发明公开
- 专利标题: CLEANING BASKET
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申请号: US18292787申请日: 2022-07-14
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公开(公告)号: US20240332038A1公开(公告)日: 2024-10-03
- 发明人: Koki ICHITSUBO
- 申请人: TOKUYAMA CORPORATION
- 申请人地址: JP Yamaguchi
- 专利权人: TOKUYAMA CORPORATION
- 当前专利权人: TOKUYAMA CORPORATION
- 当前专利权人地址: JP Yamaguchi
- 优先权: JP 21130347 2021.08.06
- 国际申请: PCT/JP2022/027648 2022.07.14
- 进入国家日期: 2024-01-26
- 主分类号: H01L21/67
- IPC分类号: H01L21/67 ; B08B3/08 ; C01B33/037
摘要:
In order to prevent contamination of polycrystalline silicon in a cleaning step, a cleaning basket (1) is a cleaning basket (1) used for cleaning polycrystalline silicon in a state in which the polycrystalline silicon is accommodated in the cleaning basket and includes a plurality of component parts (10) each made of a resin, the plurality of component parts (10) being coupled to each other by screwing screws (N) each made of a resin.
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