公开(公告)号：US20020084718A1

公开(公告)日：2002-07-04

申请号：US10046259

申请日：2002-01-16

申请人： Murata Manufacturing Co., Ltd.

发明人： Masatoshi Nakagawa ,  Makoto Tose ,  Yoshihiro Koshido ,  Michio Kadota ,  Toshimaro Yoneda ,  Takeshi Nakao

IPC分类号： H04R017/00 ,  H02N002/00 ,  H05K003/20

CPC分类号： H03H9/14541 ,  H03H9/02669 ,  Y10T29/42 ,  Y10T29/49002 ,  Y10T29/49005 ,  Y10T29/4908 ,  Y10T29/49128

摘要： A surface acoustic wave device includes a piezoelectric plate and at least one interdigital electrode provided on the piezoelectric plate. The interdigital electrode includes a first metallic thin film and a second metallic thin film laminated on the first metallic thin film and containing tantalum as a principal component, and at least a portion of the tantalum of the second metallic thin film is null-tantalum.

摘要翻译： 表面声波装置包括压电板和设置在压电板上的至少一个叉指电极。 叉指电极包括层叠在第一金属薄膜上并以钽为主要成分的第一金属薄膜和第二金属薄膜，第二金属薄膜的至少一部分钽为α-钽。

公开(公告)号：US06353371B1

公开(公告)日：2002-03-05

申请号：US09503542

申请日：2000-02-14

申请人： Michio Kadota ,  Harou Morii ,  Junya Ago

发明人： Michio Kadota ,  Harou Morii ,  Junya Ago

IPC分类号： H03H964

CPC分类号： H03H9/6436 ,  H03H9/02669 ,  H03H9/6463

摘要： A transversely coupled surface acoustic wave filter includes a surface acoustic wave substrate having opposing first and second end surfaces, and first and second interdigital transducers provided on the surface acoustic wave substrate. The first and second interdigital transducers define first and second surface acoustic wave resonators which use a wave including a shear horizontal wave as its main component. The first and second surface acoustic wave resonators are connected to define a transversally coupled resonator filter. The filter preferably has a relative dielectric constant E=∈s11/∈0 in the range of about 0 to about 3000 and the electromechanical coupling coefficient K is such that K2·∈s11/∈0 is in the range of about 0 to about 250. Also, the aperture length y is preferably within the range of: 0.945+5.49×exp(−E/366) ≧y≧2.46×exp(−E/219).

摘要翻译： 横向耦合表面声波滤波器包括具有相对的第一和第二端面的表面声波衬底以及设置在表面声波衬底上的第一和第二叉指换能器。 第一和第二叉指换能器限定使用包括剪切水平波作为其主要成分的波的第一和第二声表面波谐振器。 第一和第二表面声波谐振器被连接以限定横向耦合的谐振滤波器。 滤波器优选地具有在约0至约3000的范围内的相对介电常数E =∈s11 /∈0，并且机电耦合系数K使得K2.∈s11/∈0在约0至约250的范围内 另外，孔径长度y优选在0.945±5.49×exp（-E / 366）> = y> = 2.46×exp（-E / 219）的范围内。

公开(公告)号：US06346864B1

公开(公告)日：2002-02-12

申请号：US09494857

申请日：2000-02-01

申请人： Michio Kadota

发明人： Michio Kadota

IPC分类号： H03H964

CPC分类号： H03H9/6433 ,  H03H9/0038 ,  H03H9/0042 ,  H03H9/02669 ,  H03H9/6459 ,  H03H9/6463

摘要： A SAW resonator filter which generates Shear Horizontal type surface acoustic waves includes a piezoelectric substrate, and first and second resonators arranged on the piezoelectric substrate. The first and second resonators include first and second interdigital transducers having electrode fingers, respectively. The first and second interdigital transducers are acoustically coupled to form a filter, and are divided into a plurality of sub-interdigital transducer portions, respectively. By dividing the interdigital transducers to have multiple sub-IDT portions, the effective electromechanical coupling coefficient is reduced, thereby enabling the bandwidth to be made narrower. Further, the improvement in the electrode structure allows for the filter to use a piezoelectric substrate having excellent temperature characteristics, so that it is possible to achieve a SAW resonator filter having a narrow bandwidth and superior temperature characteristics. Moreover, when an edge reflection type SAW resonator filter using SH-type surface acoustic waves is made, it is possible to provide a compact bandpass filter having low insertion loss and excellent selectability.

