公开(公告)号：US08405143B2

公开(公告)日：2013-03-26

申请号：US13031910

申请日：2011-02-22

申请人： Chun-Hsien Lin ,  Chao-Ching Hsieh

发明人： Chun-Hsien Lin ,  Chao-Ching Hsieh

IPC分类号： H01L29/792

CPC分类号： H01L29/7833 ,  H01L21/28088 ,  H01L29/4966 ,  H01L29/513 ,  H01L29/66545 ,  H01L29/7843

摘要： A semiconductor device including a substrate, a gate structure, a spacer and source/drain regions is provided. The gate structure is on the substrate, wherein the gate structure includes, from bottom to top, a high-k layer, a work function metal layer, a wetting layer and a metal layer. The spacer is on a sidewall of the gate structure. The source/drain regions are in the substrate beside the gate structure.

摘要翻译： 提供了包括衬底，栅极结构，间隔物和源极/漏极区域的半导体器件。 栅极结构在衬底上，其中栅极结构从底部到顶部包括高k层，功函数金属层，润湿层和金属层。 间隔物位于栅极结构的侧壁上。 源极/漏极区域位于栅极结构旁边的衬底中。

公开(公告)号：US20120326243A1

公开(公告)日：2012-12-27

申请号：US13165795

申请日：2011-06-22

申请人： Hsin-Fu Huang ,  Chi-Mao Hsu ,  Min-Chuan Tsai ,  Chin-Fu Lin ,  Chun-Hsien Lin

发明人： Hsin-Fu Huang ,  Chi-Mao Hsu ,  Min-Chuan Tsai ,  Chin-Fu Lin ,  Chun-Hsien Lin

IPC分类号： H01L21/336 ,  H01L29/78

CPC分类号： H01L29/7833 ,  H01L29/4966 ,  H01L29/513 ,  H01L29/517 ,  H01L29/66545 ,  H01L29/6659

摘要： A transistor having an aluminum metal gate includes a substrate, a high-k gate dielectric layer, an aluminum metal gate and a source/drain region. The high-k gate dielectric layer is disposed on the substrate. The aluminum metal gate includes a work function tuning layer and an aluminum metal layer disposed orderly on the high-k gate dielectric layer, where the aluminum metal layer comprises a first aluminum metal layer and a second aluminum metal layer. Furthermore, the source/drain region is disposed in the substrate at each of two sides of the aluminum metal gate.

摘要翻译： 具有铝金属栅极的晶体管包括衬底，高k栅极电介质层，铝金属栅极和源极/漏极区域。 高k栅极电介质层设置在基板上。 铝金属栅包括工作功能调谐层和铝金属层，该金属层有序地设置在高k栅介质层上，铝金属层包括第一铝金属层和第二铝金属层。 此外，源极/漏极区域设置在铝金属栅极的两侧中的每一侧的基板中。

公开(公告)号：US08239056B2

公开(公告)日：2012-08-07

申请号：US12616681

申请日：2009-11-11

申请人： Chih-Wei Hsu ,  Yu-Jen Cheng ,  Wen-Pin Liu ,  Shun-Ping Wang ,  Shin-Rung Lu ,  Jo Fei Wang ,  Jong-I Mou ,  Andy Tsen ,  Chun-Hsien Lin

发明人： Chih-Wei Hsu ,  Yu-Jen Cheng ,  Wen-Pin Liu ,  Shun-Ping Wang ,  Shin-Rung Lu ,  Jo Fei Wang ,  Jong-I Mou ,  Andy Tsen ,  Chun-Hsien Lin

IPC分类号： G06F19/00

CPC分类号： H01L21/67253 ,  G05B19/41865 ,  H01L21/67276 ,  Y02P90/20

摘要： The present disclosure provides a semiconductor manufacturing method. The method includes providing product data of a product, the product data including a sensitive product parameter; searching existing products according to the sensitive product parameter to identify a relevant product from the existing products; determining an initial value of a processing model parameter to the product using corresponding data of the relevant product; assigning the initial value of the processing model parameter to a processing model associated with a manufacturing process; thereafter, tuning a processing recipe using the processing model; and performing the manufacturing process to a semiconductor wafer using the processing recipe.

