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219 条记录 (耗时 0.027 秒)

    Modular terminal for high-throughput AMHS
    31.
    发明授权
    Modular terminal for high-throughput AMHS 有权
    用于高通量AMHS的模块化终端

    公开(公告)号：US07798759B2

    公开(公告)日：2010-09-21

    申请号：US11433980

    申请日：2006-05-15

    申请人： Anthony C. Bonora ,  Michael Krolak ,  Roger G. Hine

    发明人： Anthony C. Bonora ,  Michael Krolak ,  Roger G. Hine

    IPC分类号： B65G1/00

    CPC分类号： H01L21/67715 ,  H01L21/67727 ,  H01L21/6773 ,  H01L21/67733 ,  H01L21/67736 ,  H01L21/67766 ,  H01L21/67769 ,  H01L21/67775 ,  Y10S414/14

    摘要： The present invention generally comprises an apparatus for transporting containers between a first transport system and a second transport system. In one embodiment, the first transport system comprises a ceiling-based conveyor and the second transport system comprises a floor-based conveyor. The present invention may further include storage shelves, preferably substantially horizontally aligned about a common vertical plane with a section of one of the transport systems. The transport system may be located either directly above the uppermost storage shelf or beneath the lowermost storage shelf in order to add storage capacity within the fab. A vertical module transports containers between the transport systems and the at least one storage shelf.

    摘要翻译： 本发明通常包括用于在第一输送系统和第二输送系统之间输送容器的装置。 在一个实施例中，第一输送系统包括基于天花板的输送机，第二输送系统包括基于地板的输送机。 本发明还可以包括存储架，优选地基本上水平地围绕公共垂直平面对准，其中一个传送系统的一部分。 运输系统可以位于最上面的储物架的正上方，或者位于最下面的储物架之下，以便增加储存容量。 垂直模块在运输系统和至少一个存储架之间运输容器。

    Direction change device
    34.
    发明申请
    Direction change device 审中-公开
    换向装置

    公开(公告)号：US20070186799A1

    公开(公告)日：2007-08-16

    申请号：US11705461

    申请日：2007-02-13

    申请人： Senzo Kyutoku ,  Tatsuo Tsubaki ,  Masanao Murata

    发明人： Senzo Kyutoku ,  Tatsuo Tsubaki ,  Masanao Murata

    IPC分类号： B61J1/00

    CPC分类号： B61J1/00 ,  H01L21/67715 ,  H01L21/6773

    摘要： A direction change device includes first and second transport passage 3, 4, in which one of the transport passages is disposed at the same vertical position as that of the first transport rail 16, the other is disposed below the one, a rotating unit 22 rotating the transport passages 3, 4 about their central points, a lift unit 23 lifting the transport passages 3, 4 in a vertical direction and a control unit 21. The control unit 21 controls such that when the FOUP 5 is carried out from the transport rail 16 to the transport passage disposed at the same vertical position as that of the transport rail 16, rotating the transport passages 3, 4 by about 90°, carrying out the FOUP 5 from one of the transport passages, and exchanging the respective vertical positions of the first and second transport passages 3, 4.

    摘要翻译： 方向改变装置包括第一和第二输送通道3,4，其中一个输送通道设置在与第一输送轨道16相同的垂直位置，另一个位于该第一输送通道3,4的下方，旋转单元22旋转 输送通道3,4围绕它们的中心点，提升单元23沿垂直方向提升输送通道3,4，控制单元21.控制单元21控制使得当FOUP5从输送轨道 16传送到与​​输送轨道16相同的垂直位置处的输送通道，使输送通道3,4旋转约90°，从其中一个输送通道中进行FOUP 5的交换， 第一和第二输送通道3,4。

    Substrate processing apparatus
    37.
    发明申请
    Substrate processing apparatus 有权
    基板加工装置

    公开(公告)号：US20060285945A1

    公开(公告)日：2006-12-21

    申请号：US11442509

    申请日：2006-05-26

    申请人： Christopher Hofmeister ,  Robert Caveney

    发明人： Christopher Hofmeister ,  Robert Caveney

    IPC分类号： H01L21/677

    CPC分类号： H01L21/67161 ,  H01L21/67173 ,  H01L21/67709 ,  H01L21/67715 ,  H01L21/67724 ,  H01L21/67727 ,  H01L21/67742 ,  Y10S414/139

    摘要： Substrate processing apparatus having a transport chamber, a linear array of substrate holding modules alongside the transport chamber, and a substrate transport located in the chamber. The chamber can hold an isolated atmosphere, and defines more than one substantially linear transport paths extending longitudinally along the transport chamber. The transport in the chamber is capable of transporting the substrate along the linear transport paths. The transport has a transporter capable of holding and moving the substrate. The transporter interfaces a wall of the transport chamber for moving along at least one of linear paths. The transport chamber has interfaces for mating with other substrate holding modules at opposite ends of the transport chamber. Each interface has an opening through which at least one of the more than one linear transport paths extends, and the transport chamber has a selectably variable longitudinal length between the interfaces.