摘要翻译： 产生剪切水平型声表面波的SAW谐振滤波器包括压电基片，以及布置在压电基片上的第一和第二谐振器。 第一和第二谐振器分别包括具有电极指的第一和第二叉指式换能器。 第一和第二叉指换能器被声学耦合以形成滤波器，并且分别被分成多个子叉指式换能器部分。 通过划分叉指式换能器以具有多个子IDT部分，有效的机电耦合系数减小，从而使带宽变窄。 此外，电极结构的改进允许滤波器使用具有优异的温度特性的压电基片，从而可以实现窄带宽和优异的温度特性的SAW谐振滤波器。 此外，当使用使用SH型表面声波的边缘反射型SAW谐振器滤波器时，可以提供具有低插入损耗和优异选择性的紧凑型带通滤波器。

公开(公告)号：US06127769A

公开(公告)日：2000-10-03

申请号：US103322

申请日：1998-06-23

申请人： Michio Kadota ,  Hideya Horiuchi ,  Mamoru Ikeura

发明人： Michio Kadota ,  Hideya Horiuchi ,  Mamoru Ikeura

IPC分类号： H03H9/02 ,  H03H9/25 ,  H03H9/64 ,  H01L41/08

CPC分类号： H03H9/6436 ,  H03H9/02669 ,  H03H9/02716 ,  H03H9/02771 ,  H03H9/02795 ,  H03H9/6446 ,  H03H9/6469 ,  H03H9/6483

摘要： A surface acoustic wave device includes a surface acoustic wave substrate having first and second end surfaces, and a surface acoustic wave element provided on the surface acoustic wave substrate and operating using an SH-type surface acoustic wave. The surface acoustic wave element includes an interdigital transducer having a plurality of electrode fingers and a reflector having a plurality of electrode fingers. One of a pair of outermost electrode fingers is flush with one of the first and second end surfaces of the surface acoustic wave substrate, and the reflector is located at a side where the other of the pair of outermost electrode fingers is positioned, so that a SH-type surface acoustic wave excited by the IDT is confined between the reflector and the one of the first and second end surfaces.

摘要翻译： 表面声波装置包括具有第一和第二端面的表面声波基板和设置在表面声波基板上并使用SH型表面声波进行操作的表面声波元件。 表面声波元件包括具有多个电极指的交叉指型换能器和具有多个电极指的反射器。 一对最外面的电极指中的一个与声表面波基板的第一和第二端面之一齐平，并且反射器位于一对最外电极指的另一侧所在的一侧，使得 由IDT激发的SH型表面声波被限制在反射器与第一和第二端面之一之间。

公开(公告)号：US6088462A

公开(公告)日：2000-07-11

申请号：US348108

申请日：1999-07-06

申请人： Koji Fujimoto ,  Michio Kadota ,  Toshimaro Yoneda

发明人： Koji Fujimoto ,  Michio Kadota ,  Toshimaro Yoneda

IPC分类号： H03H9/145 ,  H03H9/02 ,  H03H9/25 ,  H04R25/00

CPC分类号： H03H9/02669 ,  H03H9/02551

摘要： A surface acoustic wave device includes a quartz rotated Y-cut plate and at least one interdigital transducer disposed on the quartz rotated Y-cut plate. The quartz rotated Y-cut plate has a Euler angle represented by (0, .theta., .phi.). The angle .theta. is within a range of about 125.degree.

