公开(公告)号：US20140107944A1

公开(公告)日：2014-04-17

申请号：US14054149

申请日：2013-10-15

Applicant: Purdue Research Foundation

Inventor： Dor Ben-Amotz ,  Bradley J. Lucier ,  Gregery T. Buzzard ,  David Wilcox ,  Ping Wang

IPC: G01N21/25

CPC classification number: G01N21/25 ,  G01J3/44 ,  G01N21/65 ,  G01N2201/0675 ,  G01N2201/129

Abstract: A method for measuring a sample to identify a chemical includes receiving respective spectra for each of a plurality of chemicals. Using a processor, a plurality of binary mathematical filters are computed using the received spectra. A spatial light modulator is adjusted according to a selected mathematical filter. Light that has interacted with the sample is dispersed over the surface of the spatial light modulator, so that the spatial light modulator provides light at wavelengths corresponding to the selected mathematical filter. The light provided by the spatial light modulator is measured to provide a score corresponding to the selected mathematical filter. Filter scores are combined to determine a chemical amount. The processor can operate detection apparatus having a light source, an objective for focusing source light onto the sample, a spatial light modulator, and a detector for detecting the modulator output.

Abstract translation: 用于测量样品以鉴定化学品的方法包括接收多种化学品中的每一种的相应光谱。 使用处理器，使用接收的光谱来计算多个二进制数学滤波器。 根据所选择的数学滤波器调整空间光调制器。 已经与样品相互作用的光分散在空间光调制器的表面上，使得空间光调制器提供对应于所选择的数学滤波器的波长的光。 测量由空间光调制器提供的光以提供对应于所选数学滤波器的分数。 过滤分数结合以确定化学量。 处理器可以操作具有光源的检测装置，用于将源光聚焦到样本上的物镜，空间光调制器和用于检测调制器输出的检测器。

公开(公告)号：US20130003068A1

公开(公告)日：2013-01-03

申请号：US13174815

申请日：2011-07-01

Applicant: Shankar Krishnan ,  Haiming Wang

Inventor： Shankar Krishnan ,  Haiming Wang

IPC: G01N21/55 ,  G01J1/42

CPC classification number: G01N21/55 ,  G01B11/065 ,  G01B2210/56 ,  G01J3/021 ,  G01J3/0229 ,  G01J3/42 ,  G01N21/00 ,  G01N21/211 ,  G01N2021/213 ,  G01N2021/214 ,  G01N2201/0675

Abstract: A spectroscopic instrument for conducting multi-wavelength, multi-azimuth, multi-angle-of-incidence readings on a substrate, the instrument having a broadband light source for producing an illumination beam, an objective for directing the illumination onto the substrate at multiple azimuth angles and multiple angels-of-incidence simultaneously, thereby producing a reflection beam, an aperture plate having an illumination aperture and a plurality of collection apertures formed therein for selectively passing portions of the reflection beam having desired discreet combinations of azimuth angle and angle-of-incident, a detector for receiving the discreet combinations of azimuth angle and angle-of-incident and producing readings, and a processor for interpreting the readings.

Abstract translation: 一种用于在衬底上进行多波长，多方位角，多角度入射读数的光谱仪器，该仪器具有用于产生照明光束的宽带光源，用于将多个方位角的照明引导到衬底上的物镜 角度和多个入射角，从而产生反射光束，具有照明孔的孔板和形成在其中的多个收集孔，用于选择性地通过具有期望的方位角和角度的离散组合的反射光束的部分 - 用于接收方位角和入射角的离散组合并产生读数的检测器，以及用于解释读数的处理器。

公开(公告)号：US20120307247A1

公开(公告)日：2012-12-06

申请号：US13149620

申请日：2011-05-31

Applicant: Piau Siong Tan ,  Xiaocong Yuan

Inventor： Piau Siong Tan ,  Xiaocong Yuan

IPC: G01N21/55

CPC classification number: G01N21/648 ,  G01N21/45 ,  G01N21/6458 ,  G01N2201/0675 ,  G02B5/008 ,  G02B21/16

Abstract: A fluorescence microscopy method and system, the method comprising the steps of applying optical vortices to a metal surface for generating surface plasmon resonance (SPR) waves at the metal surface; and collecting fluorescence light excited by the SPR waves; wherein a dynamic characteristic of the optical vortices is controlled for controlling interference patterns of the SPR waves.

