公开(公告)号：US4973159A

公开(公告)日：1990-11-27

申请号：US289042

申请日：1988-12-23

Applicant: Kenichi Sohma ,  Shigeru Azuhata ,  Kiyoshi Narato ,  Tooru Inada ,  Hironobu Kobayashi ,  Norio Arashi ,  Hiroshi Miyadera

Inventor： Kenichi Sohma ,  Shigeru Azuhata ,  Kiyoshi Narato ,  Tooru Inada ,  Hironobu Kobayashi ,  Norio Arashi ,  Hiroshi Miyadera

IPC: G01J3/18 ,  G01J3/28 ,  G01J3/443 ,  G01N21/72 ,  G01N21/75 ,  G01N21/76

CPC classification number: G01J3/2823 ,  G01J3/443 ,  G01N21/75 ,  G01J2003/2826 ,  G01J2003/283 ,  G01J3/1809 ,  G01N2021/6406 ,  G01N2021/725 ,  G01N21/72 ,  G01N21/76

Abstract: A spectroscope apparatus includes a device for separating light from an object to be measured into spectral components, a device for mixing spectral components which exists in a desired wavelength range, and a device for forming an image of the to-be-measured body of mixed light. The image obtained is very useful for observing the state of a combustion flame, the progress a photochemical reaction, the progress of a biochemical reaction, tissue in a cell, and the state of a flame for analyzing a solution which contains a metal ion by flame spectrophotometry. The apparatus provides accurate analytical information and makes possible precise control operations.

公开(公告)号：US3752585A

公开(公告)日：1973-08-14

申请号：US3752585D

申请日：1972-04-17

Applicant: SPECTRA METRICS INC

Inventor： ELLIOTT W

IPC: G01J3/12 ,  G01J3/18 ,  G01J3/28 ,  G01J3/02

CPC classification number: G01J3/1809 ,  G01J3/2846 ,  G01J2003/1204 ,  G01J2003/1828

Abstract: An interchangeable encoding cassette and a spectrometer system employing such cassette, which cassette device encodes the spectral energy of radiation at the exit focal plane of a spectrometer, the spectral energy represented by horizontal and vertical components. The cassette device comprises a rotating encoding disc, a stationary aperture plate, a frame element, and a shaft secured to the encoding disc for rotation therewith. The frame includes bearings on which the shaft is mounted and includes a reference pin. The spectrometer includes a pair of locater mounts, each of which has a precision V groove adapted to receive the shoulders of the bearing element of the cassette, one of such locators having an adjustable track adapted to receive the pin element, whereby the shaft serves as a primary reference and the cassette device is adjusted into the desired precision position by the position of the reference pin in the restraining track.

Abstract translation: 一种可互换编码盒和使用这种盒的光谱仪系统，该盒装置编码在光谱仪的出射焦平面处的辐射的光谱能量，由水平和垂直分量表示的光谱能量。 盒式装置包括旋转编码盘，固定孔板，框架元件和固定到编码盘的轴，用于与其一起旋转。 框架包括轴安装在轴上并包括参考销的轴承。 光谱仪包括一对定位器安装件，每个定位器安装件具有适于容纳盒的轴承元件的肩部的精密V槽，这些定位器中的一个具有适于接收销元件的可调节轨道，由此轴用作 通过参考销在限制轨道中的位置，主要参考和盒装置被调整到期望的精确位置。

公开(公告)号：US3658423A

公开(公告)日：1972-04-25

申请号：US3658423D

申请日：1971-01-14

Applicant: SPECTRAMETRICS INC

Inventor： ELLIOTT WILLIAM G

IPC: G01J3/00 ,  G01J3/06 ,  G01J3/12 ,  G01J3/14 ,  G01J3/18 ,  G01J3/02

CPC classification number: G01J3/1809 ,  G01J3/06 ,  G01J3/14 ,  G01J2003/1204 ,  G01J2003/1828

Abstract: A spectrometer having an entrance aperture, at least one collimating mirror, a prism and an echelle grating which is so mounted to provide rotation in two directions thereby providing adjustment of the vertical and horizontal components of the dispersed energy in the exit focal plane.