摘要翻译： 表面声波装置包括石英旋转Y切割板和设置在石英旋转Y切割板上的至少一个叉指换能器。 石英旋转Y切割板具有由（0，θ，phi）表示的欧拉角。 角度θ在大约125°<130°的范围内或其等同角度，并且角度φi约为90度。 叉指式换能器由钨制成。

公开(公告)号：US5977686A

公开(公告)日：1999-11-02

申请号：US8138

申请日：1998-01-15

申请人： Michio Kadota ,  Kazuhiko Morozumi ,  Haruo Morii

发明人： Michio Kadota ,  Kazuhiko Morozumi ,  Haruo Morii

IPC分类号： H03H9/145 ,  H01L41/08 ,  H03H9/02 ,  H03H9/25 ,  H03H9/64

CPC分类号： H03H9/6433 ,  H03H9/02669 ,  H03H9/6463 ,  H03H9/02622

摘要： A transversal-coupled resonator type surface acoustic wave filter includes a piezoelectric substrate and first and second interdigital transducers. The piezoelectric substrate has a pair of substrate edges which are substantially parallel to each other and reflect a shear horizontal type surface wave excited and propagated on a surface of the piezoelectric substrate in a direction perpendicular to the substrate edges. The first and second interdigital transducers have the same resonance characteristics and are provided on the piezoelectric substrate. Each of the first and second interdigital transducers includes a pair of outermost electrode fingers which are arranged to be flush with the substrate edges of the piezoelectric substrate, respectively and a pair of adjacent electrode fingers which are adjacent to the pair of the outermost electrode fingers, respectively. A distance D' from one of the substrate edges of the piezoelectric substrate to a center of the corresponding adjacent electrode fingers satisfies the following inequalities:.lambda./2

摘要翻译： 横向耦合谐振器型表面声波滤波器包括压电基片和第一和第二指数间换能器。 压电基板具有基本上彼此平行的一对基板边缘，并且在垂直于基板边缘的方向上反射在压电基板的表面上激发和传播的剪切水平型表面波。 第一和第二叉指换能器具有相同的谐振特性，并且设置在压电基片上。 第一和第二叉指换能器中的每一个包括分别与压电基板的基板边缘齐平的一对最外面的电极指，以及与一对最外面的电极指相邻的一对相邻的电极指， 分别。 从压电基板的一个基板边缘到对应的相邻电极指的中心的距离D'满足以下不等式：λ/ 2

公开(公告)号：US5953433A

公开(公告)日：1999-09-14

申请号：US38716

申请日：1998-01-28

申请人： Koji Fujimoto ,  Michio Kadota ,  Toshimaro Yoneda

发明人： Koji Fujimoto ,  Michio Kadota ,  Toshimaro Yoneda

IPC分类号： H03H9/145 ,  H03H9/02 ,  H03H9/25 ,  H04R25/00 ,  H04R1/02 ,  H04R1/20

CPC分类号： H03H9/02669 ,  H03H9/02551

摘要： A surface acoustic wave device includes a quartz rotated Y-cut plate and at least one interdigital transducer disposed on the quartz rotated Y-cut plate. The quartz rotated Y-cut plate has a Euler angle represented by (0, .theta., .o slashed.). The angle .theta. is within a range of about 125.degree.

摘要翻译： 表面声波装置包括石英旋转Y切割板和设置在石英旋转Y切割板上的至少一个叉指换能器。 石英旋转Y切割板具有由（0，θ，+ 526）表示的欧拉角。 角度θ在约125°<130°或其等同范围内，角度+526约为90度。 叉指式换能器由钨制成。

公开(公告)号：US5952899A

公开(公告)日：1999-09-14

申请号：US76531

申请日：1998-05-12

申请人： Michio Kadota ,  Takeshi Nadota ,  Toshimaro Yoneda ,  Junya Ago

发明人： Michio Kadota ,  Takeshi Nadota ,  Toshimaro Yoneda ,  Junya Ago

IPC分类号： H03H9/02 ,  H03H9/25 ,  H03H9/64

CPC分类号： H03H9/02905 ,  H03H9/02669 ,  H03H9/6483

摘要： A ladder filter includes a plurality of series arm resonators and a plurality of parallel arm resonators. The series arm resonators are connected in series to form a series arm of a ladder circuit and are located at a first integrated region. Each series arm resonator includes an edge-reflection surface acoustic wave (SAW) resonator which has a piezoelectric material portion and a pair of edges thereof and utilizes a shear horizontal surface acoustic wave to be excited on the piezoelectric material portion. Each of the parallel arm resonators is connected in parallel between the series arm and a ground potential to form a parallel arm of a ladder circuit. Each of the parallel arm resonators includes an edge reflection SAW resonator which has a piezoelectric material portion with a pair of edges thereof and utilizes a shear horizontal surface acoustic wave to be excited on the piezoelectric material portion. The parallel arm resonators include a first group of at least two parallel arm resonators which are located at a second integrated region which is physically isolated from the first integrated region such that the shear horizontal surface acoustic wave excited on the piezoelectric material portion in the first integrated region does not interfere with the shear horizontal type surface acoustic wave excited in the second integrated region.

