公开(公告)号：US06550329B2

公开(公告)日：2003-04-22

申请号：US09880433

申请日：2001-06-13

Applicant: William S. Watson

Inventor： William S. Watson

IPC: G01C1900

CPC classification number: G01C19/567 ,  G01C19/5642 ,  G01C19/5677

Abstract: A structure and arrangement for improving the accuracy and efficiency of an angular rate sensing gyroscope is herein disclosed. Voltage pick-off conductors are applied to an area of the surface of a resonating element of an angular rate sensing gyroscope that is subject to substantially zero stress when the gyroscope is rotationally stationary. Actuator conductors are similarly applied to a resonating element at a location bounded by areas of the resonating element subject to substantially uniform levels of stress when the gyroscope is rotationally stationary. A method for improving the voltage response of a piezoelectric resonating element is also disclosed.

Abstract translation: 本文公开了一种用于提高角速度感测陀螺仪的精度和效率的结构和装置。 当陀螺仪旋转静止时，电压拾取导体被施加到角速度感测陀螺仪的谐振元件的表面的区域，该角度传感陀螺仪的谐振元件受到基本上零的应力。 当陀螺仪旋转静止时，致动器导体类似地应用于由谐振元件的区域限定的位置处的谐振元件，该谐振元件受到基本上均匀的应力水平的施加。 还公开了一种用于改善压电谐振元件的电压响应的方法。

公开(公告)号：US5383362A

公开(公告)日：1995-01-24

申请号：US11554

申请日：1993-02-01

Applicant: Michael W. Putty ,  David S. Eddy

Inventor： Michael W. Putty ,  David S. Eddy

IPC: G01C19/5677 ,  G01C19/5691 ,  G01P15/08 ,  G01P15/125 ,  G01P15/14

CPC classification number: G01C19/5691 ,  G01C19/5677

Abstract: A control circuit for a resonating rotation sensor has a pair of closed loop controls for independently controlling component traveling waves of a resonant pattern in a ring shaped resonant member. Frequency and phase quantities of the independent traveling waves as well as time dependant quantities thereof indicate total rotation angle, rotation raze and rotation direction.

Abstract translation: 用于谐振旋转传感器的控制电路具有一对用于独立地控制环形谐振元件中的谐振图案的分量行波的闭环控制。 独立行波的频率和相位量以及时间相关量表示总旋转角度，旋转角度和旋转方向。

公开(公告)号：US09879997B1

公开(公告)日：2018-01-30

申请号：US14547057

申请日：2014-11-18

Applicant: HRL LABORATORIES, LLC

Inventor： Randall L. Kubena ,  Yook-Kong Yong ,  Deborah J. Kirby ,  David T. Chang

IPC: G01C19/5677 ,  H03H9/19

CPC classification number: G01C19/5677 ,  G01C19/5684 ,  H03H9/19

Abstract: A resonator assembly includes a semiconductor substrate; a resonator gyroscope, the resonator gyroscope including a first resonator formed in a layer of a first material; and an oscillator on the semiconductor substrate, the oscillator including a second resonator formed of a second material. The second resonator is disposed in a cavity, the cavity comprising a first recess in the layer of a first material with the edges of the first recess being attached to the substrate, or the cavity comprising a second recess in the substrate and the edges of the second recess being attached to the layer of a first material.

公开(公告)号：US20170074656A1

公开(公告)日：2017-03-16

申请号：US14853265

申请日：2015-09-14

Applicant: Analog Devices Global

Inventor： Siddharth Tallur ,  Sunil Ashok Bhave

IPC: G01C19/5698 ,  G01C19/5677

CPC classification number: G01C19/5698 ,  G01C19/5677 ,  G01C19/5684

Abstract: A BAW gyroscope is configured to operate with two pairs of orthogonal modes instead of a single pair in order to mitigate the impact of changes in gaps (e.g., introduced from external stresses such as thermal gradients, external shocks, mechanical stress/torque, etc.). Specifically, the BAW gyroscope resonator is configured to be simultaneously driven to resonate with a two disparate resonant modes (referred to herein as the “fundamental” mode and the “compound” mode), with the same set of drive electrodes used to drive both resonant modes (i.e., all of the drive electrodes are used to drive the two drive modes). When the sensor experiences external rotation, energy couples from the driven modes of vibration to two corresponding orthogonal sense modes via the Coriolis force. The same set of sense electrodes is used to sense both sense modes (i.e., all of the sense electrodes are used to sense the two sense modes). The fundamental mode is differential with respect to the electrodes, while the compound mode is seen as common-mode with respect to the electrodes. Thus, differential gap change will impact offset of rate measured with the fundamental mode only, while common-mode gap change will impact offset of rate measured with the compound mode only.