Abstract translation: 具有入射孔的光谱仪，至少一个准直镜，棱镜和梯形光栅，其被安装成在两个方向上提供旋转，从而提供在出射焦平面中的分散能量的垂直和水平分量的调节。

公开(公告)号：US09500827B2

公开(公告)日：2016-11-22

申请号：US14317132

申请日：2014-06-27

Applicant: Intel Corporation

Inventor： David N. Hutchison ,  Kyu Hyun Kim ,  Haisheng Rong ,  John Heck ,  Shengbo Xu

IPC: G01J3/28 ,  G02B6/42 ,  G01J3/32 ,  G01J3/02 ,  G01J3/18

CPC classification number: G02B6/4295 ,  G01J3/0218 ,  G01J3/0237 ,  G01J3/0259 ,  G01J3/0297 ,  G01J3/1809 ,  G01J3/1895 ,  G01J3/20 ,  G01J3/32 ,  G02B6/00 ,  G02B6/12033

Abstract: Techniques and mechanisms for a monolithic photonic integrated circuit (PIC) to provide spectrometry functionality. In an embodiment, the PIC comprises a photonic device, a first waveguide and a second waveguide, wherein one of the first waveguide and the second waveguide includes a released portion which is free to move relative to a substrate of the PIC. During a metering cycle to evaluate a material under test, control logic operates an actuator to successively configure a plurality of positions of the released portion relative to the photonic device. In another embodiment, light from the first waveguide is variously diffracted by a grating of the photonic device during the metering cycle, where portions of the light are directed into the second waveguide. Different wavelengths of light diffracted into the second waveguide may be successively detected, for different positions of the released portion, to determine spectrometric measurements over a range of wavelength.

Abstract translation: 单片光子集成电路（PIC）提供光谱功能的技术和机制。 在一个实施例中，PIC包括光子器件，第一波导和第二波导，其中第一波导和第二波导中的一个包括相对于PIC的衬底自由移动的释放部分。 在用于评估被测材料的计量循环期间，控制逻辑操作致动器以相对于光子器件连续配置释放部分的多个位置。 在另一个实施例中，来自第一波导的光在计量周期期间由光子器件的光栅进行各种衍射，其中光的一部分被引导到第二波导中。 对于释放部分的不同位置，可以连续地检测衍射到第二波导中的不同波长的光，以确定波长范围上的光谱测量。

公开(公告)号：US20150377705A1

公开(公告)日：2015-12-31

申请号：US14317132

申请日：2014-06-27

Applicant: David N. Hutchison ,  Kyu Hyun Kim ,  Haisheng Rong ,  John Heck ,  Shengbo Xu

Inventor： David N. Hutchison ,  Kyu Hyun Kim ,  Haisheng Rong ,  John Heck ,  Shengbo Xu

IPC: G01J3/28 ,  G01J3/18 ,  G01J3/02 ,  G02B6/42

CPC classification number: G02B6/4295 ,  G01J3/0218 ,  G01J3/0237 ,  G01J3/0259 ,  G01J3/0297 ,  G01J3/1809 ,  G01J3/1895 ,  G01J3/20 ,  G01J3/32 ,  G02B6/00 ,  G02B6/12033

Abstract: Techniques and mechanisms for a monolithic photonic integrated circuit (PIC) to provide spectrometry functionality. In an embodiment, the PIC comprises a photonic device, a first waveguide and a second waveguide, wherein one of the first waveguide and the second waveguide includes a released portion which is free to move relative to a substrate of the PIC. During a metering cycle to evaluate a material under test, control logic operates an actuator to successively configure a plurality of positions of the released portion relative to the photonic device. In another embodiment, light from the first waveguide is variously diffracted by a grating of the photonic device during the metering cycle, where portions of the light are directed into the second waveguide. Different wavelengths of light diffracted into the second waveguide may be successively detected, for different positions of the released portion, to determine spectrometric measurements over a range of wavelength.

Abstract translation: 单片光子集成电路（PIC）提供光谱功能的技术和机制。 在一个实施例中，PIC包括光子器件，第一波导和第二波导，其中第一波导和第二波导中的一个包括相对于PIC的衬底自由移动的释放部分。 在用于评估被测材料的计量循环期间，控制逻辑操作致动器以相对于光子器件连续配置释放部分的多个位置。 在另一个实施例中，来自第一波导的光在计量周期期间由光子器件的光栅进行各种衍射，其中光的一部分被引导到第二波导中。 对于释放部分的不同位置，可以连续地检测衍射到第二波导中的不同波长的光，以确定波长范围上的光谱测量。

公开(公告)号：US20150372159A1

公开(公告)日：2015-12-24

申请号：US14731874

申请日：2015-06-05

Applicant: The Trustees Of Columbia University In The City Of New York

Inventor： DIRK ENGLUND ,  Ren-Jye Shiue ,  Xuetao Gan

IPC: H01L31/028 ,  H01L31/18 ,  G01J3/18 ,  G01J3/28 ,  G01J3/14 ,  H01L31/112 ,  H01L27/144

CPC classification number: H01L31/028 ,  G01J3/0259 ,  G01J3/12 ,  G01J3/14 ,  G01J3/18 ,  G01J3/1809 ,  G01J3/1895 ,  G01J3/2803 ,  G01J2003/2813 ,  G02B6/12004 ,  G02B6/12007 ,  G02B6/1225 ,  G02B6/4204 ,  G02B2006/12061 ,  G02B2006/12123 ,  G02B2006/12126 ,  H01L27/1443 ,  H01L27/1446 ,  H01L31/09 ,  H01L31/1126 ,  H01L31/1804 ,  Y02E10/547

