INTEGRATED MICRO-ELECTROMECHANICAL SWITCHES AND A RELATED METHOD THEREOF
    32.
    发明申请
    INTEGRATED MICRO-ELECTROMECHANICAL SWITCHES AND A RELATED METHOD THEREOF 有权
    一体化微电子开关及其相关方法

    公开(公告)号:US20140305777A1

    公开(公告)日:2014-10-16

    申请号:US14314344

    申请日:2014-06-25

    CPC classification number: H01H59/0009 B81B7/008 B81B2201/00 H01H2059/0018

    Abstract: A system includes a plurality of micro-electromechanical switches including a plurality of gates, coupled to each other. Each micro-electromechanical switch includes a beam electrode disposed on a substrate. A beam includes an anchor portion coupled to the beam electrode. The beam includes a first beam portion extending from the anchor portion along a first direction; and a second beam portion extending from the anchor portion along a second direction opposite to the first direction. A first control electrode and a first contact electrode are disposed on the substrate, facing the first beam portion. A second control electrode and a second contact electrode are disposed on the substrate, facing the second beam portion. The first control electrode and the second control electrode are coupled to form a gate among the plurality of gates. The plurality of micro-electromechanical switches is arranged in at least one of a series arrangement, parallel arrangement.

    Abstract translation: 一种系统包括多个彼此耦合的包括多个门的微机电开关。 每个微机电开关包括设置在基板上的束电极。 梁包括联接到梁电极的锚固部分。 梁包括从锚固部分沿着第一方向延伸的第一梁部分; 以及从所述锚固部分沿着与所述第一方向相反的第二方向延伸的第二梁部分。 第一控制电极和第一接触电极设置在基板上,面对第​​一光束部分。 第二控制电极和第二接触电极设置在基板上,面对第​​二光束部分。 第一控制电极和第二控制电极被耦合以在多个栅极之间形成栅极。 多个微电子机械开关被布置成串联布置,平行布置中的至少一个。

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