Abstract translation: 一种荧光显微镜方法和系统，所述方法包括以下步骤：将光学旋涡应用于金属表面，以在金属表面产生表面等离子体共振（SPR）波; 并收集由SPR波激发的荧光; 其中控制光学旋涡的动态特性以控制SPR波的干涉图案。

公开(公告)号：US20120236310A1

公开(公告)日：2012-09-20

申请号：US13497290

申请日：2010-09-22

Applicant: Frédéric Lesage ,  Samuel Bélanger ,  Maxime Abran ,  Jean Provost

Inventor： Frédéric Lesage ,  Samuel Bélanger ,  Maxime Abran ,  Jean Provost

IPC: G01N21/59

CPC classification number: G01N21/4795 ,  A61B5/0073 ,  A61B5/0091 ,  A61B5/4312 ,  G01N21/6456 ,  G01N21/763 ,  G01N2021/1787 ,  G01N2021/479 ,  G01N2201/0675

Abstract: A system and method for optical data acquisition of an illuminated turbid medium object, the system comprises a variable structured light detector and a controller. The light detector is adapted to retrieve light from a plurality of detection points of an output surface of the illuminated turbid medium object with a plurality of detection patterns. The controller is adapted to control the variable structured light detector for the variable structured light detector to use a detection pattern corresponding to an illumination pattern of the illuminated turbid medium object. The light detector is further adapted to optically measure a combination of retrieved light from the plurality of detection points as an optical measurement. The controller is further adapted to store an illumination pattern identifier indicative of the illumination pattern, a detection pattern identifier indicative of the detection pattern and the corresponding optical measurement.

Abstract translation: 一种用于光学数据采集的照明混浊介质物体的系统和方法，该系统包括可变结构光检测器和控制器。 光检测器适于用多个检测图案从照明的浑浊介质物体的输出表面的多个检测点检索光。 控制器适于控制可变结构光检测器的可变结构光检测器，以使用与照明混浊介质物体的照明图案相对应的检测图案。 光检测器还适于光学测量来自多个检测点的检索光的组合作为光学测量。 控制器还适于存储指示照明模式的照明模式标识符，指示检测模式的检测模式标识符和对应的光学测量。

公开(公告)号：US20110096337A1

公开(公告)日：2011-04-28

申请号：US12907712

申请日：2010-10-19

Applicant: Futoshi Hirose ,  Kenichi Saito

Inventor： Futoshi Hirose ,  Kenichi Saito

IPC: G01B9/02

CPC classification number: G02B26/06 ,  A61B3/102 ,  A61B3/14 ,  G01N21/21 ,  G01N21/4795 ,  G01N2021/1787 ,  G01N2201/0675 ,  G02F2203/12 ,  G02F2203/18

Abstract: An adaptive optics apparatus includes a light modulation unit configured to modulate each of two polarization components of light at a position that is optically conjugate to an object, the light being emitted by a light source; and an irradiation unit configured to irradiate the object with light that is modulated by the light modulation unit.

Abstract translation: 一种自适应光学装置，包括：光调制单元，被配置为调制与物体光学共轭的位置处的光的两个偏振分量中的每一个，所述光由光源发射; 以及被配置为用由所述光调制单元调制的光照射所述物体的照射单元。

公开(公告)号：US07693324B2

公开(公告)日：2010-04-06

申请号：US11160707

申请日：2005-07-06

Applicant: Gernot Brasen ,  Christian Laue ,  Matthias Loeffler ,  Heiko Theuer

Inventor： Gernot Brasen ,  Christian Laue ,  Matthias Loeffler ,  Heiko Theuer

IPC: G06K9/00

CPC classification number: G01N21/95607 ,  G01N2201/0675 ,  H01L21/67288

Abstract: The present invention provides a method, an optical inspection apparatus as well as a computer program product for optical inspection of a surface. The optical inspection apparatus can be effectively applied for optical inspection of periodic structures on e.g. a semi-conductor wafer for the purpose of quality control. By effectively splitting a light beam into a plurality of spatially separated light beams and by selective usage of these light beams, various surface segments of the surface can be inspected simultaneously by superposition of respective images. A resulting superposition image can then be compared with a reference image for detection of defects of the surface.

