Solid Precursor, Apparatus for Supplying Source Gas and Deposition Device Having the Same

    公开(公告)号:US20190186002A1

    公开(公告)日:2019-06-20

    申请号:US16019907

    申请日:2018-06-27

    Abstract: A source gas supply unit includes a canister including a precursor accommodating space therein, and an inflow surface and an outflow surface which are open. The source gas supply unit includes a first lid configured to seal the inflow surface of the canister and having a gas inlet connected to the precursor accommodating space and a second lid configured to seal the outflow surface of the canister and having a gas outlet connected to the precursor accommodating space. The source gas supply unit includes a ring-shaped solid precursor located in the precursor accommodating space and including a gas flow path therein, which communicates with the gas inlet and the gas outlet. A cross-sectional area of the gas flow path increases from the inflow surface of the canister toward the outflow surface thereof.

    Apparatus and method for estimating body temperature

    公开(公告)号:US12193796B2

    公开(公告)日:2025-01-14

    申请号:US17409242

    申请日:2021-08-23

    Abstract: An apparatus for estimating a core body temperature of an object is provided. According to one embodiment, the apparatus includes a plurality of sensors configured to obtain data from an object and a processor configured to obtain a surface temperature, a heat flux, a skin blood flow rate, and a blood flow velocity by using the data obtained from the plurality of sensors, obtain a skin thermal conductivity based on the skin blood flow rate, and estimate a core body temperature of the object based on the surface temperature, the heat flux, the skin thermal conductivity, and the blood flow velocity of the object.

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