摘要翻译： 本发明提供一种半导体制造方法。 该方法包括提供产品的产品数据，产品数据包括敏感产品参数; 根据敏感产品参数搜索现有产品，从现有产品中识别相关产品; 使用相关产品的相应数据确定产品的处理模型参数的初始值; 将处理模型参数的初始值分配给与制造过程相关联的处理模型; 此后，使用该处理模型调整处理配方; 以及使用所述处理配方对所述半导体晶片进行制造处理。

公开(公告)号：US20120146101A1

公开(公告)日：2012-06-14

申请号：US12965933

申请日：2010-12-13

申请人： Chun-Hsien Lin

发明人： Chun-Hsien Lin

IPC分类号： H01L29/04 ,  H01L21/336

CPC分类号： H01L21/823821 ,  H01L21/823807 ,  H01L21/845 ,  H01L27/1108 ,  H01L27/1211

摘要： A method for manufacturing multi-gate transistor devices includes providing a semiconductor substrate having a first patterned hard mask for defining at least a first fin formed thereon, forming the first fin having a first crystal plane orientation on the semiconductor substrate, forming a second patterned hard mask for defining at least a second fin on the semiconductor substrate, forming the second fin having a second crystal plane orientation that is different from the first crystal plane orientation on the semiconductor substrate, forming a gate dielectric layer and a gate layer covering a portion of the first fin and a portion of the second fin on the semiconductor substrate, and forming a first source/drain in the first fin and a second source/drain in the second fin, respectively.

摘要翻译： 一种用于制造多栅极晶体管器件的方法包括提供具有第一图案化硬掩模的半导体衬底，用于限定形成在其上的至少第一鳍片，在半导体衬底上形成具有第一晶面取向的第一鳍片，形成第二图案化硬 掩模，用于在所述半导体衬底上限定至少第二鳍片，形成所述第二鳍片具有与所述半导体衬底上的所述第一晶面取向不同的第二晶面取向，形成栅介电层和覆盖所述半导体衬底的一部分的栅极层 所述第一鳍片和所述第二鳍片的一部分在所述半导体衬底上，并且分别在所述第一鳍片中形成第一源极/漏极和在所述第二鳍片中形成第二源极/漏极。

公开(公告)号：US20120138771A1

公开(公告)日：2012-06-07

申请号：US13073016

申请日：2011-03-28

申请人： WEN-CHIEH LI ,  MENG-KUN CHEN ,  MING-CHIEH TSOU ,  YUNG-SHENG SHEN ,  CHUN-HSIEN LIN

发明人： WEN-CHIEH LI ,  MENG-KUN CHEN ,  MING-CHIEH TSOU ,  YUNG-SHENG SHEN ,  CHUN-HSIEN LIN

IPC分类号： G01C21/00

CPC分类号： G06F3/03547 ,  G06F3/042

摘要： A reflective optical detecting device is for detecting movement of an object in a predetermined area. The reflective optical detecting device includes a light emitting unit, at least two optical detectors, and a comparing unit. The light emitting unit is used for illuminating the predetermined area. The optical detectors are disposed at opposite sides of the light emitting unit, and each of the optical detectors is associated with a respective detection region within the predetermined area for generating an output signal in response to light reflected from the object and detected thereby. The comparing unit is coupled to the optical detectors for receiving the output signal from each of the optical detectors, and is operable to output a comparison result according to the output signal of each of the optical detectors. The comparison result is to be used for determining the movement of the object.