Abstract translation: BAW陀螺仪被配置为以两对正交模式而不是单对操作，以便减轻间隙变化的影响（例如，从外部应力引起的热梯度，外部冲击，机械应力/扭矩等）。 ）。 具体地说，BAW陀螺仪谐振器被配置为同时驱动以与两个不同的谐振模式（本文中称为“基本”模式和“复合”模式）谐振），其中相同组的驱动电极用于驱动谐振 模式（即所有驱动电极都用于驱动两种驱动模式）。 当传感器经受外部旋转时，能量通过科里奥利力从激励的振动模式耦合到两个对应的正交感测模式。 相同的感测电极组用于感测两种感测模式（即，所有感测电极用于感测两种感测模式）。 基本模式相对于电极是差分的，而复合模式被看作是相对于电极的共模。 因此，差分间隙变化将仅影响基波模式测量速率的偏移，而共模间隙变化将仅影响利用复合模式测量的速率偏移。

公开(公告)号：US09341476B2

公开(公告)日：2016-05-17

申请号：US13698339

申请日：2011-05-13

Applicant: Kevin Townsend ,  Michael Durston

Inventor： Kevin Townsend ,  Michael Durston

IPC: G01C19/56 ,  G01C19/5677 ,  G01C19/5776

CPC classification number: G01C19/56 ,  G01C19/5677 ,  G01C19/5776

Abstract: An inertial sensor is described that has means for improving quadrature rejection The sensor is of a ring type, driven by a driver circuit, the sensor further comprising primary and secondary portions having corresponding signal pickoffs. The primary pickoff signal amplitude is controlled via an automatic gain control, the primary phase lock loop and VCO locks to the resonant frequency to provide the clocks for the synchronous detectors, the primary pickoff signals via the primary phase shift circuit is provided to the primary driver, the secondary pickoff signal being input into a detector circuit capable of detecting motion in the sensor. The secondary channel comprises a series of circuits that when operable in series significantly improve the quadrature rejection ability of the sensor. The circuits include a synchronous detector, passive and active filters and a decimator.

Abstract translation: 描述了具有用于改善正交抑制的装置的惯性传感器。传感器是由驱动器电路驱动的环形传感器，传感器还包括具有对应的信号检测的主要和次要部分。 通过自动增益控制来控制主要的检测信号幅度，主锁相环和VCO锁定到谐振频率以提供同步检波器的时钟，通过主相移电路的初级检测信号被提供给主驱动器 ，次级检测信号被输入到能够检测传感器中的运动的检测器电路。 次级通道包括一系列电路，当串联可操作时显着提高传感器的正交抑制能力。 电路包括同步检测器，无源和有源滤波器和抽取器。

公开(公告)号：US20140260614A1

公开(公告)日：2014-09-18

申请号：US14232880

申请日：2012-07-16

Applicant: Sunil Bhave ,  Renyuan Wang

Inventor： Sunil Bhave ,  Renyuan Wang

IPC: G01C19/04

CPC classification number: G01C19/04 ,  G01C19/5677 ,  G01C19/5726

Abstract: Gyroscopes based on optomechanical designs to provide sensitive sensing while providing relatively large bandwidth and dynamic range with enhanced noise performance.

Abstract translation: 基于光机械设计的陀螺仪提供灵敏感测，同时提供相对较大的带宽和动态范围，增强噪声性能。

公开(公告)号：US08555718B2

公开(公告)日：2013-10-15

申请号：US13775849

申请日：2013-02-25

Applicant: Analog Devices, Inc.

Inventor： Jinbo Kuang ,  William A. Clark ,  John A. Geen

IPC: G01C19/56 ,  H02N2/04

CPC classification number: G01C19/56 ,  G01C19/5677 ,  G01P15/09 ,  Y10T29/42

Abstract: An inertial sensor includes driving piezoelectric transducers for enabling an oscillation of a resonator, sensing piezoelectric transducers for enabling a detection of a movement of the inertial sensor, and piezoelectric compensating elements substantially equidistantly among the driving and the sensing piezoelectric transducers, wherein the compensating elements and the resonator form corresponding capacitors having capacitive gaps, and wherein, during the oscillation of the resonator, changes in electrostatic charges stored in the capacitors are measured with the compensating elements and are modified so as to modify the oscillation of the resonator.

