CLEANING BASKET
    32.
    发明公开
    CLEANING BASKET 审中-公开

    公开(公告)号:US20240332038A1

    公开(公告)日:2024-10-03

    申请号:US18292787

    申请日:2022-07-14

    发明人: Koki ICHITSUBO

    IPC分类号: H01L21/67 B08B3/08 C01B33/037

    摘要: In order to prevent contamination of polycrystalline silicon in a cleaning step, a cleaning basket (1) is a cleaning basket (1) used for cleaning polycrystalline silicon in a state in which the polycrystalline silicon is accommodated in the cleaning basket and includes a plurality of component parts (10) each made of a resin, the plurality of component parts (10) being coupled to each other by screwing screws (N) each made of a resin.

    APPARATUS AND METHOD OF BRUSH CLEANING USING PERIODIC CHEMICAL TREATMENTS

    公开(公告)号:US20240332037A1

    公开(公告)日:2024-10-03

    申请号:US18130407

    申请日:2023-04-03

    发明人: Brian J. BROWN

    摘要: A chemical mechanical polishing (CMP) system include apparatus and methods to clean brushes used to scrub substrates, including brush cleaning using periodic chemical treatment. One or more embodiments include a method of operating the CMP system to rotate a first one or more scrubber brushes while the first one or more scrubber brushes are in contact with a first substrate, performing, concurrent with the rotating during the first time duration, a cleaning operation for a second one or more scrubber brushes, performing, during a second time duration of the cleaning cycle, the cleaning operation for the first one or more scrubber brushes, and rotating, concurrent with the performing the cleaning operation during the second time duration, the second one or more scrubber brushes while the second one or more scrubber brushes are in contact with a second substrate.

    METHOD AND APPARATUS FOR CLEANING CARRIER FILM

    公开(公告)号:US20240326101A1

    公开(公告)日:2024-10-03

    申请号:US18609479

    申请日:2024-03-19

    IPC分类号: B08B3/04 B08B3/02

    CPC分类号: B08B3/041 B08B3/024

    摘要: Provided are method and apparatus for cleaning a carrier film such as a PET film, which are low in cost and environmental load, in cleaning of the carrier film for recycle.
    The method for cleaning the carrier film includes spraying water containing microbubbles onto a surface of the carrier film having a remaining dielectric ceramic layer, thereby peeling the remaining dielectric ceramic layer from the surface. The apparatus for cleaning the carrier film includes a holder that holds the carrier film having a remaining dielectric ceramic layer, and a nozzle that sprays water containing microbubbles onto a surface of the held carrier film to peel the remaining dielectric ceramic layer from the surface.

    AUTOMATIC SPRAYING MECHANISM FOR CLEANING AIR INLET LOUVERS OF COOLING TOWERS

    公开(公告)号:US20240326100A1

    公开(公告)日:2024-10-03

    申请号:US18190744

    申请日:2023-03-27

    IPC分类号: B08B3/02

    CPC分类号: B08B3/024 B08B2203/027

    摘要: A system includes a spray head comprising a spray head inlet for hydraulic connection of a cleaning fluid, a spray head outlet for directing the cleaning fluid at a planar surface of a louver, and a movable mount for positioning the spray head proximate the planar surface of the louver. The system may include a carriage frame attached to the cooling tower proximate the louver. The system may include the movable mount being movably mounted on the carriage frame and movable in at least two orthogonal directions along the planar surface of the louver. The system may include a control system for controlling movement of the movable mount on the carriage frame and supply of the cleaning fluid to the spray head so as to cause the cleaning fluid to be sprayed at preselected portions of the louver at preselected times.