区域入射和反射辐射通过。

公开(公告)号：US20030071994A1

公开(公告)日：2003-04-17

申请号：US09974571

申请日：2001-10-09

Inventor： Peter G. Borden ,  Jiping Li ,  Jon Madsen

IPC: G01J003/28

CPC classification number: G01N21/9501 ,  G01N21/274 ,  G01N21/55 ,  G01N21/95607

Abstract: Two more measurements are made on the same workpiece, during fabrication. Each measurement may be made employing a different process. The measurements are used together to determine a property of the workpiece. For example, multiple measurements from a first process are used with a predetermined value of the property of interest in a simulator to generate a simulated value of a signal to be measured in a second process. One or more such simulated values and a measured value are used to identify a value of the property of interest. When the workpiece's property is found to not match the specification, a process control parameter used in the workpiece's fabrication is adjusted, thereby to implement process control.

Abstract translation: 在制造过程中，在同一工件上进行两次测量。 可以使用不同的处理来进行每个测量。 这些测量结果一起用于确定工件的特性。 例如，来自第一处理的多个测量与模拟器中感兴趣的属性的预定值一起使用，以在第二过程中产生要测量的信号的模拟值。 使用一个或多个这样的模拟值和测量值来识别感兴趣的属性的值。 当发现工件的特性不符合规范时，调整工件制造中使用的过程控制参数，从而实现过程控制。

公开(公告)号：US20030043373A1

公开(公告)日：2003-03-06

申请号：US10227135

申请日：2002-08-23

Applicant: Respironics, Inc.

Inventor： James T. Russell

IPC: G01J003/28

CPC classification number: G01J3/36 ,  G01J3/06 ,  G01J3/18 ,  G01N21/3504

Abstract: A robust, compact spectrometer apparatus for determining respective concentrations or partial pressures of multiple gases in a gas sample with single as well as multiple and even overlapping, absorption or emission spectra that span a wide spectral range.

公开(公告)号：US20020180970A1

公开(公告)日：2002-12-05

申请号：US09958458

申请日：2001-10-05

Inventor： Michael R. Hammer ,  Philip V. Wilson ,  Mark R. Williams ,  Dower C. Bricker ,  Martin K. Masters ,  Stewart R. Campbell ,  Peter G. Layton

IPC: G01J003/28

CPC classification number: G01J3/36 ,  G01J3/02 ,  G01J3/0213 ,  G01J3/0227 ,  G01J3/0229 ,  G01J3/0232 ,  G01J3/1809 ,  G01J3/2803 ,  G01J5/62 ,  G01J2003/1828 ,  G01N21/27 ,  G01N21/31

Abstract: A method and apparatus for the spectrochemical analysis of a sample in which a solid state array detector (82) is used to detect radiation (62) of spectrochemical interest. The invention involves the use of a shutter (72) adjacent the entrance aperture (70) of a polychromator (74-80) to expose the detector (82) to the radiation (62) for varying lengths of time whereby for short duration exposure times charge accumulation in elements (i.e. pixels) of the detector (82) due to high intensity components of the radiation is limited and for longer exposure times charge accumulation in elements (pixels) of the detector (82) due to feeble intesity components of radiation (62) is increased. This ensures that each reading of the detector (82) includes at least one exposure in which the amount of charge accumulated at each wavelength of interest is neither too little or too great. The problems of feeble radiation components not being accurately measurable and of high intensity radiation components exceeding the charge carrying capacity of elements (pixels) of the detector (82) are thereby able to be avoided. An attenuator (90) may be placed between the radiation source (60) and the detector (82) to permit longer exposure times to be used for very high intensity radiation.

