INSPECTION JIG AND CIRCUIT BOARD INSPECTION APPARATUS INCLUDING THE SAME

    公开(公告)号:US20230127957A1

    公开(公告)日:2023-04-27

    申请号:US17910363

    申请日:2021-02-22

    Inventor: Kohei TSUMURA

    Abstract: A circuit board inspection apparatus includes an inspection processing portion that inspects an electric circuit of a board to be inspected, an inspection jig, and a position detector used to position the inspection processing portion relative to the board to be inspected. The inspection jig includes a probe unit having a probe, a first board, a second board located in parallel with the first board in a thickness direction of the first board, an electrical connection portion that electrically connects the first board and the second board, and a second board holding portion that holds the second board from the first board and holds the probe unit on a side opposite to the first board side. The second board holding portion has a position detection opening penetrating in the thickness direction, at a position overlapping the position detector as viewed from the thickness direction of the second board holding portion.

    Resistance measuring device and resistance measuring jig

    公开(公告)号:US11585839B2

    公开(公告)日:2023-02-21

    申请号:US17040555

    申请日:2019-03-04

    Abstract: A resistance measuring device includes: a first jig; a plurality of first contacts; a second jig; a plurality of second contacts; a resistance measuring unit that supplies a current between a first contact and a second contact, which correspond to each other, detects a voltage between a first contact and a second contact, and calculates a resistance value of an object to be measured based on a relationship between a value of the supplied current and a value of the detected voltage; first wirings connecting the resistance measuring unit and each of the first contacts, for the first contacts, respectively; and second wirings connecting the resistance measuring unit and each of the second contacts while passing from the resistance measuring unit through the first jig, for the second contacts, respectively.

    Imaging device, bump inspection device, and imaging method

    公开(公告)号:US11585652B2

    公开(公告)日:2023-02-21

    申请号:US16631844

    申请日:2017-12-26

    Abstract: A bump inspection device images a wafer that includes a plurality of bumps arranged in parallel to each other. Each of the bumps is elongated along a first direction that is along a substrate surface. The bump inspection device includes: a laser-light source that emits laser light in a direction that is inclined relative to the substrate surface; a camera that images the substrate surface onto which the laser light is emitted; and a direction adjusting portion that adjusts an arrangement relation between the direction in which the laser light is emitted and an orientation of the wafer to allow the first direction to become inclined relative to the direction in which the laser light is emitted, in a plan view. The camera images the wafer while the first direction is inclined relative to the direction in which the laser light is emitted, in a plan view.

    INSPECTION DEVICE
    44.
    发明申请

    公开(公告)号:US20230024921A1

    公开(公告)日:2023-01-26

    申请号:US17785920

    申请日:2020-12-01

    Inventor: Takashi ISA

    Abstract: An upper mechanism including a table provided with a placement surface of an inspection target, a lower mechanism configured to rotatably support the upper mechanism, and a lifting operation unit configured to be supported by the upper mechanism so as to be movable up and down are provided. The lower mechanism includes a rotation drive unit configured to rotate the upper mechanism, and a push-up force output unit configured to lift and lower the lifting operation unit. A transmission member with which a tip of the push-up force output unit can contact or separate is provided at a lower end of the lifting operation unit.

    Probe, inspection jig, inspection device, and method for manufacturing probe

    公开(公告)号:US11454650B2

    公开(公告)日:2022-09-27

    申请号:US17043770

    申请日:2019-05-27

    Abstract: A probe has a substantially bar shape, and includes a tip end, a base end, and a body portion that is located between the tip end and the base end and has a thickness in a thickness direction orthogonal to an axial direction of the substantially bar shape thinner than the tip end. The body portion includes a slope surface that is continuous with the tip end and is inclined with respect to the axial direction in a direction in which the thickness becomes gradually thinner with increasing distance from the tip end. A first region having a surface shape that bulges outward is provided in at least a part of the slope surface.

    CONTACT TERMINAL, INSPECTION JIG, AND INSPECTION DEVICE

    公开(公告)号:US20220155346A1

    公开(公告)日:2022-05-19

    申请号:US17598918

    申请日:2020-03-12

    Abstract: In a contact terminal, the first insertion portion includes a first contact portion having a first flat surface along an axial direction, the second insertion portion includes a second contact portion having a second flat surface along the axial direction, the first flat surface and the second flat surface are in contact with each other, the tubular body includes at least one of a first end side notch provided along the axial direction on a peripheral surface of the one end portion in the axial direction of the tubular body and a second end side notch provided along the axial direction on a peripheral surface of the other end portion in the axial direction of the tubular body.

    Inspection jig, and inspection device including the same

    公开(公告)号:US11327094B2

    公开(公告)日:2022-05-10

    申请号:US17043688

    申请日:2019-02-28

    Inventor: Norihiro Ota

    Abstract: An inspection jig includes a support member that supports a probe. The support member includes an inspection side plate-shaped body arranged on one end portion side, and an electrode side plate-shaped body arranged on the other end portion side of the support member. A probe support hole into which one end portion of the probe is inserted and supported is formed in the inspection side plate-shaped body. A probe insertion hole into which the other end portion of the probe is inserted is formed in the electrode side plate-shaped body. The probe is supported while the one end portion of the probe abuts on an inner wall of the probe support hole in a state in which a contact portion provided at the one end portion of the probe is not in contact with an inspected portion to be inspected.

    INSPECTION JIG, AND INSPECTION DEVICE INCLUDING THE SAME

    公开(公告)号:US20210063438A1

    公开(公告)日:2021-03-04

    申请号:US17043688

    申请日:2019-02-28

    Inventor: Norihiro OTA

    Abstract: An inspection jig includes a support member that supports a probe. The support member includes an inspection side plate-shaped body arranged on one end portion side, and an electrode side plate-shaped body arranged on the other end portion side of the support member. A probe support hole into which one end portion of the probe is inserted and supported is formed in the inspection side plate-shaped body. A probe insertion hole into which the other end portion of the probe is inserted is formed in the electrode side plate-shaped body. The probe is supported while the one end portion of the probe abuts on an inner wall of the probe support hole in a state in which a contact portion provided at the one end portion of the probe is not in contact with an inspected portion to be inspected.

    CONTACT CONDUCTION JIG AND INSPECTION DEVICE
    50.
    发明申请

    公开(公告)号:US20190293684A1

    公开(公告)日:2019-09-26

    申请号:US16305408

    申请日:2017-04-26

    Inventor: Kiyoshi NUMATA

    Abstract: An inspection jig may include: a support plate including a plate-shaped member and having a plurality of through holes extending along a thickness of the support plate; a plurality of probes each having a tubular shape and conductivity, the probes being respectively inserted into the through holes; and an elastomer elastically holding the probes in the through holes. Each of the probes may include a first spring part wound helically in a first direction and configured to expand and contract along an axis of the probe.

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