摘要翻译： 反射光学检测装置用于检测物体在预定区域中的移动。 反射光学检测装置包括发光单元，至少两个光学检测器和比较单元。 发光单元用于照亮预定区域。 光学检测器设置在发光单元的相对侧，并且每个光学检测器与预定区域内的相应检测区域相关联，用于响应于从物体反射的光而产生输出信号，并由此检测。 比较单元耦合到光学检测器，用于从每个光学检测器接收输出信号，并且可操作以根据每个光学检测器的输出信号输出比较结果。 比较结果用于确定物体的运动。

公开(公告)号：US08146918B2

公开(公告)日：2012-04-03

申请号：US12687027

申请日：2010-01-13

申请人： Chih-Kun Shih ,  Chen-Lu Fan ,  Chun-Hsien Lin

发明人： Chih-Kun Shih ,  Chen-Lu Fan ,  Chun-Hsien Lin

IPC分类号： B65H29/00

CPC分类号： B41J13/106 ,  B41J13/0036 ,  B41J13/009

摘要： A paper sorting apparatus for an electronic device includes a chassis with a control module disposed therein, a paper transporting module accommodated in the chassis, and a plurality of paper trays attached to the chassis. The paper transporting module has a first end, that is pivotable, and a second end, that is attached to the control module. The control module is capable of rotating the second end about the first end and coupling the second end with one of the paper trays.

摘要翻译： 一种用于电子设备的纸张分拣装置，包括其中设置有控制模块的底盘，容纳在底盘中的纸张传送模块以及附接到底盘的多个纸盘。 纸张传送模块具有可枢转的第一端和连接到控制模块的第二端。 控制模块能够围绕第一端旋转第二端并将第二端与其中一个纸盘联接。

公开(公告)号：US08082055B2

公开(公告)日：2011-12-20

申请号：US12499345

申请日：2009-07-08

申请人： Chun-Hsien Lin ,  Andy Tsen ,  Jui-Long Chen ,  Sunny Wu ,  Jong-I Mou ,  Chia-Hung Huang

发明人： Chun-Hsien Lin ,  Andy Tsen ,  Jui-Long Chen ,  Sunny Wu ,  Jong-I Mou ,  Chia-Hung Huang

IPC分类号： G06F19/00

CPC分类号： G06Q10/06 ,  G06Q30/0202

摘要： A method for providing a bin ratio forecast at an early stage of integrated circuit device manufacturing processes is disclosed. The method comprises collecting historical data from one or more processed wafer lots; collect measurement data from one or more skew wafer lots; generating an estimated baseline distribution from the collected historical data and collected measurement data; generating an estimated performance distribution based on one or more specified parameters and the generated estimated baseline distribution; determining a bin ratio forecast by applying a bin definition and a yield degradation factor estimation to the generated estimated performance distribution; determining one or more production targets based on the bin ratio forecast; and processing one or more wafers based on the one or more determined production targets.

摘要翻译： 公开了一种用于在集成电路器件制造工艺的早期阶段提供容量比预测的方法。 该方法包括从一个或多个处理的晶片批次收集历史数据; 从一个或多个偏斜晶片批量收集测量数据; 从收集的历史数据和收集的测量数据生成估计的基线分布; 基于一个或多个指定参数和所生成的估计基线分布产生估计的性能分布; 通过对所生成的估计性能分布应用仓定义和产量退化因子估计来确定仓比预测; 根据仓比预测确定一个或多个生产目标; 以及基于所述一个或多个确定的生产目标来处理一个或多个晶圆。

公开(公告)号：US08076735B2

公开(公告)日：2011-12-13

申请号：US12572498

申请日：2009-10-02

申请人： Chun-Hsien Lin

发明人： Chun-Hsien Lin

IPC分类号： H01L29/76 ,  H01L29/94 ,  H01L31/062 ,  H01L31/113 ,  H01L31/119 ,  H01L27/108

CPC分类号： H01L29/7843 ,  H01L21/28088 ,  H01L21/28114 ,  H01L21/823807 ,  H01L21/82385 ,  H01L21/823864 ,  H01L29/42376 ,  H01L29/4966 ,  H01L29/66545 ,  H01L29/7833

摘要： A semiconductor device and a method for fabricating the same are described. A polysilicon layer is formed on a substrate. The polysilicon layer is doped with an N-type dopant. A portion of the polysilicon layer is then removed to form a plurality of dummy patterns. Each dummy pattern has a top, a bottom, and a neck arranged between the top and the bottom, where the width of the neck is narrower than that of the top. A dielectric layer is formed on the substrate to cover the substrate disposed between adjacent dummy patterns, and the top of each dummy pattern is exposed. Thereafter, the dummy patterns are removed to form a plurality of trenches in the dielectric layer. A plurality of gate structures is formed in the trenches, respectively.

