公开(公告)号：US07030044B2

公开(公告)日：2006-04-18

申请号：US10463910

申请日：2003-06-16

申请人： Hartmut Ruelke ,  Joerg Hohage ,  Thomas Werner ,  Frank Mauersberger

发明人： Hartmut Ruelke ,  Joerg Hohage ,  Thomas Werner ,  Frank Mauersberger

IPC分类号： H01L21/31 ,  H01L21/469

CPC分类号： H01L21/0214 ,  H01L21/02164 ,  H01L21/022 ,  H01L21/02211 ,  H01L21/02274 ,  H01L21/0276 ,  H01L21/3143 ,  H01L21/3144 ,  H01L21/3145 ,  H01L21/31612 ,  H01L21/3212 ,  H01L21/76826 ,  H01L21/76829 ,  H01L21/7684 ,  H01L21/76877 ,  Y10S438/952

摘要： A method of forming a multi-layer stack over a low-k dielectric layer is disclosed, wherein the multi-layer stack provides an improved anti-reflective effect and an enhanced protection of the underlying low-k dielectric material during the chemical mechanical polishing process. The multi-layer stack includes silicon dioxide based sub-layers, which may be formed in a highly efficient, non-expensive plasma enhanced deposition method, wherein the optical characteristics may be adjusted by varying a ratio of silane and nitrogen oxide during the deposition.

摘要翻译： 公开了一种在低k电介质层上形成多层堆叠的方法，其中多层堆叠在化学机械抛光工艺期间提供改进的抗反射效应和增强的底层低k电介质材料的保护 。 多层堆叠包括可以以高效，非昂贵的等离子体增强沉积方法形成的基于二氧化硅的子层，其中可以通过在沉积期间改变硅烷和氮氧化物的比例来调节光学特性。

公开(公告)号：US07010618B1

公开(公告)日：2006-03-07

申请号：US09807889

申请日：1999-10-05

申请人： Umesh Bhavsar ,  Jan Hamann ,  Ralf Rieken ,  Thomas Werner

发明人： Umesh Bhavsar ,  Jan Hamann ,  Ralf Rieken ,  Thomas Werner

IPC分类号： G06F15/16

CPC分类号： H04Q3/0045 ,  H04L12/6418 ,  H04Q3/0054

摘要： A layer of network elements is provided between already existing physical networks and service providers or users. The network elements communicate via interfaces not only with each other, but also with the physical networks which are connected to them. This layer, which is implemented by network elements distributed in the network, enables the network user to access the existing network resources available in the physical, subjacent networks. This enables all available basic and value-added services to be used. The required and generated data are collected separately according to users or service providers in the relevant physical networks, and are managed and made available for further processing.

摘要翻译： 已经存在的物理网络和服务提供商或用户之间提供了一层网络元素。 网络元件不仅通过接口彼此通信，而且与连接到它们的物理网络进行通信。 该网络由分布在网络中的网络元件实现，使得网络用户能够访问物理下层网络中可用的现有网络资源。 这使得可以使用所有可用的基本和增值服务。 所需和生成的数据根据​​相关物理网络中的用户或服务提供商单独收集，并被管理并可用于进一步处理。

公开(公告)号：US06964874B2

公开(公告)日：2005-11-15

申请号：US10259037

申请日：2002-09-27

申请人： Thomas Werner ,  Peter Hübler ,  Frank Koschinsky

发明人： Thomas Werner ,  Peter Hübler ,  Frank Koschinsky

IPC分类号： H01L21/288 ,  H01L21/768 ,  H01L23/544 ,  H01L21/66

CPC分类号： H01L22/34 ,  H01L21/2885 ,  H01L21/76807 ,  H01L21/76877 ,  H01L2924/0002 ,  H01L2924/00

摘要： The invention provides a technique of monitoring the void formation in a damascene interconnection process. According to the invention, a test structure is provided that includes at least two damascene structures that have at least one different cross-sectional geometric parameter. To monitor the void formation, the test structure is cut to expose a cross-sectional view to the damascene structures. The cross-sectional view is then inspected and the void formation is investigated in each of the damascene structures. The invention is particularly applicable to multi-level copper-based dual-damascene interconnection processes to monitor the voiding at the interface between barrier layers and bottom metal trenches. The invention allows monitoring of the void formation by locating only one structure on the chip and performing only one cut.

