公开(公告)号：US10476001B1

公开(公告)日：2019-11-12

申请号：US16103490

申请日：2018-08-14

Applicant: Newport Fab, LLC

Inventor： Jefferson E. Rose ,  Gregory P. Slovin ,  David J. Howard ,  Michael J. DeBar ,  Nabil El-Hinnawy

IPC: H01L45/00

Abstract: In manufacturing a radio frequency (RF) switch, a heat spreader is provided. A first dielectric is deposited over the heat spreader. A trench is etched in the first dielectric. A heating element is deposited in the trench and over at least a portion of the first dielectric. A thermally conductive and electrically insulating material is deposited over at least the heating element, where the thermally conductive and electrically insulating material is self-aligned with the heating element. A conformability support layer is optionally deposited over the thermally conductive and electrically insulating material and the first dielectric. A phase-change material is deposited over the optional conformability support layer and the underlying thermally conductive and electrically insulating material and the first dielectric.

公开(公告)号：US11793096B2

公开(公告)日：2023-10-17

申请号：US17148413

申请日：2021-01-13

Applicant: Newport Fab, LLC

Inventor： Gregory P. Slovin ,  Nabil El-Hinnawy ,  Jefferson E. Rose ,  David J Howard

IPC: H10N70/00 ,  H10N70/20

CPC classification number: H10N70/861 ,  H10N70/231 ,  H10N70/841 ,  H10N70/882

Abstract: A radio frequency (RF) device includes a phase-change material (PCM) situated over a sheet of thermally conductive and electrically insulating material, a heating element situated under the sheet of thermally conductive and electrically insulating material, and an input/output terminal situated over the PCM. The heating element is situated in a dielectric. A heat spreader is situated under the dielectric and over a substrate. Metal interconnect layers can be situated under and/or over the PCM, with the substrate situated below the metal interconnect layers.

公开(公告)号：US11088322B2

公开(公告)日：2021-08-10

申请号：US16883850

申请日：2020-05-26

Applicant: Newport Fab, LLC

Inventor： Gregory P. Slovin ,  Nabil El-Hinnawy ,  Jefferson E. Rose ,  David J. Howard

IPC: H01L45/00

Abstract: A radio frequency (RF) switch includes a phase-change material (PCM), a heating element underlying an active segment of the PCM and extending outward and transverse to the PCM, a capacitive RF terminal, and an ohmic RF terminal. The capacitive RF terminal can include a first trench metal liner situated on a first passive segment of the PCM, and a dielectric liner separating the first trench metal liner from a first trench metal plug. The ohmic RF terminal can include a second trench metal liner situated on a second passive segment of the PCM, and a second trench metal plug ohmically connected to the second trench metal liner. Alternatively, the capacitive RF terminal and the ohmic RF terminal can include lower metal portions and upper metal portions. A MIM capacitor can be formed by the upper metal portion of the capacitive RF terminal, an insulator, and a patterned top plate.

公开(公告)号：US20210135100A1

公开(公告)日：2021-05-06

申请号：US17148413

申请日：2021-01-13

Applicant: Newport Fab, LLC dba Jazz Semiconductor

Inventor： Gregory P. Slovin ,  Nabil El-Hinnawy ,  Jefferson E. Rose ,  David J. Howard

IPC: H01L45/00

Abstract: A radio frequency (RF) device includes a phase-change material (PCM) situated over a sheet of thermally conductive and electrically insulating material, a heating element situated under the sheet of thermally conductive and electrically insulating material, and an input/output terminal situated over the PCM. The heating element is situated in a dielectric. A heat spreader is situated under the dielectric and over a substrate. Metal interconnect layers can be situated under and/or over the PCM, with the substrate situated below the metal interconnect layers.

公开(公告)号：US10862032B2

公开(公告)日：2020-12-08

申请号：US16692296

申请日：2019-11-22

Applicant: Newport Fab, LLC

Inventor： Jefferson E. Rose ,  David J. Howard ,  Gregory P. Slovin ,  Nabil El-Hinnawy

IPC: H01L45/00

Abstract: A radio frequency (RF) switch includes a heating element, thermally conductive and electrically insulating layer over the heating element, a wetting dielectric layer over the thermally conductive and electrically insulating layer, and a phase-change material (PCM) over the wetting dielectric layer. At least one cladding dielectric layer can be situated over sides and/or over a top surface of the PCM. Each of the wetting dielectric layer, phase change material, and cladding dielectric layer can comprise at least germanium. A transitional dielectric layer can be situated between the thermally conductive and electrically insulating layer and the wetting dielectric layer. A contact uniformity support layer can be situated over the cladding dielectric layer.