Abstract translation: 本发明提供一种光学检查装置以及用于光学检查表面的计算机程序产品的方法。 光学检查装置可以有效地应用于例如周期性结构的光学检查。 半导体晶片，用于质量控制。 通过将光束有效地分割成多个空间分离的光束并且通过选择性地使用这些光束，可以通过叠加各个图像同时检查表面的各种表面段。 然后可以将所得到的叠加图像与用于检测表面缺陷的参考图像进行比较。

公开(公告)号：US20090323052A1

公开(公告)日：2009-12-31

申请号：US12145708

申请日：2008-06-25

Applicant: Shai Silberstein ,  Tsafrir Avni

Inventor： Shai Silberstein ,  Tsafrir Avni

IPC: G01N21/00

CPC classification number: G01N21/9501 ,  G01N21/9503 ,  G01N21/95607 ,  G01N21/95623 ,  G01N2021/8825 ,  G01N2201/067 ,  G01N2201/0675 ,  G01N2201/0697 ,  G01N2201/1241

Abstract: An optical inspection system or tool can be configured to inspect objects using dynamic illumination where one or more characteristics of the illumination is/are adjusted to meet the inspection needs of different areas. For example, the illumination intensity may be increased or decreased as the tool inspects areas of memory and periphery features in a wafer die. In some embodiments, the adjustment can be based on data obtained during a pre-inspection setup sequence in which images taken based on illumination with varying characteristics are evaluated for suitability in the remainder of the inspection process.

Abstract translation: 光学检查系统或工具可以被配置为使用动态照明来检查物体，其中调整照明的一个或多个特征以满足不同区域的检查需要。 例如，当工具检查晶片管芯中的存储器区域和外围特征时，可以增加或减小照明强度。 在一些实施例中，调整可以基于在预检查设置顺序期间获得的数据，其中基于具有变化特性的照明拍摄的图像被评估为在检查过程的其余部分中的适用性。

公开(公告)号：US20040206906A1

公开(公告)日：2004-10-21

申请号：US10753614

申请日：2004-01-08

Applicant: Southwest Research Institute

Inventor： Thomas E. Owen

IPC: G01N021/35

CPC classification number: G01N21/3518 ,  G01J3/0232 ,  G01J3/427 ,  G01N21/05 ,  G01N21/314 ,  G01N21/3504 ,  G01N21/61 ,  G01N33/004 ,  G01N33/0054 ,  G01N2021/3125 ,  G01N2021/3137 ,  G01N2201/0675 ,  G01N2201/1211 ,  G01N2201/1218 ,  Y02A50/244 ,  Y02A50/246

Abstract: A gas sensor, whose chamber uses filters and choppers in either a semicircular geometry or annular geometry, and incorporates separate infrared radiation filters and optical choppers. This configuration facilitates the use of a single infrared radiation source and a single detector for infrared measurements at two wavelengths, such that measurement errors may be compensated.

Abstract translation: 气体传感器，其室使用半圆形几何形状或环形几何形状的过滤器和斩波器，并且包含单独的红外辐射滤波器和光学切割器。 这种配置有助于在两个波长处使用单个红外辐射源和单个检测器用于红外测量，从而可以补偿测量误差。

公开(公告)号：US20040188643A1

公开(公告)日：2004-09-30

申请号：US10396760

申请日：2003-03-24

Applicant: Photon Dynamics, Inc.

