公开(公告)号：US20220186359A1

公开(公告)日：2022-06-16

申请号：US17485170

申请日：2021-09-24

申请人： BOE Technology Group Co., Ltd.

发明人： Nianqi YAO ,  Ce NING ,  Zhengliang LI ,  Hehe HU ,  Dapeng XUE ,  Lizhong WANG ,  Shuilang DONG ,  Jie HUANG ,  Jiayu HE ,  Lubin SHI ,  Yancai LI

IPC分类号： C23C14/50

摘要： A fixture, a tray and a sputtering system. The fixture is internally provided with a support structure and a clamping structure connected with each other, wherein the clamping structure is configured to clamp a to-be-sputtered substrate; an orthographic projection of the clamping structure on a plane where the support structure is located and the support structure share an superimposed area and are separate in non-superimposed areas; wherein the support structure located in the non-superimposed area and/or the clamping structure located in the non-superimposed area has a first hollowed structure. The fixture is internally provided with the first hollowed structure, such that a part of an area of the to-be-sputtered substrate covered by the fixture may be exposed via the first hollowed structure when the fixture holds the to-be-sputtered substrate, so as to reduce the area of the to-be-sputtered substrate covered by the fixture.

公开(公告)号：US20210129140A1

公开(公告)日：2021-05-06

申请号：US16647386

申请日：2019-09-24

申请人： BOE TECHNOLOGY GROUP CO., LTD.

发明人： Xiaochen MA ,  Guangcai YUAN ,  Ce NING ,  Xin GU ,  Hehe HU

IPC分类号： B01L3/00 ,  B01L9/00 ,  G01N21/63 ,  G01N21/05

摘要： A microfluidic channel structure and a fabrication method thereof, a microfluidic detecting device and a detecting method thereof are disclosed. The microfluidic channel structure includes a support portion; a foundation portion, provided on the support portion and including a first foundation and a second foundation spaced apart from each other; and a channel defining portion, provided on a side of the foundation portion that is away from the support portion and including a first channel layer and a second channel layer, the first channel layer covering the first foundation and the second channel layer covering the second foundation have a gap therebtween to define a microfluidic channel; and the first channel layer and the second channel layer are made of a same material.

公开(公告)号：US20190123069A1

公开(公告)日：2019-04-25

申请号：US16166356

申请日：2018-10-22

申请人： BOE TECHNOLOGY GROUP CO., LTD.

发明人： Wei YANG ,  Hehe HU ,  Xinhong LU

IPC分类号： H01L27/12 ,  H01L29/786 ,  H01L29/66

摘要： The present disclosure relates to array substrate, preparation method thereof and display panel. An array substrate comprises: a first thin film transistor and a second thin film transistor over a substrate; wherein the first thin film transistor comprises a first portion of a first insulating layer, the first insulating layer comprises a first recess corresponding to the second thin film transistor, and the second thin film transistor is located in the first recess; and wherein a thickness of a second portion of the first insulating layer, which is below the bottom of the first recess, is smaller than that of the first portion of the first insulating layer.

公开(公告)号：US20170243901A1

公开(公告)日：2017-08-24

申请号：US15322460

申请日：2015-11-05

申请人： BOE TECHNOLOGY GROUP CO., LTD.

发明人： Hehe HU

IPC分类号： H01L27/12 ,  H01L21/3213 ,  H01L29/423 ,  H01L21/027

摘要： The present disclosure provides a thin film transistor array substrate, a method for manufacturing the same and a display device. The method includes forming, on a substrate, a gate electrode, a common electrode, a gate insulation layer, an active layer and a source-drain metal layer, and forming, on the resultant substrate, a pixel electrode and a passivation layer by one patterning process.