公开(公告)号：US10862027B2

公开(公告)日：2020-12-08

申请号：US16557577

申请日：2019-08-30

Applicant: Newport Fab, LLC

Inventor： Gregory P. Slovin ,  Jefferson E. Rose ,  David J. Howard ,  Michael J. DeBar ,  Nabil El-Hinnawy

IPC: H01L45/00 ,  H01L23/66

Abstract: In fabricating a radio frequency (RF) switch, a heat spreader is provided and a heating element is deposited. A thermally conductive and electrically insulating material is deposited over the heating element. The heating element and the thermally conductive and electrically insulating material are patterned, where the thermally conductive and electrically insulating material is self-aligned with the heating element. A layer of an upper dielectric is deposited. A conformability support layer is optionally deposited over the upper dielectric and the thermally conductive and electrically insulating material. A phase-change material is deposited over the optional conformability support layer and the underlying upper dielectric and the thermally conductive and electrically insulating material.

公开(公告)号：US10833261B2

公开(公告)日：2020-11-10

申请号：US16712752

申请日：2019-12-12

Applicant: Newport Fab, LLC

Inventor： Jefferson E. Rose ,  Gregory P. Slovin ,  David J. Howard ,  Michael J. DeBar ,  Nabil El-Hinnawy

IPC: H01L47/02 ,  H01L45/00 ,  H01L23/66 ,  H01L23/525 ,  H01L21/768 ,  H01L23/522 ,  H01L21/283

Abstract: In fabricating a radio frequency (RF) switch, a phase-change material (PCM) and a heating element, underlying an active segment of the PCM and extending outward and transverse to the PCM, are provided. Lower portions of PCM contacts for connection to passive segments of the PCM are formed, wherein the passive segments extend outward and are transverse to the heating element. Upper portions of the PCM contacts are formed from a lower interconnect metal. Heating element contacts are formed cross-wise to the PCM contacts. The heating element contacts can comprise a top interconnect metal directly connecting with terminal segments of the heating element. The heating element contacts can comprise a top interconnect metal and intermediate metal segments for connecting with the terminal segments of the heating element.

公开(公告)号：US10833005B2

公开(公告)日：2020-11-10

申请号：US16683713

申请日：2019-11-14

Applicant: Newport Fab, LLC

Inventor： Nabil El-Hinnawy ,  Gregory P. Slovin ,  Jefferson E. Rose ,  David J. Howard

IPC: H01L23/522 ,  H01L45/00 ,  H01L23/66

Abstract: A radio frequency (RF) switch includes a phase-change material (PCM), a heating element underlying an active segment of the PCM and extending outward and transverse to the PCM, and RF terminals having lower metal portions and upper metal portions. At least one of the lower metal portions can be ohmically separated from and capacitively coupled to passive segments of the PCM, while the upper metal portions are ohmically connected to the lower metal portions. Alternatively, the lower metal portions can be ohmically connected to passive segments of the PCM, while a capacitor is formed in part by at least one of the upper metal portions. Alternatively, at least one of the RF terminals can have a trench metal liner separated from a trench metal plug by a dielectric liner. The trench metal liner can be ohmically connected to passive segments of the PCM, while the trench metal plug is ohmically separated from, but capacitively coupled to, the trench metal liner.

公开(公告)号：US10811605B2

公开(公告)日：2020-10-20

申请号：US16731487

申请日：2019-12-31

Applicant: Newport Fab, LLC dba Jazz Semiconductor

Inventor： David J. Howard ,  Jefferson E. Rose ,  Gregory P. Slovin ,  Nabil El-Hinnawy ,  Michael J. DeBar

IPC: H01L45/00

Abstract: A radio frequency (RF) switch includes a phase-change material (PCM) and a heating element underlying an active segment of the PCM, the PCM and heating element being situated over a substrate. A contact dielectric is over the PCM. PCM contacts have upper portions and uniform plate slot lower portions. The uniform plate slot lower portions have a total plate resistance RPLATE, and a total plate slot interface resistance RPLATE-INT. The upper portions have a total capacitance CUPPER to the uniform plate slot lower portions, and the PCM has a total capacitance CPCM to the substrate. The uniform plate slot lower portions significantly reduce a product of (RPLATE+RPLATE-INT) and (CUPPER+CPCM). As an alternative to the uniform plate slot lower portions, PCM contacts have segmented lower portions. The segmented lower portions significantly reduce CUPPER.

公开(公告)号：US10770389B2

公开(公告)日：2020-09-08

申请号：US16231121

申请日：2018-12-21

Applicant: Newport Fab, LLC

Inventor： Nabil El-Hinnawy ,  Gregory P. Slovin ,  Jefferson E. Rose ,  David J. Howard

IPC: H01L23/522 ,  H01L45/00 ,  H01L23/66

Abstract: A radio frequency (RF) switch includes a phase-change material (PCM), a heating element underlying an active segment of the PCM and extending outward and transverse to the PCM, and RF terminals having lower metal portions and upper metal portions. At least one of the lower metal portions can be ohmically separated from and capacitively coupled to passive segments of the PCM, while the upper metal portions are ohmically connected to the lower metal portions. Alternatively, the lower metal portions can be ohmically connected to passive segments of the PCM, while a capacitor is formed in part by at least one of the upper metal portions. Alternatively, at least one of the RF terminals can have a trench metal liner separated from a trench metal plug by a dielectric liner. The trench metal liner can be ohmically connected to passive segments of the PCM, while the trench metal plug is ohmically separated from, but capacitively coupled to, the trench metal liner.