摘要翻译： 对半导体装置及其制造方法进行说明。 在基板上形成多晶硅层。 多晶硅层掺杂有N型掺杂剂。 然后去除多晶硅层的一部分以形成多个虚拟图案。 每个虚拟图案具有布置在顶部和底部之间的顶部，底部和颈部，其中颈部的宽度比顶部的宽度窄。 在基板上形成电介质层以覆盖设置在相邻虚设图案之间的基板，并且暴露每个虚设图案的顶部。 此后，去除虚拟图案以在电介质层中形成多个沟槽。 在沟槽中分别形成多个栅极结构。

公开(公告)号：US08074981B2

公开(公告)日：2011-12-13

申请号：US12791035

申请日：2010-06-01

申请人： Chih-Kun Shih ,  Chun-Hsien Lin ,  Chen-Lu Fan

发明人： Chih-Kun Shih ,  Chun-Hsien Lin ,  Chen-Lu Fan

IPC分类号： B65H1/00

CPC分类号： B41J13/106 ,  Y10T74/18808

摘要： A printer includes a main body and a paper holding device. The main body is capable of printing and outputting paper. The paper holding device is secured to the main body and includes a paper tray, a connecting mechanism, and a sliding mechanism. The paper tray is configured for receiving the outputted paper. A driving gear member is located on the paper tray. The connecting mechanism is located on the paper tray and connected to the driving gear member. The sliding mechanism is located on the paper tray and connected to the connecting mechanism. The driving gear member controls the sliding mechanism by the connecting mechanism to shape a space to fit the size of the outputted paper.

摘要翻译： 打印机包括主体和纸张保持装置。 主体能够打印和输出纸张。 纸张保持装置固定在主体上，并且包括纸盘，连接机构和滑动机构。 纸盒配置为接收输出的纸张。 驱动齿轮构件位于纸盘上。 连接机构位于纸盘上并连接到驱动齿轮构件。 滑动机构位于纸盘上并连接到连接机构。 驱动齿轮构件通过连接机构来控制滑动机构，以形成适合输出纸张尺寸的空间。

公开(公告)号：US20110148032A1

公开(公告)日：2011-06-23

申请号：US12791035

申请日：2010-06-01

申请人： CHIH-KUN SHIH ,  CHUN-HSIEN LIN ,  CHEN-LU FAN

发明人： CHIH-KUN SHIH ,  CHUN-HSIEN LIN ,  CHEN-LU FAN

IPC分类号： B65H31/20 ,  F16H19/04

CPC分类号： B41J13/106 ,  Y10T74/18808

摘要： A printer includes a main body and a paper holding device. The main body is capable of printing and outputting paper. The paper holding device is secured to the main body and includes a paper tray, a connecting mechanism, and a sliding mechanism. The paper tray is configured for receiving the outputted paper. A driving gear member is located on the paper tray. The connecting mechanism is located on the paper tray and connected to the driving gear member. The sliding mechanism is located on the paper tray and connected to the connecting mechanism. The driving gear member controls the sliding mechanism by the connecting mechanism to shape a space to fit the size of the outputted paper.

摘要翻译： 打印机包括主体和纸张保持装置。 主体能够打印和输出纸张。 纸张保持装置固定在主体上，并且包括纸盘，连接机构和滑动机构。 纸盒配置为接收输出的纸张。 驱动齿轮构件位于纸盘上。 连接机构位于纸盘上并连接到驱动齿轮构件。 滑动机构位于纸盘上并连接到连接机构。 驱动齿轮构件通过连接机构来控制滑动机构，以形成适合输出纸张尺寸的空间。