公开(公告)号：US10768133B2

公开(公告)日：2020-09-08

申请号：US15723661

申请日：2017-10-03

Applicant: STMicroelectronics Pte Ltd

Inventor： Ravi Shankar ,  Olivier Le Neel ,  Tien-Choy Loh ,  Shian-Yeu Kam

IPC: G01N27/12 ,  G01N27/22

Abstract: Miniature resistive gas detectors incorporate thin films that can selectively identify specific gases when heated to certain characteristic temperatures. A solid state gas sensor module is disclosed that includes a gas sensor, a heater, and a temperature sensor, stacked over an insulating recess. The insulating recess is partially filled with a support material that provides structural integrity. The solid state gas sensor module can be integrated on top of an ASIC on a common substrate. With sufficient thermal insulation, such a gas detector can be provided as a low-power component of mobile electronic devices such as smart phones. A method of operating a multi-sensor array allows detection of relative concentrations of different gas species by either using dedicated sensors, or by thermally tuning the sensors to monitor different gas species.

公开(公告)号：US09818937B2

公开(公告)日：2017-11-14

申请号：US14982600

申请日：2015-12-29

Applicant: STMicroelectronics Pte Ltd

Inventor： Olivier Le Neel ,  Ravi Shankar

IPC: H01L21/00 ,  H01L43/14 ,  G01N27/74 ,  H01L21/8234 ,  H01L43/04 ,  H01L43/06 ,  H01L43/10

CPC classification number: H01L43/14 ,  G01N27/74 ,  H01L21/8234 ,  H01L43/04 ,  H01L43/065 ,  H01L43/10 ,  Y10T29/4913

Abstract: A miniature oxygen sensor makes use of paramagnetic properties of oxygen gas to provide a fast response time, low power consumption, improved accuracy and sensitivity, and superior durability. The miniature oxygen sensor disclosed maintains a sample of ambient air within a micro-channel formed in a semiconductor substrate. O2 molecules segregate in response to an applied magnetic field, thereby establishing a measurable Hall voltage. Oxygen present in the sample of ambient air can be deduced from a change in Hall voltage with variation in the applied magnetic field. The magnetic field can be applied either by an external magnet or by a thin film magnet integrated into a gas sensing cavity within the micro-channel. A differential sensor further includes a reference element containing an unmagnetized control sample. The miniature oxygen sensor is suitable for use as a real-time air quality monitor in consumer products such as smart phones.

公开(公告)号：US09448216B2

公开(公告)日：2016-09-20

申请号：US14511280

申请日：2014-10-10

Applicant: STMICROELECTRONICS PTE LTD

Inventor： Yonggang Jin ,  Ravi Shankar

IPC: G01N27/12 ,  G01N33/00

CPC classification number: G01N33/0009 ,  H01L2224/48091 ,  H01L2924/00014

Abstract: A gas sensor device may include a gas sensor integrated circuit (IC) having a gas sensing surface, and bond pads adjacent to the gas sensing surface, and a frame having gas passageways extending therethrough adjacent the gas sensing surface. The gas sensor device may include leads, each having a proximal end spaced from the frame and bonded to a respective bond pad, and a distal end extending downwardly from the proximal end, and encapsulation material filling the space between the proximal ends of the leads and the frame.

Abstract translation: 气体传感器装置可以包括具有气体检测表面的气体传感器集成电路（IC）和与气体感测表面相邻的接合焊盘，以及具有在气体感测表面附近延伸穿过的气体通道的框架。 气体传感器装置可以包括引线，每个引线具有与框架间隔开并且接合到相应的接合焊盘的近端和从近端向下延伸的远端，以及填充引线的近端之间的空间的封装材料和 框架。

公开(公告)号：US20150001659A1

公开(公告)日：2015-01-01

申请号：US13929610

申请日：2013-06-27

Applicant: STMICROELECTRONICS PTE LTD

Inventor： Olivier Le Neel ,  Ravi Shankar ,  Tien Choy Loh

IPC: H01L27/146

CPC classification number: H01L27/14629 ,  H01L27/14634 ,  H01L27/1467 ,  H01L27/14685 ,  H01L27/1469 ,  H01L2924/1461

Abstract: The present disclosure is directed to an infrared sensor that includes a plurality of pairs of support structures positioned on the substrate, each pair including a first support structure adjacent to a second support structure. The sensor includes plurality of pixels, where each pixel is associated with one of the pairs of support structures. Each pixel includes a first infrared reflector layer on the substrate between the first and the second support structures, a membrane formed on the first and second support structures, a thermally conductive resistive layer on the membrane and positioned above the first infrared reflector layer, a second infrared reflector layer on the resistive layer, and an infrared absorption layer on the second infrared reflector layer.

Abstract translation: 本公开涉及一种红外传感器，其包括定位在基板上的多对支撑结构，每对包括邻近第二支撑结构的第一支撑结构。 传感器包括多个像素，其中每个像素与一对支撑结构中的一个相关联。 每个像素包括在第一和第二支撑结构之间的衬底上的第一红外反射器层，形成在第一和第二支撑结构上的膜，膜上的导热电阻层并且位于第一红外反射层之上，第二 电阻层上的红外线反射层，以及第二红外线反射层上的红外线吸收层。

公开(公告)号：US20140294046A1

公开(公告)日：2014-10-02

申请号：US13853801

申请日：2013-03-29

Applicant: STMICROELECTRONICS PTE LTD.

Inventor： Olivier Le Neel ,  Ravi Shankar ,  Suman Cherian

IPC: G01W1/02

CPC classification number: G01W1/02 ,  G01F1/44 ,  G01P5/14

Abstract: Sensors for air flow, temperature, pressure, and humidity are integrated onto a single semiconductor die within a miniaturized Venturi chamber to provide a microelectronic semiconductor-based environmental multi-sensor module that includes an air flow meter. One or more such multi-sensor modules can be used as building blocks in dedicated application-specific integrated circuits (ASICs) for use in environmental control appliances that rely on measurements of air flow. Furthermore, the sensor module can be built on top of existing circuitry that can be used to process signals from the sensors. By integrating the Venturi chamber with accompanying environmental sensors, correction factors can be obtained and applied to compensate for temporal humidity fluctuations and spatial temperature variation using the Venturi apparatus.

Abstract translation: 用于气流，温度，压力和湿度的传感器被集成到小型文丘里室内的单个半导体管芯上，以提供包括空气流量计的基于微电子半导体的环境多传感器模块。 一个或多个这样的多传感器模块可以用作专用于专用集成电路（ASIC）中的构件块，用于依赖于气流测量的环境控制设备。 此外，传感器模块可以建立在可用于处理来自传感器的信号的现有电路之上。 通过将文丘里腔室与随附的环境传感器集成，可以获得校正因子并应用于使用文丘里仪器来补偿时间湿度波动和空间温度变化。