Abstract:
Impurities can be eluted simultaneously from a plurality of local areas of a surface layer of a semiconductor substrate. A supporting unit supports the substrate, and a sample plate is disposed on the surface of the substrate. The sample plate has a plurality of holes that expose the local areas of the surface of the substrate. Eluant is provided onto the local areas of the surface layer of the substrate through the holes in the sample plate. The impurities are thus dissolved by the eluant to produce a sample. A nozzle transfers the sample from the local areas of the surface of the substrate to a plurality of sample cups. Therefore, samples from the surface layer of the substrate may be produced in a short amount of time.
Abstract:
An apparatus for manufacturing a semiconductor device includes a chamber and an exhaust system for exhausting byproducts from the chamber and adjusting an internal pressure of the chamber. The exhaust system includes an exhaust pipe connected to the chamber, a pump unit coupled with the exhaust pipe, and a cleaning unit connected to a portion of the exhaust pipe or directly connected to the pump unit to supply a cleaning gas to the pump unit.
Abstract:
A probe for an ultrasound system, and a method of manufacturing the same are disclosed. The probe includes a backing layer, an electrode part formed on the backing layer, and a piezoelectric member installed to the electrode part. The probe is manufactured by connecting the piezoelectric member to the PCB via a unidirectional conduction part, instead of soldering which requires difficult and laborious operations, thereby allowing easy connection therebetween while reducing an operation time for connection.
Abstract:
A composition with improved shelf life for filling small gaps in a semiconductor device is provided. The composition comprises an end-capped silicone polymer. The molecular weight of the end-capped silicone polymer is not varied during storage. In addition, the dissolution rate (DR) of the composition in an alkaline developing solution is maintained at a desired level during storage. That is, the composition is highly stable during storage. Therefore, the composition is suitable for use in a node separation process for the fabrication of a semiconductor capacitor.
Abstract:
Provided is an intake air cooling system for a marine vessel having a turbocharger. The intake air cooling system for the marine vessel includes: a turbocharger which compresses the intake air introduced from the outside using a portion of the exhaust gas generated by the engine, wherein the turbocharger has a front end through which the intake air is introduced and a rear end through which the compressed intake air is supplied to the engine; a cooling part which cools at least one of the intake air compressed in the turbocharger and the exhaust gas passing through the turbocharger, wherein the cooling part includes one or more cooling units disposed along the flow of the intake air or the exhaust gas; and an absorption cooling device which receives heat from the working fluid circulated through the cooling unit.
Abstract:
The present invention relates to a nanoparticle of oxaliplatin, which is a water-soluble active substance, a pharmaceutical composition containing the same, and a method for preparing an orally administrable oxaliplatin nanoparticle by emulsifying a lipid mixture solution wherein a solid lipid and a surfactant are mixed in an aqueous mixture solution wherein oxaliplatin and a specific cosolvent are mixed and then removing the solid lipid and the cosolvent using a supercritical fluid gas.By providing oxaliplatin, which is currently available only in injection form for parenteral administration, in the form of a nanoparticle, the present invention allows for the development of orally administrable oxaliplatin which is stable against gastric acid and has improved bioavailability, thereby improving patient compliance through avoiding the inconvenience of injection and greatly reducing medical cost. Since the oxaliplatin nanoparticle can be prepared economically using a relatively inexpensive supercritical fluid producing facility, it can be prepared via a simple process with high yield in commercial scale.
Abstract:
An ultrasonic diagnostic probe and a method of manufacturing the same are disclosed. The probe includes a first piezoelectric member having a first thickness, and a second piezoelectric member having a second thickness and stacked on the first piezoelectric member. The method allows the production of several kinds of ultrasonic diagnostic probes, which generate ultrasound waves in different frequency bands, with a single kind of transducer module by changing connection between an external electrode and the electrodes of the probe.
Abstract:
There is disclosed a stator of a linear compressor which comprises a bobbin of a cylindrical shape having a recess for winding coils at the outer circumference thereof, coils wound in the coil winding recess, and a plurality of cores inserted into the bobbin. A plurality of guide rails extending to the axial direction of the bobbin are arranged radially at regular intervals on the inner circumference of the bobbin and the cores are mounted between the respective guide rails. Further, a plurality of guide projections extending outward from the outer circumferences of the upper and lower ends of the bobbin are arranged at regular intervals. In addition, there are further provided a plurality of supporting jaws extending toward the inside of the bobbin between the respective guide rails.