Inventor： Adam Weiss ,  Afsar Saranli ,  Oleksiy Lopatin ,  Alexandre Obotnine

IPC: G01V008/00

CPC classification number: G01N21/95623 ,  G01N21/21 ,  G01N2021/1772 ,  G01N2021/8477 ,  G01N2201/0612 ,  G01N2201/0675

Abstract: In an inspection system for planar objects having periodic structures, programmable optical Fourier filtering in the focal plane of a telecentric lens system is used to directly identify physical phenomena indicative of non-periodic defects. Lens assemblies and a coherent optical source are used to generate and observe a spatial Fourier transform of a periodic structure in the Fourier plane. Optical Fourier filtering (OFF) is performed in the focal plane using an electrically programmable and electrically alignable spatial light modulator. The spatial light modulator with high signal to noise ratio is electrically reconfigurable according to a feedback-driven, filter construction and alignment algorithm. The OFF enhances any non-periodic components present in the Fourier plane and final image plane of the object. A system having a plurality of inspection channels provides high-throughput inspection of objects with small non-periodic defects while maintaining high detection sensitivity.

Abstract translation: 在具有周期结构的平面物体的检查系统中，使用远心透镜系统的焦平面中的可编程光学傅立叶滤波来直接识别指示非周期性缺陷的物理现象。 透镜组件和相干光源用于产生和观察傅立叶平面中周期性结构的空间傅立叶变换。 光学傅立叶滤波（OFF）在焦平面上使用电可编程且电可对准的空间光调制器执行。 具有高信噪比的空间光调制器根据反馈驱动的滤波器构造和对准算法进行电可重构。 OFF增强存在于对象的傅立叶平面和最终图像平面中的任何非周期性分量。 具有多个检查通道的系统提供具有小的非周期缺陷的物体的高通量检查，同时保持高检测灵敏度。

公开(公告)号：US5504575A

公开(公告)日：1996-04-02

申请号：US79691

申请日：1993-06-17

Applicant: Ronald E. Stafford

Inventor： Ronald E. Stafford

IPC: G01J3/28

CPC classification number: G01J3/28 ,  G01J2003/2866 ,  G01J3/021 ,  G01J3/0229 ,  G01N2201/0675

Abstract: A SLM spectrometer is provided that employs an entrance slit or a collimator to provide parallel rays of radiation to a prism which disperses the incident radiation into an associated wavelength spectrum. The resulting spectrum from the prism is incident upon a spatial light modulator (SLM), such as a deformable mirror device (DMD). By selectively activating (or deactivating) a small portion of the surface of the SLM, i.e. a cell on the SLM, it is possible to selectively reflect or transmit a portion of the spectrum incident upon the SLM onto a focusing device, such as a parabolic focusing mirror. The focusing device in turn focuses the portion of the spectrum reflected by the selected cells on the SLM to a sensor. The wavelength selected is a function of which row of cells are activated (or deactivated) in the SLM. The SLM spectrometer of the present invention may be used to analyze visible light and light that is near visible, such as the near infrared or ultraviolet regions. The output of the sensor or detector may be appropriately amplified and after appropriate calibration employed to determine the amount of energy in a particular wavelength or band of wavelengths.

Abstract translation: 提供SLM光谱仪，其使用入射狭缝或准直器来向棱镜提供平行射线以将入射的辐射分散到相关的波长光谱中。 来自棱镜的所得光谱入射到空间光调制器（SLM），例如可变形反射镜装置（DMD）。 通过选择性地激活（或去激活）SLM的表面的一小部分，即SLM上的单元，可以选择性地将入射到SLM上的光谱的一部分反射或发射到聚焦装置上，例如抛物线 聚焦镜。 聚焦装置又将由SLM上所选单元反射的光谱的一部分聚焦到传感器。 选择的波长是在SLM中激活（或停用）单元格行的功能。 本发明的SLM光谱仪可用于分析近似可见光的可见光和近红外或紫外线区域的光。 传感器或检测器的输出可以被适当地放大，并且在用于确定特定波长或波长带中的能量的量的适当校准之后。