Abstract translation: 用于对样品进行光谱化学分析的方法和装置，其中固态阵列检测器（82）用于检测分光光度的辐射（62）。 本发明涉及使用与多色调剂（74-80）的入口孔（70）相邻的快门（72）将检测器（82）暴露于辐射（62）以改变长度的时间，从而短时间曝光时间 由于辐射的高强度分量，检测器（82）的元件（即，像素）中的电荷累积受到限制，并且由于辐射的微弱的肥胖分量，对于更长的曝光时间来检测器（82）的元件（像素）中的电荷累积 62）增加。 这确保了检测器（82）的每次读取包括至少一次曝光，其中在每个感兴趣波长处累积的电荷量既不太小也不太大。 因此能够避免无法精确测量的微弱辐射成分和超过检测器（82）的元件（像素）的电荷承载能力的高强度辐射成分的问题。 衰减器（90）可以放置在辐射源（60）和检测器（82）之间，以允许更长的曝光时间用于非常高强度的辐射。

公开(公告)号：US20020171828A1

公开(公告)日：2002-11-21

申请号：US10184953

申请日：2002-07-01

Applicant: Nova Measuring Instruments Ltd.

Inventor： Yoel Cohen ,  Moshe Finarov

IPC: G01J003/28

CPC classification number: G03F7/70558

Abstract: A method and measuring tool are presented for automatic control of photoresist-based processing of a workpiece progressing through a processing tool arrangement. Spectrophotometric measurements are applied to the workpiece prior to being processed, spectral characteristics of the workpiece are measured, thereby obtaining measured data indicative of at least one parameter of the workpiece that defines an optimal value of at least processing time parameter of the processing tool to be used in the processing of said workpiece to obtain certain process results. This data is analyzed to determine data indicative of the optimal value of said at least processing time parameter, and thereby enable calculation of a correction value to be applied to said processing time parameter prior to applying the processing tool to the workpiece.

Abstract translation: 提出了一种方法和测量工具，用于自动控制通过加工工具布置进行的工件的基于光致抗蚀剂的处理。 在处理之前将分光光度测量值应用于工件，测量工件的光谱特性，从而获得指示工件的至少一个参数的测量数据，其将处理工具的至少处理时间参数的最佳值定义为 用于处理所述工件以获得一定的工艺结果。 分析该数据以确定指示所述至少处理时间参数的最佳值的数据，从而能够在将加工工具应用于工件之前计算要应用于所述处理时间参数的校正值。

公开(公告)号：US20020164114A1

公开(公告)日：2002-11-07

申请号：US10120869

申请日：2002-04-11

Inventor： John E. Golub ,  David A. Smith ,  Harry Presley ,  Zhuoyu Bao

IPC: G02B006/26 ,  G01J003/28

CPC classification number: G02B6/356 ,  G02B6/266 ,  G02B6/2931 ,  G02B6/29313 ,  G02B6/29395 ,  G02B6/3512 ,  G02B6/3518 ,  G02B6/3542 ,  G02B6/357 ,  G02B6/3582 ,  H04Q11/0005 ,  H04Q2011/0016 ,  H04Q2011/0022 ,  H04Q2011/0024 ,  H04Q2011/003 ,  H04Q2011/0049 ,  H04Q2011/0052

Abstract: An optical cross connect, especially a wavelength cross connect, using free-space optics, a diffraction grating, and a micro electromechanical systems (MEMS) array of movable mirrors. A concentrator receives light from widely separated optical fibers and brings the beams together into a more closely spaced linear array. Free-space optics process all the beams. Front-end optics collimate the beams from the fibers and flatten their fields. The diffraction grating spectrally separates each beam into sub-beams. A long-focus lens focuses the sub-beams onto the 2-dimensional MEMS array. A fold mirror reflectively couples two such mirrors, whereby the switched signals propagate back through the same optics and are spectrally recombined onto the fibers. Other embodiments include white-color cross connects, multiple MEMS arrays, and parallel optics. Power dividers or wavelength interleavers can divide signals from the fibers, and multiple cross connects switch different wavelength groups.