Abstract: Systems and methods for graphene photodetectors are disclosed herein. A device for detecting photons can include a waveguide and at least one graphene layer disposed proximate to the waveguide. An insulating layer can be disposed between the waveguide and the graphene layer. A first electrode can be connected to a first end of the graphene layer, and a second electrode can be connected to a second end of the graphene layer opposite the first end.

Abstract translation: 本文公开了石墨烯光电探测器的系统和方法。 用于检测光子的装置可以包括波导和邻近波导设置的至少一个石墨烯层。 绝缘层可以设置在波导和石墨烯层之间。 第一电极可以连接到石墨烯层的第一端，并且第二电极可以连接到与第一端相对的石墨烯层的第二端。

公开(公告)号：US09207119B2

公开(公告)日：2015-12-08

申请号：US13830466

申请日：2013-03-14

Applicant: Cymer, LLC

Inventor： Rostislav Rokitski ,  Nakgeuon Seong ,  Kevin O'Brien

IPC: G01J3/46 ,  G01J3/28 ,  G03F7/20 ,  G01J3/18 ,  G01J11/00 ,  G01J3/02 ,  G01J1/42 ,  G01J9/00

CPC classification number: G01J3/28 ,  G01J3/027 ,  G01J3/1809 ,  G01J11/00 ,  G01J2001/4238 ,  G01J2009/006 ,  G03F7/70091 ,  G03F7/70575 ,  G03F7/7085

Abstract: A spectral feature of a pulsed light beam produced by an optical source is estimated by modifying the wavelength of the pulsed light beam based on a predefined repeating pattern having a pattern period including a plurality of steps, the modification including shifting the wavelength of the pulsed light beam by a wavelength offset from a baseline wavelength for each step in the pattern period; measuring the wavelength of the light beam for each step in the pattern period as the wavelength is modified across the pattern; and estimating a spectral feature of the pulsed light beam over an evaluation window that includes all of the steps within the pattern period based at least in part on the measured wavelength of the light beam for each step in the pattern period.

Abstract translation: 由光源产生的脉冲光束的光谱特征通过基于具有包括多个步骤的图案周期的预定重复图案修改脉冲光束的波长来估计，该修改包括移动脉冲光的波长 在图案周期中对于每个步骤的基线波长的波长偏移; 在图案周期中测量每个步骤的光束的波长，当波长跨越图案被修改时; 以及至少部分地基于所述模式周期中的每个步骤的所述光束的波长来估计包括所述模式周期内的所有步骤的评估窗口上的所述脉冲光束的光谱特征。

公开(公告)号：US20140268139A1

公开(公告)日：2014-09-18

申请号：US13796747

申请日：2013-03-12

Applicant: Malcolm C. Smith

Inventor： Malcolm C. Smith

IPC: G01J3/18 ,  G01J3/28

CPC classification number: G01J3/1809 ,  G01J3/0272 ,  G01J3/28 ,  G01J3/2846 ,  G01J3/44 ,  Y10T29/49 ,  Y10T29/49826

Abstract: A spectrometer includes: a collimating element configured for collimating a beam of light into a first one of a cross-dispersing element and an echelle grating, the grating in optical communication with the cross-dispersing element; a focusing element for receiving the light from a second one of the cross-dispersing element and the echelle grating and focusing wavelengths of the light onto a spatial light modulator; the spatial light modulator configured for selectively directing the wavelengths onto a detector for detection. A method of use and the method of fabrication are provided.

Abstract translation: 光谱仪包括：准直元件，其被配置用于将光束准直到交叉分散元件和电梯片格栅中的第一个中，所述光栅与交叉分散元件光学连通; 聚焦元件，用于接收来自所述交叉分散元件和所述梯形光栅中的第二个的光，并将所述光的波长聚焦到空间光调制器上; 所述空间光调制器被配置用于将波长选择性地引导到检测器上用于检测。 提供了一种使用方法和制造方法。

公开(公告)号：US08681329B2

公开(公告)日：2014-03-25

申请号：US13147190

申请日：2010-01-25

Applicant: Helmut Becker-Roβ ,  Stefan Florek ,  Michael Okruss

Inventor： Helmut Becker-Roβ ,  Stefan Florek ,  Michael Okruss

IPC: G01J3/28

CPC classification number: G01J3/1809 ,  G01J3/02 ,  G01J3/0213 ,  G01J3/2803 ,  G01J2003/1828