Abstract translation: 惯性传感器包括驱动压电换能器，用于实现谐振器的振荡，感测压电换能器，以便能够检测惯性传感器的运动，以及压电补偿元件在驱动和感测压电换能器之间基本上等距离，其中补偿元件和 谐振器形成具有电容间隙的相应的电容器，并且其中，在谐振器的振荡期间，用补偿元件测量存储在电容器中的静电电荷的变化，并且被修改以便改变谐振器的振荡。

公开(公告)号：US20130199294A1

公开(公告)日：2013-08-08

申请号：US13698339

申请日：2011-05-13

Applicant: Kevin Townsend ,  Michael Durston

Inventor： Kevin Townsend ,  Michael Durston

IPC: G01C19/56

CPC classification number: G01C19/56 ,  G01C19/5677 ,  G01C19/5776

Abstract: An inertial sensor is described that has means for improving quadrature rejection The sensor is of a ring type, driven by a driver circuit, the sensor further comprising primary and secondary portions having corresponding signal pickoffs. The primary pickoff signal amplitude is controlled via an automatic gain control, the primary phase lock loop and VCO locks to the resonant frequency to provide the clocks for the synchronous detectors, the primary pickoff signals via the primary phase shift circuit is provided to the primary driver, the secondary pickoff signal being input into a detector circuit capable of detecting motion in the sensor. The secondary channel comprises a series of circuits that when operable in series significantly improve the quadrature rejection ability of the sensor. The circuits include a synchronous detector, passive and active filters and a decimator.

Abstract translation: 描述了具有用于改善正交抑制的装置的惯性传感器。传感器是由驱动器电路驱动的环形传感器，传感器还包括具有对应的信号检测的主要和次要部分。 通过自动增益控制来控制主要的检测信号幅度，主锁相环和VCO锁定到谐振频率以提供同步检波器的时钟，通过主相移电路的初级检测信号被提供给主驱动器 ，次级检测信号被输入到能够检测传感器中的运动的检测器电路。 次级通道包括一系列电路，当串联可操作时显着提高传感器的正交抑制能力。 电路包括同步检测器，无源和有源滤波器和抽取器。

公开(公告)号：US20110308315A1

公开(公告)日：2011-12-22

申请号：US13147280

申请日：2010-01-06

Applicant: Ryuta Araki ,  Takashi Ikeda ,  Hiroshi Nishida ,  Takafumi Moriguchi ,  Yasuyuki Hirata

Inventor： Ryuta Araki ,  Takashi Ikeda ,  Hiroshi Nishida ,  Takafumi Moriguchi ,  Yasuyuki Hirata

IPC: G01P15/08

CPC classification number: G01C19/5677 ,  H01L41/08

Abstract: A vibratory gyro which is provided with a ring-shaped vibrating body, leg portions flexibly supporting the ring-shaped vibrating body, a plurality of electrodes formed by having a piezoelectric film sandwiched between an upper-layer metallic film and a lower-layer metallic film in the thickness direction, and a fixed potential electrode. The plurality of electrodes include a bank of driving electrodes for exciting primary vibration, detection electrodes for detecting secondary vibration, and suppression electrodes for suppressing the secondary vibration on the basis of a voltage signal from the detection electrodes. The driving electrodes, the detection electrodes and the suppression electrodes are disposed in the region from an outer peripheral edge of the ring-shaped vibrating body to a vicinity of the outer peripheral edge and/or a region from an inner peripheral edge thereof to a vicinity of the inner peripheral edge.

Abstract translation: 具有环形振动体的振动陀螺仪，柔性地支撑环形振动体的腿部，具有夹在上层金属膜和下层金属膜之间的压电膜形成的多个电极 在厚度方向和固定电位电极。 多个电极包括用于激发主振动的驱动电极组，用于检测二次振动的检测电极，以及基于来自检测电极的电压信号抑制二次振动的抑制电极。 驱动电极，检测电极和抑制电极设置在从环形振动体的外周边缘到外周缘附近和/或从其内周边缘到附近的区域中 的内周边缘。

公开(公告)号：US20100058861A1

公开(公告)日：2010-03-11

申请号：US12208803

申请日：2008-09-11

Applicant: Jinbo Kuang ,  William Albert Clark ,  John Albert Geen

Inventor： Jinbo Kuang ,  William Albert Clark ,  John Albert Geen

IPC: G01C19/56 ,  G01P15/09

CPC classification number: G01C19/56 ,  G01C19/5677 ,  G01P15/09 ,  Y10T29/42

Abstract: Transducers comprising a frame structure made of piezoelectric material convert energy, through piezoelectric effect, between electrostatic energy associated with voltage differential between the electrodes sandwiching the frame structure and mechanical energy associated with deformation of the frame structure. Inertial sensors such as gyroscopes and accelerators, including inertial sensors comprising ring resonators, utilize said transducers both to generate oscillations of their resonators and to sense the changes in such oscillations produced, in the sensors' frame of reference, by Coriolis forces appearing due to the movement of the sensors.

Abstract translation: 包括由压电材料制成的框架结构的传感器通过压电效应在夹持框架结构的电极与与框架结构的变形相关联的机械能相关联的静电能量之间转换能量。 诸如陀螺仪和加速器的惯性传感器，包括包括环形谐振器的惯性传感器，利用所述换能器来产生它们的谐振器的振荡，并且感测在传感器参考系中由于由于所述传感器参考系而出现的科里奥利力产生的这种振荡的变化 传感器的运动。