摘要翻译： 本发明提供了一种在大马士革互连过程中监测空隙形成的技术。 根据本发明，提供一种测试结构，其包括具有至少一个不同横截面几何参数的至少两个镶嵌结构。 为了监测空隙形成，切割测试结构以露出​​镶嵌结构的横截面视图。 然后检查横截面图，并在每个镶嵌结构中研究空隙形成。 本发明特别适用于多级铜基双镶嵌互连工艺，以监测阻挡层和底部金属沟槽之间界面处的空隙。 本发明允许通过仅在芯片上定位一个结构并且仅执行一个切割来监视空隙形成。

公开(公告)号：US06705025B2

公开(公告)日：2004-03-16

申请号：US10256536

申请日：2002-09-27

申请人： Thomas Werner ,  Martin Gross

发明人： Thomas Werner ,  Martin Gross

IPC分类号： F26B1700

CPC分类号： F26B3/082 ,  B01J2/16 ,  B01J8/44

摘要： A bottom element for a device for treating particulate has a two-dimensional body having numerous apertures. Means for imposing to a treatment medium passing said bottom are provided. Said bottom being designed as blade-shaped body, said apertures being designed as slots, said slots being generated by a removal of material from said plate-shaped body. Said slots having side walls sloping towards a plane of said body. For facilitating a cleaning of said bottom said side walls of said slots further consecutively tapers to a direction of a side of said bottom a particulate material rests.

摘要翻译： 用于处理颗粒的装置的底部元件具有多个孔的二维体。 提供用于施加到通过所述底部的处理介质的装置。 所述底部被设计成叶片形体，所述孔被设计成槽，所述槽是通过从所述板状体去除材料产生的。 所述狭槽具有朝向所述主体的平面倾斜的侧壁。 为了便于所述底部的清洁，所述槽的所述侧壁进一步连续地向所述底部的侧面的方向渐缩，颗粒材料搁置。

公开(公告)号：US5795173A

公开(公告)日：1998-08-18

申请号：US721473

申请日：1996-09-27

申请人： Thomas Werner ,  Markus Mornhinweg ,  Andreas Weber ,  Burkhard Lutterbeck

发明人： Thomas Werner ,  Markus Mornhinweg ,  Andreas Weber ,  Burkhard Lutterbeck

IPC分类号： H01R13/502 ,  H01R13/52 ,  H01R13/621 ,  H01R13/625 ,  H01R13/639 ,  H01R13/66

CPC分类号： H01R13/625 ,  H01R13/5205

摘要： A plug connector is provided, in particular for the connection of measuring instruments, which is to be connected to a plug having three flat elongated contact pins, a flat elongated protective contact pin and a threaded hole arranged in its center. The plug connector has a low maximum cross-sectional area and a high tightness. The plug connector has a housing (1) partly forming a cone (11), a hollow cylinder (12) which is molded onto the cone (11) on the side facing away from the plug and has an external thread (121), a nut (5) screwed onto the hollow cylinder (12), and a sealing element (4) which completely fills the hollow cylinder (12) and the nut (5). A four-way cable (3) penetrates the nut (5) and the sealing element (4) in the axial direction. A groove (14) is arranged on the side of the housing (1) facing toward the plug to accommodate a seal (6) and a ring (15) is molded on the cone (11) on the side facing toward the plug and encloses the plug coaxially at the end. A contact insert (2) is arranged in the housing (1), in which four flat contact clamps, to which the ways of the cable (3) are connected, are arranged in a countersunk fashion. The contact insert has a central axial hole (27) in which a screw (7) for securing the plug connector on the plug is captively arranged, and which is fixed nonrotably in the housing (1) by a bayonet closure and a locking tab (17) arranged in the housing (1) and can be detached only by a tool.

摘要翻译： 提供了插头连接器，特别是用于连接测量仪器的连接器，该测量仪器将连接到具有三个扁平细长触针的插头，平的细长保护触针和布置在其中心的螺纹孔。 插头连接器具有低的最大横截面积和高密封性。 插头连接器具有部分地形成锥体（11）的壳体（1），在远离插头的一侧模制在锥体（11）上的中空圆柱体（12），并具有外螺纹（121）， 螺母（5）拧入中空圆筒（12）上，密封元件（4）完全填充中空圆筒（12）和螺母（5）。 四通电缆（3）沿轴向穿透螺母（5）和密封元件（4）。 在壳体（1）的面向插头的侧面上布置有凹槽（14）以容纳密封件（6），并且在锥体（11）上在朝向插塞的一侧上模制环（15），并且包围 插头同轴在最后。 接触插入件（2）布置在壳体（1）中，其中连接有电缆（3）的方式的四个平坦接触夹具以沉没方式布置。 接触插入件具有中心轴向孔（27），其中用于将插头连接器固定在插头上的螺钉（7）被固定地布置，并且通过卡口闭合件和锁定突出部（1）固定在壳体（1）中， 17）布置在壳体（1）中，并且可以仅由工具分离。