Abstract: An Echelle spectrometer arrangement (10) with internal order separation contains an Echelle grating (34) and a dispersing element (38) for order separation so that a two-dimensional spectrum having a plurality of separate orders (56) can be generated, an imagine optical system (18, 22, 28, 46), a flat-panel detector (16), and predispersion means (20) for predispersing the radiation into the direction of traverse dispersion of the dispersion element (38). The arrangement is characterized in that the predispersion means (20) comprise a predispersion element which is arranged along the optical path behind the inlet spacing (12) inside the spectrometer arrangement. The imaging optical system is designed in such a manner that the predispersed radiation can be imaged onto an additional image plane (24) which does not have any boundaries in the predispersion direction and which is arranged along the optical path between the predispersion element (20) and the echelle grating (34). Optical means (20, 68) in the area of the predispersed spectrum are arranged to influence the spatial and/or the spectral beam density distribution on the detector (16).

Abstract translation: 具有内部顺序分离的Echelle光谱仪装置（10）包含Echelle光栅（34）和分散元件（38），用于顺序分离，使得可以产生具有多个分开的阶数（56）的二维光谱， 光学系统（18,22,28,46），平板检测器（16）和用于将辐射预分散到分散元件（38）的横向分散方向的预分散装置（20）。 该装置的特征在于，预分散装置（20）包括预分散元件，该预分散元件沿着光谱仪装置内的入口间隔（12）的光路布置。 成像光学系统被设计成使得预分散的辐射可以被成像到在预分散方向上没有任何边界并且沿着预分散元件（20）之间的光路布置的附加图像平面（24）上， 和梯形光栅（34）。 在预分散频谱的区域中的光学装置（20,68）被布置成影响检测器（16）上的空间和/或光谱光束密度分布。

公开(公告)号：US07804593B2

公开(公告)日：2010-09-28

申请号：US11629143

申请日：2005-06-02

Applicant: Helmut Becker-Roβ ,  Stefan Florek ,  Günter Wesemann ,  Michael Okruss

Inventor： Helmut Becker-Roβ ,  Stefan Florek ,  Günter Wesemann ,  Michael Okruss

IPC: G01J3/28

CPC classification number: G01J3/1809 ,  G01J3/02 ,  G01J3/0202 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0232 ,  G01J3/0237 ,  G01J3/0286 ,  G01J3/0294 ,  G01J3/08 ,  G01J3/12 ,  G01J3/2803

Abstract: The invention relates to a spectrometer arrangement (10) comprising a spectrometer (14) for producing a spectrum of a first wavelength range of radiation from a radiation source on a detector (42). Said arrangement also comprises: an Echelle grating (36) for the spectral decomposition of the radiation penetrating the spectrometer arrangement (10) in a main dispersion direction (46); a dispersing element (34) for separating the degrees by means of spectral decomposition of the radiation in a transversal dispersion direction (48) which forms an angle with the main dispersion direction of the Echelle grating (36), in such a way that a two-dimensional spectrum (50) can be produced with a plurality of separated degrees (52); an imaging optical element (24, 38) for imaging the radiation penetrating through an inlet gap (20) into the spectrometer arrangement (10), in an image plane (40); and a surface detector (42) comprising a two dimensional arrangement of a plurality of detector elements in the image plane (40). The inventive arrangement is characterized in that another spectrometer (12) comprising at least one other dispersing element (64) and another imaging optical element (60,66) is provided in order to produce a spectrum (68) of a second wavelength range of radiation, which is different from the first wavelength range, from a radiation source on the same detector (42). The spectra can be spatially or temporally separated on the detector.

Abstract translation: 本发明涉及一种分光计装置（10），其包括用于产生来自检测器（42）上的辐射源的第一波长范围的光谱仪（14）。 所述布置还包括：用于在主色散方向（46）上穿透光谱仪装置（10）的辐射的光谱分解的梯形光栅（36）; 分散元件（34），用于通过在与梯形光栅（36）的主色散方向形成角度的横向色散方向（48）上的辐射的光谱分解来分离度数，使得两个 可以用多个分离的度数（52）产生维度谱（50）; 用于在图像平面（40）中将穿过入口间隙（20）的辐射成像到成像光学装置（10）中的成像光学元件（24,38）; 以及包括所述图像平面（40）中的多个检测器元件的二维排列的表面检测器（42）。 本发明的装置的特征在于，提供包括至少一个其它分散元件（64）和另一成像光学元件（60,66）的另一个光谱仪（12），以产生第二波长范围的辐射（68） ，其与第一波长范围不同，来自相同检测器（42）上的辐射源。 光谱可以在检测器上进行空间或时间分离。