公开(公告)号：US10921360B2

公开(公告)日：2021-02-16

申请号：US16269847

申请日：2019-02-07

Applicant: HRL Laboratories, LLC

Inventor： Randall L. Kubena ,  Walter S. Wall ,  Yook-Kong Yong ,  Richard J. Joyce

IPC: G01R29/08 ,  H04B17/318 ,  H04B17/21

Abstract: A RF field sensor in which a magnetostrictive film is deposited on one or more electrodes of one or more quartz resonator(s) in which an electric field of the RF field is detected along one axis of the RF field sensor and a magnetic field of the RF field is detected along an orthogonal axis of the RF field sensor simultaneously.

公开(公告)号：US11563419B1

公开(公告)日：2023-01-24

申请号：US16543409

申请日：2019-08-16

Applicant: HRL Laboratories, LLC

Inventor： Yook-Kong Yong ,  Randall L. Kubena ,  Deborah J. Kirby

IPC: H01L41/08 ,  H03H9/17

Abstract: A resonator includes a piezoelectric layer comprising a piezoelectric material, the piezoelectric layer having a first surface and a second surface; an inner electrode disposed on the first surface of the piezoelectric layer, the inner electrode connected to a circuit; and an outer electrode surrounding the inner electrode on the first surface of the piezoelectric layer, the outer electrode left floating or connected to ground. The inner electrode and the outer electrode are separated by at least one gap smaller than an acoustic wavelength. One single piece electrode or multiple piece electrodes may be disposed on the second surface of the piezoelectric layer. The outer electrodes are configured for optimal modal confinement of an acoustic resonance while the inner electrodes are configured to produce a higher motional resistance than the interconnect resistance for maintaining high Q.

公开(公告)号：US09879997B1

公开(公告)日：2018-01-30

申请号：US14547057

申请日：2014-11-18

Applicant: HRL LABORATORIES, LLC

Inventor： Randall L. Kubena ,  Yook-Kong Yong ,  Deborah J. Kirby ,  David T. Chang

IPC: G01C19/5677 ,  H03H9/19

CPC classification number: G01C19/5677 ,  G01C19/5684 ,  H03H9/19

Abstract: A resonator assembly includes a semiconductor substrate; a resonator gyroscope, the resonator gyroscope including a first resonator formed in a layer of a first material; and an oscillator on the semiconductor substrate, the oscillator including a second resonator formed of a second material. The second resonator is disposed in a cavity, the cavity comprising a first recess in the layer of a first material with the edges of the first recess being attached to the substrate, or the cavity comprising a second recess in the substrate and the edges of the second recess being attached to the layer of a first material.