公开(公告)号：US5709558A

公开(公告)日：1998-01-20

申请号：US721114

申请日：1996-09-26

申请人： Volker Dreyer ,  Thomas Werner

发明人： Volker Dreyer ,  Thomas Werner

IPC分类号： G01F23/22 ,  G01F23/296 ,  H01R13/652

CPC分类号： G01F23/2968 ,  G01F23/2967 ,  Y10S439/936

摘要： The electronics enclosure comprises, surrounded by a metal shroud, an open end closed off by a plug of insulating material fitted in the metal shroud, in which contact members are provided for connecting the electronics assembly accommodated in the electronics enclosure to outer connecting leads. One of the contact members is a grounding contact member including a ring on which radially protruding spring claws of elastic material are provided. The plug is provided with a peripheral groove, and the ring of the grounding contact member is applied level with the peripheral groove in the plug such that the spring claws protrude into the peripheral groove. The length of the spring claws is dimensioned so that on insertion of the plug in the metal shroud they are flexed in the metal shroud and come into spring contact with the inside surface of the metal shroud. As a result of this the plug is fixed in the metal shroud and, at the same time, a good electrical contact is produced between the grounding contact member and the metal shroud.

摘要翻译： 电子外壳包括被金属护罩包围的开放端，该开口端由安装在金属护罩中的绝缘材料塞封闭，其中设置有接触构件用于将容纳在电子外壳中的电子组件连接到外部连接引线。 接触构件中的一个是包括环的接地接触构件，弹性材料的径向突出的弹簧爪设置在该环上。 插头设置有周边槽，并且接地触头构件的环与插头中的周边槽水平地施加，使得弹簧爪突出到周边槽中。 弹簧爪的长度的尺寸被设计成使得在将插头插入金属护罩中时，它们在金属护罩中弯曲并与金属护罩的内表面弹簧接触。 结果，插头被固定在金属护罩中，并且同时在接地接触构件和金属护罩之间产生良好的电接触。

公开(公告)号：US5302577A

公开(公告)日：1994-04-12

申请号：US038867

申请日：1993-03-29

申请人： Ruediger Sens ,  Thomas Werner ,  Karl-Heinz Etzbach

发明人： Ruediger Sens ,  Thomas Werner ,  Karl-Heinz Etzbach

IPC分类号： B41M5/385 ,  B41M5/035 ,  B41M5/26 ,  B41M5/382 ,  B41M5/388 ,  B41M5/39 ,  B41M5/50 ,  B41M5/52 ,  C09B1/26 ,  D06P5/13 ,  B41M5/38

CPC分类号： B41M5/3852 ,  Y10S428/913 ,  Y10S428/914

摘要： Anthraquionone dyes are transferred by diffusion or sublimation from a carrier to a plastic-coated substrate with the aid of an energy source by using a carrier on which one or more anthraquinone dyes I ##STR1## where X is hydrogen or cyano,R.sup.1, R.sup.2 and R.sup.3 independently of one another are each hydrogen,alkyl, alkanoyloxyalkyl, alkoxycarbonyloxyalkyl or alkoxycarbonylalkyl, each of which may be of up to 20 carbon atoms and may be substituted by halogen, hydroxyl or cyano,phenyl or benzyl, each of which may be substituted by C.sub.1 -C.sub.15 -alkyl or C.sub.1 -C.sub.15 -alkoxy anda radical of the formula II[--W--O]n--R.sup.4 IIwhereW is identical or different C.sub.2 -C.sub.6 -alkylene radicals,n is from 1 to 6 andR.sup.4 is C.sub.1 -C.sub.4 -alkyl or unsubstituted or C.sub.1 -C.sub.4 -alkyl-substituted or C.sub.1 -C.sub.4 -alkoxy-substituted phenyl, are present.

摘要翻译： 通过使用其上X是氢或氰基的一种或多种蒽醌染料I（* CHEMICAL STRUCTURE *）I的载体，借助能量源，通过扩散或升华将载体扩散或升华从载体转移到塑料涂覆的基材上， R 1，R 2和R 3彼此独立地各自为氢，烷基，烷酰氧基烷基，烷氧基羰氧基烷基或烷氧基羰基烷基，其各自可以具有至多20个碳原子，并且可以被卤素，羟基或氰基，苯基或苄基取代， 可以被C 1 -C 15 - 烷基或C 1 -C 15 - 烷氧基和式II（-WO）n -R 4 ii的基团取代，其中W是相同或不同的C 2 -C 6亚烷基，n是1至6，R 4 是C1-C4烷基或未取代的或C1-C4-烷基取代或C1-C4-烷氧基取代的苯基。