摘要翻译： 梯形滤波器包括多个串联臂谐振器和多个并联臂谐振器。 串联臂谐振器串联连接形成梯形电路的串联臂并位于第一集成区域。 每个串联臂谐振器包括具有压电材料部分和一对边缘的边缘反射表面声波（SAW）谐振器，并利用剪切水平声波在压电材料部分上被激发。 每个并联臂谐振器并联连接在串联臂和地电位之间，以形成梯形电路的并联臂。 每个并联臂谐振器包括边缘反射SAW谐振器，该边缘反射SAW谐振器具有一个具有一对边缘的压电材料部分，并利用剪切水平声波在压电材料部分上被激发。 并联臂谐振器包括：第一组至少两个并联臂谐振器，其位于与第一集成区域物理隔离的第二集成区域，使得在第一集成区域中的压电材料部分上激发的剪切水平声表面波 区域不干扰在第二集成区域中激发的剪切水平型声表面波。

公开(公告)号：US5781083A

公开(公告)日：1998-07-14

申请号：US613074

申请日：1996-03-08

申请人： Hideya Horiuchi ,  Michio Kadota ,  Junya Ago

发明人： Hideya Horiuchi ,  Michio Kadota ,  Junya Ago

IPC分类号： H03H9/02 ,  H03H9/145 ,  H03H9/25 ,  H03H9/64 ,  H04N5/44 ,  H03H9/00

CPC分类号： H03H9/02669 ,  H03H9/1452

摘要： A free edge reflective-type surface wave resonator for reflecting SH-type surface waves between two confronting free edges of a piezoelectric substrate includes a piezoelectric substrate having two confronting free edges and an interdigital transducer having a plurality of electrode fingers which are weighted by a cross width weighting method or an electrode thinning method. The weighting of the electrode fingers is performed so that an attenuation pole of a main lobe of the weighted IDT is located outside of a frequency of an attenuation pole of a normal non-weighted IDT which has the same number of electrode finger pairs as the weighted IDT. The weighting of the electrodes is such that the main lobe of the weighted IDT and a plurality of resonance characteristics determined by the attenuation poles of the normal unweighted IDT are obtained.

摘要翻译： 用于在压电基板的两个相对自由边缘之间反射SH型表面波的自由边反射型表面波谐振器包括具有两个相对自由边缘的压电基片和具有多个电极指的叉指换能器，该多个电极指由十字 宽度加权法或电极稀化法。 执行电极指的加权，使得加权IDT的主瓣的衰减极点位于正常非加权IDT的衰减极点的频率之外，该正常非加权IDT具有与加权的相同数量的电极指对对的频率 IDT。 电极的加权使得获得加权IDT的主瓣和由正常未加权IDT的衰减极点确定的多个谐振特性。

公开(公告)号：US5684437A

公开(公告)日：1997-11-04

申请号：US623631

申请日：1996-03-28

申请人： Junya Ago ,  Michio Kadota

发明人： Junya Ago ,  Michio Kadota

IPC分类号： H03H9/25 ,  H03H9/02 ,  H03H9/08 ,  H03H9/15 ,  H03H9/64

CPC分类号： H03H9/02669 ,  H03H9/02653 ,  H03H9/02677

摘要： An end face reflection type surface wave resonator utilizing a surface wave of an SH type is constructed by forming comb electrodes on one major surface of a piezoelectric substrate, which constitute an IDT, and forming grooves extending from one major surface to the other major surface to form a pair of end faces on which a surface wave is to be reflected the resonator having piezoelectric plate portions outside the grooves.

摘要翻译： 利用SH型表面波的端面反射型表面波谐振器通过在构成IDT的压电基板的一个主表面上形成梳状电极，并且形成从一个主表面延伸到另一主表面的凹槽 形成一对端面，使表面波在凹槽外侧具有压电板部分的谐振器被反射。