Abstract translation: 光学交叉连接，特别是波长交叉连接，使用自由空间光学，衍射光栅和可移动镜的微机电系统（MEMS）阵列。 集中器接收来自广泛分离的光纤的光，并将光束组合成更紧密间隔的线阵。 自由空间光学处理所有的光束。 前端光学器件使来自光纤的光束准直，并使其场平坦化。 衍射光栅将每个光束光谱分离成子光束。 长焦距透镜将子光束聚焦到二维MEMS阵列上。 折叠镜反射地耦合两个这样的反射镜，由此开关信号通过相同的光学器件传播回来并且光谱地重新结合到光纤上。 其他实施例包括白色交叉连接，多个MEMS阵列和并行光学器件。 功率分配器或波长交织器可以分离来自光纤的信号，并且多个交叉连接切换不同的波长组。

公开(公告)号：US20020135762A1

公开(公告)日：2002-09-26

申请号：US09991362

申请日：2001-11-16

Inventor： Jian Wang ,  Ronald K. Hanson

IPC: G01J003/28

CPC classification number: G01N21/3504 ,  G01J3/42 ,  G01J5/60 ,  G01N2021/1793 ,  G01N2201/1211

Abstract: A method and apparatus for temperature-independent determination of a concentration of a probe gas in a sample over a selected temperature range between a low temperature TL corresponding to a lowest temperature expected or found in the sample and a high temperature TH corresponding to a highest temperature expected or found in the sample. In accordance with the method, a probe temperature function of the probe gas is determined over the temperature range using a first spectroscopic technique. Then, a second spectroscopic technique is selected, a reference gas is identified and a reference temperature function of the reference gas is determined using the second spectroscopic technique over the temperature range. In particular, the reference gas is identified such that a ratio of the probe temperature function and the reference temperature function is substantially constant over the temperature range. A probe reaction of the probe gas and a reference reaction of the reference gas is then measured by the first and second spectroscopic techniques and the concentration of the probe gas is derived from the probe reaction and reference reaction. The method of the invention can be take advantage of spectroscopic techniques such as absorption spectroscopy employing a test beam of light at several wavelengths with at least one wavelength for either probe transition or reference transition. The method and apparatus can be used in monitoring various gas samples and are especially well-suited for determining probe gas concentrations in samples which exhibit non-uniformities in temperature, pressure and gas composition, e.g., as encountered in vehicle exhaust samples.

Abstract translation: 一种温度独立确定样品中探针气体浓度在选定温度范围内的温度独立测定值，该温度范围是对应于样品预期或发现的最低温度的低温TL与对应于最高温度的高温TH 在样品中预期或发现。 根据该方法，使用第一光谱技术在温度范围内测定探针气体的探针温度函数。 然后，选择第二光谱技术，在温度范围内使用第二光谱技术鉴定参考气体并且确定参考气体的参考温度函数。 特别地，识别参考气体，使得探针温度函数和参考温度函数的比率在温度范围内基本上是恒定的。 然后通过第一和第二光谱技术测量探针气体和参考气体的参考反应的探针反应，并且探针气体的浓度源自探针反应和参考反应。 本发明的方法可以利用光谱技术，例如使用具有至少一个波长的探测转换或参考转变的几个波长的测试光束的吸收光谱。 该方法和装置可以用于监测各种气体样品，并且特别适用于确定在温度，压力和气体成分中表现出不均匀性的样品中的探测气体浓度，例如在车辆排气样品中遇到的浓度。

公开(公告)号：US20020001079A1

公开(公告)日：2002-01-03

申请号：US09871538

申请日：2001-05-31

Inventor： Riccardo Paolinetti ,  Silvano Pieri ,  Andrea Romoli

IPC: G01J003/14 ,  G01J003/28

CPC classification number: G02B17/0888 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/0218 ,  G01J3/0243 ,  G01J3/14 ,  G02B19/0028 ,  G02B19/0085

Abstract: The spectrometer comprises, in combination: a slit (1) for the entry of a light beam; a collimator; a dispersion system (9); focusing means and a detector (13). The collimator comprises at least a first concave spherical mirror (3) and at least a first Schmidt plate (5) in an off-axis arrangement.

