Method and apparatus to support process tool modules in a cleanspace fabricator
    41.
    发明授权
    Method and apparatus to support process tool modules in a cleanspace fabricator 有权
    在清洁空间制造者中支持过程工具模块的方法和装置

    公开(公告)号:US09457442B2

    公开(公告)日:2016-10-04

    申请号:US12691623

    申请日:2010-01-21

    Abstract: The present invention provides various aspects of support for a processing tool in a fabrication facility capable of routine placement and replacement of processing tools and component assemblies of the tools. Support aspects include a support structure for component assemblies and a quick disconnect flange which facilitates connecting and disconnect of electrical, liquid and gas utilities to a tool component placed in the processing tool.

    Abstract translation: 本发明提供了在制造设备中对处理工具的支持的各个方面,其能够常规地放置和更换工具的加工工具和部件组件。 支撑方面包括用于部件组件的支撑结构和快速断开凸缘,其有助于电气,液体和气体实用程序连接到放置在处理工具中的工具部件。

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