    摘要翻译： 具有输送室的基板处理装置，位于输送室旁的基板保持模块的线性阵列，以及位于所述室中的基板输送。 腔室可以保持隔离的气氛，并且限定沿着传送室纵向延伸的不止一个基本线性的传送路径。 腔室中的输送能够沿着线性输送路径输送基底。 运输具有能够保持和移动基板的运输机。 输送器与输送室的壁接触，用于沿着至少一个线性路径移动。 运输室具有用于与运输室的相对端处的其它衬底保持模块配合的界面。 每个界面具有开口，多于一个的线性传送路径中的至少一个延伸穿过该开口，并且传送室在界面之间具有可选择地可变的纵向长度。

    Conveyor system
    38.
    发明授权
    Conveyor system 失效
    输送系统

    公开(公告)号：US4217977A

    公开(公告)日：1980-08-19

    申请号：US942608

    申请日：1978-09-15

    申请人： Johann Tam

    发明人： Johann Tam

    IPC分类号： B23Q7/00 ,  B23Q7/14 ,  B23Q16/00 ,  H01L21/677 ,  B65G15/12 ,  B65G43/08

    CPC分类号： H01L21/67706 ,  B23Q16/00 ,  B23Q7/005 ,  B23Q7/14 ,  H01L21/67715 ,  H01L21/67736 ,  Y10S414/135

    摘要： A conveyor system for conveying a relatively fragile work piece, such as a silicon wafer, to and from a work station where one or more processing operations are performed on the work piece comprises two parallel conveyor belts. Each conveyor belt is mounted on a separate carriage, and the carriages are moveable laterally toward and away from each other during different periods of operation of the conveyor system and also to enable different size work pieces to be carried by the conveyor belts. The conveyor belts are driven by a drive belt system which comprises a fixed length, closed loop drive belt and a pulley arrangement operatively associated with the drive belt for accommodating lateral motion of the carriages while permitting drive of the conveyor belts at all lateral positions of the carriages and without any change in the length of the drive belt. The conveyor system also provides positive handling of the work piece during all conveying and processing operations to minimize breakage of the work piece. The conveyor system incorporates a vertically moveable spindle and chuck at the work station for lowering the work piece to a processing position below the conveyor belt. Centering and sensing apparatus are located at the work station to center the work piece above the chuck and to coordinate the vertical movement of the chuck with the lateral movement of the carriages and to provide the positive handling of the work piece at each stage of transport and processing of the work piece.

    摘要翻译： 用于将诸如硅晶片的相对脆弱的工件传送到工作站的工件的一个或多个处理操作的输送系统包括两个平行的传送带。 每个传送带安装在单独的托架上，并且托架可在输送机系统的不同操作期间横向移动并彼此远离，并且还使得能够由输送带承载不同尺寸的工件。 传送带由驱动带系统驱动，传动带系统包括固定长度的闭环传动带和与传动带可操作地相关联的滑轮装置，用于容纳滑架的横向运动，同时允许在传送带的所有横向位置驱动传送带 并且传动带的长度没有任何变化。 输送系统还可以在所有输送和加工操作过程中对工件进行正面的处理，以最大限度地减少工件的破损。 输送系统在工作站处包括可垂直移动的主轴和卡盘，用于将工件下降到输送带下方的加工位置。 定心和感测装置位于工作站，将工件定位在卡盘上方，并协调卡盘的垂直运动与托架的横向运动，并在运输的每个阶段提供工件的正面搬运， 加工工件。

    Automatic slice processing
    39.
    发明授权
    Automatic slice processing 失效
    自动切片加工

    公开(公告)号：US3765763A

    公开(公告)日：1973-10-16

    申请号：US3765763D

    申请日：1969-07-29

    申请人： TEXAS INSTRUMENTS INC

    发明人： NYGAARD J

    IPC分类号： H01L21/306 ,  B23Q41/06 ,  H01L21/00 ,  H01L21/22 ,  H01L21/50 ,  H01L21/677 ,  G03B27/30

    CPC分类号： B23Q41/06 ,  H01L21/67276 ,  H01L21/67715 ,  H01L21/6776

    摘要： In an electronic component manufacturing system, slices are transported in serial fashion between a plurality of work stations. As the slices move through the system, each work station performs a separate manufacturing operation on each slice. The manufacturing operations are performed in immediate succession and within the same time interval so that the slices are processed rapidly and so that slices do not accumulate between the work stations. The slices are maintained in sequence throughout the system so that the operation of the system is more easily controlled.

    摘要翻译： 在电子部件制造系统中，切片在多个工作站之间以串行方式传送。 当切片移动通过系统时，每个工作站在每个切片上执行单独的制造操作。 制造操作立即连续执行并且在相同的时间间隔内进行，使得快速处理切片，使得切片不在工作站之间累积。 切片在整个系统中依次保持，使得系统的操作更容易控制。

    MAGNETIC TRANSFER APPARATUS AND FABRICATION METHOD OF THE SAME
    40.
    发明公开
    MAGNETIC TRANSFER APPARATUS AND FABRICATION METHOD OF THE SAME 审中-公开

    公开(公告)号：US20240222173A1

    公开(公告)日：2024-07-04

    申请号：US18605298

    申请日：2024-03-14

    申请人： KOREA UNIVERSITY RESEARCH AND BUSINESS FOUNDATION

    发明人： Tae-Yeon SEONG ,  Da-Hoon LEE ,  Jong-Ho KIM

    IPC分类号： H01L21/677 ,  B65G54/02

    CPC分类号： H01L21/67709 ,  H01L21/67715 ,  H01L21/67721 ,  B65G54/02

    摘要： A magnetic transfer apparatus includes: a magnetomotive force source providing magnetic flux, a first magnetic flux distribution circuit connected to one end of the magnetomotive force source, having a single input terminal and a plurality of output terminals, and distributing the magnetic flux, and a second magnetic flux distribution circuit connected to the other end of the magnetomotive force source, having a single output terminal and a plurality of input terminals, and collecting the distributed magnetic flux. The output terminals of the first magnetic flux distribution circuit are disposed to be adjacent to each other to form a pair with the input terminals of the second magnetic flux distribution circuit.