Abstract translation: 光谱仪组合包括用于进入光束的狭缝（1）; 准直器 分散系统（9）; 聚焦装置和检测器（13）。 准直器包括至少第一凹球面镜（3）和至少第一施密特板（5），其处于离轴布置。

公开(公告)号：US20010043327A1

公开(公告)日：2001-11-22

申请号：US09827455

申请日：2001-04-06

Inventor： Bryan Barney ,  Leonard Kamlet ,  Alson Spores

IPC: G01J003/28

CPC classification number: G01J3/10 ,  G01J3/28 ,  G01N21/31 ,  G01N21/9501 ,  G01N2021/3568

Abstract: A method and apparatus for spectral identification of a material based on a spectral signature. The method is ideally suited for thin film substrate characterization, as found in semiconductor wafer and optical thin film processing.

Abstract translation: 一种用于基于光谱特征的材料的光谱识别的方法和装置。 该方法非常适用于半导体晶片和光学薄膜处理中发现的薄膜基板表征。

公开(公告)号：US20010038451A1

公开(公告)日：2001-11-08

申请号：US09877847

申请日：2001-06-08

Inventor： Wayne D. Jung ,  Russell W. Jung ,  Alan R. Loudermilk

IPC: G01J003/18 ,  G01J003/28

CPC classification number: G01J3/51 ,  G01J1/0242 ,  G01J1/04 ,  G01J1/06 ,  G01J3/02 ,  G01J3/0218 ,  G01J3/0229 ,  G01J3/0254 ,  G01J3/0259 ,  G01J3/0264 ,  G01J3/0272 ,  G01J3/0278 ,  G01J3/0283 ,  G01J3/0291 ,  G01J3/2803 ,  G01J3/508 ,  G01J3/513

Abstract: Optical characteristic measuring systems and methods such as for determining the color or other optical characteristics of teeth are disclosed. Perimeter receiver fiber optics preferably are spaced apart from a source fiber optic and receive light from the surface of the object/tooth being measured. Light from the perimeter fiber optics pass to a variety of filters. The system utilizes the perimeter receiver fiber optics to determine information regarding the height and angle of the probe with respect to the object/tooth being measured. Under processor control, the optical characteristics measurement may be made at a predetermined height and angle. Various color spectral photometer arrangements are disclosed. Translucency, fluorescence, gloss and/or surface texture data also may be obtained. Audio feedback may be provided to guide operator use of the system. The probe may have a removable or shielded tip for contamination prevention. A method of producing dental prostheses based on measured data also is disclosed. Measured data also may be stored and/or organized as part of a patient data base. Such methods and implements may be desirably utilized for purposes of detecting and preventing counterfeiting or the like. Preferably, a two stage spectral separation is utilized, preferably utilizing a diffraction grating and interference filters.

Abstract translation: 公开了用于确定牙齿的颜色或其他光学特性的光学特性测量系统和方法。 周边接收机光纤优选地与源光纤间隔开，并且从被测量的物体/齿的表面接收光。 来自周边光纤的光通过各种滤光片。 该系统利用周边接收器光纤来确定关于探头相对于被测量物体/齿的高度和角度的信息。 在处理器控制下，可以以预定的高度和角度进行光学特性测量。 公开了各种颜色光谱光度计布置。 还可以获得半透明度，荧光，光泽度和/或表面纹理数据。 可以提供音频反馈以指导操作者使用该系统。 探头可能具有可移除或屏蔽的尖端，以防止污染。 还公开了一种基于测量数据生产牙科假体的方法。 测量的数据也可以存储和/或组织为患者数据库的一部分。 为了检测和防止伪造等目的，可以期望地使用这些方法和装置。 优选地，利用两级光谱分离，优选利用衍射光栅和干涉滤光器。