公开(公告)号：US4995747A

公开(公告)日：1991-02-26

申请号：US230472

申请日：1988-08-09

申请人： Gunther Engelhardt ,  Gerhard Lohrmann ,  Thomas Werner

发明人： Gunther Engelhardt ,  Gerhard Lohrmann ,  Thomas Werner

IPC分类号： B41J13/00 ,  B41J13/10 ,  B65H29/60 ,  B65H31/06

CPC分类号： B41J13/10 ,  B41J13/103 ,  B41J13/106

摘要： A paper stacking apparatus is for an office machine, wherein the office machine has a forward end and a rear end and includes rollers for sequentially supplying sheets of paper upwardly along a generally vertical path. The sheets extend transversely of the office machine. The path is located between the front end and the rear end. The paper stacking apparatus includes a support frame located above the rollers for sequentially supplying said sheets. A paper guide element is mounted within the support frame in alignment with the path. A forward stacker is mounted on the support frame forwardly of the paper guide element. A rear stacker is mounted on the support frame rearwardly of the paper guide element. The paper guide element is selectively movable to a forward position and to a rear position. The paper guide element at the forward position directs the sheets to the forward stacker for forward to rear stacking of the sheets thereon. The paper guide element at the rear position directs the sheets to the rear stacker for rear to forward stacking of the sheets thereon.

摘要翻译： 纸张堆叠装置用于办公机器，其中办公机器具有前端和后端，并且包括用于沿着大致垂直的路径向上顺序地供应纸张的辊。 纸张横向延伸在办公室机器上。 路径位于前端和后端之间。 纸张堆垛装置包括位于辊子上方的用于顺序地供应所述片材的支撑框架。 纸张引导元件安装在支撑框架内，与路径对齐。 向前堆垛机被安装在纸引导元件前方的支撑框架上。 后堆垛机安装在纸引导元件后方的支撑框架上。 纸张引导元件可选择性地移动到前进位置和后方位置。 纸张引导元件在前方位置将纸张引导到向前堆垛机，以便在纸张的前后堆叠。 后方的导纸元件将纸张引导到后堆垛机后方，以便将纸张在其上进行堆叠。

公开(公告)号：US08835303B2

公开(公告)日：2014-09-16

申请号：US12634216

申请日：2009-12-09

申请人： Frank Feustel ,  Thomas Werner ,  Kai Frohberg

发明人： Frank Feustel ,  Thomas Werner ,  Kai Frohberg

IPC分类号： H01L21/4763 ,  H01L21/768

CPC分类号： H01L21/76807 ,  H01L21/76804 ,  H01L21/76813

摘要： In a metallization system of a semiconductor device, a transition via may be provided with an increased degree of tapering by modifying a corresponding etch sequence. For example, the resist mask for forming the via opening may be eroded once or several times in order to increase the lateral size of the corresponding mask opening. Due to the pronounced degree of tapering, enhanced deposition conditions may be accomplished during the subsequent electrochemical deposition process for commonly filling the via opening and a wide trench connected thereto.

摘要翻译： 在半导体器件的金属化系统中，可以通过修改相应的蚀刻顺序来提供过渡通孔的增加的锥度。 例如，为了增加对应的掩模开口的横向尺寸，用于形成通路孔的抗蚀剂掩模可以被腐蚀一次或几次。 由于显着的渐缩度，在随后的电化学沉积过程中可以实现增强的沉积条件，用于通常填充通孔开口和与其连接的宽沟槽。

公开(公告)号：US20140230533A1

公开(公告)日：2014-08-21

申请号：US14347822

申请日：2012-09-10

申请人： Roland Greul ,  Thomas Werner ,  Joerg STRECKER

发明人： Roland Greul ,  Thomas Werner ,  Joerg STRECKER

IPC分类号： B62D15/02

CPC分类号： B62D15/0225 ,  B62D6/008

摘要： A method for determining a rack force for a steering apparatus of a vehicle, in which the rack force is determined as a function of a steering angle variable which characterizes an actual wheel steering angle or a set point of the wheel steering angle. In order to specify a method for determining a rack force, with which a target steering torque can be generated such that a comfortable steering feel is imparted to the driver and the steering apparatus nevertheless gives the driver feedback that is as realistic as possible regarding the motion state of the vehicle, the method comprises: determining a variable which characterizes a lateral force on a shaft of the steering apparatus, and determining the rack force as a function of the lateral force, wherein the determination of the rack force comprises a filtering by means of a signal processing element having a proportional-differential transfer function.

摘要翻译： 一种用于确定车辆转向装置的齿条力的方法，其中机架力被确定为表征车轮转向角的实际车轮转向角或设定点的转向角变量的函数。 为了确定用于确定机架力的方法，通过该方法可以产生目标转向扭矩，使得向驾驶员和转向装置赋予舒适的转向感，然而给予驾驶员对于运动尽可能现实的反馈 该方法包括：确定表征转向装置的轴上的横向力的变量，以及确定作为横向力的函数的齿条力，其中机架力的确定包括通过装置的过滤 具有比例差分传递函数的信号处理元件。