公开(公告)号：US5847466A

公开(公告)日：1998-12-08

申请号：US759441

申请日：1996-12-05

申请人： Kazunori Ito ,  Mitsugu Irinoda ,  Kaichi Ueno ,  Mamoru Ishida ,  Takahiko Kuroda

发明人： Kazunori Ito ,  Mitsugu Irinoda ,  Kaichi Ueno ,  Mamoru Ishida ,  Takahiko Kuroda

IPC分类号： H01L21/66 ,  H01L21/302 ,  H01L21/3065 ,  H01L21/3205 ,  H01L21/60 ,  H01L21/768 ,  H01L23/485 ,  H01L23/522 ,  H01L23/48 ,  H01L23/52 ,  H01L29/40

CPC分类号： H01L24/05 ,  H01L24/03 ,  H01L2224/05093 ,  H01L2224/05096 ,  H01L2224/05556 ,  H01L2924/00014 ,  H01L2924/01004 ,  H01L2924/01005 ,  H01L2924/01011 ,  H01L2924/01013 ,  H01L2924/01014 ,  H01L2924/01033 ,  H01L2924/01074 ,  H01L2924/01082 ,  H01L2924/14

摘要： A semiconductor device having a multilayer interconnection structure, includes a substrate having a metal interconnect layer provided thereon and N number (N being an integer of 2 or greater) of layers of insulating film formed one on top of another on the substrate. Each layer of insulating film has a metal interconnect layer including at least one bonding pad section provided thereon. At least one via hole filled with an electrically conductive material is provided in each of the layers for interconnecting metal interconnect layers. At least one bonding pad connecting hole filled with an electrically conductive material is provided in each of the layers for interconnecting bonding pad sections. The at least one bonding pad connecting hole is no more than twice as large in diameter as a smallest via hole.

摘要翻译： 具有多层互连结构的半导体器件包括其上设置有金属互连层的基板和在基板上一个在其上彼此形成的N个绝缘膜层的N个（N为2以上的整数）。 每层绝缘膜具有包括设置在其上的至少一个接合焊盘部分的金属互连层。 在每个层中设置至少一个填充有导电材料的通孔，用于互连金属互连层。 在每个层中设置至少一个填充有导电材料的焊盘连接孔，用于互连焊盘区段。 所述至少一个焊盘连接孔的直径不小于最小通孔的直径的两倍。

公开(公告)号：US10759175B2

公开(公告)日：2020-09-01

申请号：US16278937

申请日：2019-02-19

申请人： Toshiaki Masuda ,  Tsutoh Aoyama ,  Takahiko Kuroda ,  Masaki Kato

发明人： Toshiaki Masuda ,  Tsutoh Aoyama ,  Takahiko Kuroda ,  Masaki Kato

IPC分类号： B41J2/175 ,  B41J2/145 ,  B41J2/16 ,  B41J2/14

摘要： A liquid discharge head includes a plurality of nozzles to discharge a liquid, a plurality of pressure chambers communicating with the plurality of nozzles, respectively, a plurality of individual supply channels communicating with the plurality of pressure chambers, respectively, a plurality of common-supply branch channels each having a side face and a bottom face and communicating with two or more of the plurality of individual supply channels, respectively, and a common-supply main channel communicating with the plurality of common-supply branch channels. The plurality of common-supply branch channels includes a curved portion on a corner between the side face and the bottom face of each of the plurality of common-supply branch channels along a direction of liquid flow in the plurality of common-supply branch channels.

公开(公告)号：US07416281B2

公开(公告)日：2008-08-26

申请号：US10521055

申请日：2003-08-05

申请人： Manabu Nishimura ,  Takahiko Kuroda ,  Shuya Abe ,  Makoto Tanaka ,  Mitsugu Irinoda ,  Kenichiroh Hashimoto

发明人： Manabu Nishimura ,  Takahiko Kuroda ,  Shuya Abe ,  Makoto Tanaka ,  Mitsugu Irinoda ,  Kenichiroh Hashimoto

IPC分类号： B41J2/04 ,  H02N1/00 ,  G02B26/00

CPC分类号： B41J2/1628 ,  B06B1/0292 ,  B41J2/14314 ,  B41J2/16 ,  B41J2/1623 ,  B41J2/1629 ,  B41J2/1639 ,  B41J2/1642 ,  B41J2/1645 ,  B41J2/1646 ,  B41J2002/14411

摘要： An electrostatic actuator has high-reliability and less variation in characteristics. An electrode (12a) is formed on a substrate (1), and a plurality of partition parts (50a) are formed on the electrode. A vibration plate (19) is formed on the partition parts (50a), and is deformable by an electrostatic force generated by a voltage applied to the electrode (12a) so that an air gap (14a) is formed between the partition parts (50a) by etching a part of a sacrifice layer (14) formed between the electrode (12a) and the vibration plate (19). The partition parts (50a) are formed of remaining parts of the sacrifice layer (14) after the etching.

摘要翻译： 静电致动器具有高可靠性和较小的特性变化。 在基板（1）上形成电极（12a），在电极上形成多个分隔部（50a）。 振动板（19）形成在分隔部分（50a）上，并且由施加到电极（12a）的电压产生的静电力变形，使得在隔板 通过蚀刻形成在电极（12a）和振动板（19）之间的牺牲层（14）的一部分，部分（50μm）。 在蚀刻之后，分隔部分（50a）由牺牲层（14）的剩余部分形成。

公开(公告)号：US20070057999A1

公开(公告)日：2007-03-15

申请号：US11511849

申请日：2006-08-28

申请人： Takahiko Kuroda

发明人： Takahiko Kuroda

IPC分类号： B41J2/06 ,  B41J2/04 ,  H02N1/00

CPC分类号： B41J2/14314 ,  B41J2/16 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1639 ,  B41J2/1642 ,  F04B43/043 ,  F04B43/082 ,  F04B43/12 ,  G02B26/0825 ,  G02B26/0841

摘要： An electrostatic actuator is disclosed that includes a deformable oscillating plate that is deformed by electrostatic force, an electrode that is arranged opposite the oscillating plate via a gap formed by sacrificial layer etching, a connection path that is connected to the gap, an atmosphere connecting hole that connects the connection path to the exterior, and a resistance path arranged between the atmosphere connecting hole and the connection path. The resistance path is configured to resist penetration of a sealing agent for sealing the atmosphere connecting hole into the connection path.

摘要翻译： 公开了一种静电致动器，其包括通过静电力变形的可变形振荡板，经由牺牲层蚀刻形成的间隙与振荡板相对设置的电极，连接到间隙的连接路径，大气连接孔 其将连接路径连接到外部，以及电阻路径，其布置在大气连接孔和连接路径之间。 电阻路径被构造成抵抗用于将大气连接孔密封到连接路径中的密封剂的穿透。

公开(公告)号：US06210641B1

公开(公告)日：2001-04-03

申请号：US09112289

申请日：1998-07-09

申请人： Jun Yamada ,  Kenji Kanehara ,  Motomasa Iizuka ,  Takeshi Mizobuchi ,  Hidetaka Hayashi ,  Kouhei Yamada ,  Isao Watanabe ,  Takahiko Kuroda

发明人： Jun Yamada ,  Kenji Kanehara ,  Motomasa Iizuka ,  Takeshi Mizobuchi ,  Hidetaka Hayashi ,  Kouhei Yamada ,  Isao Watanabe ,  Takahiko Kuroda

IPC分类号： G01N2712

CPC分类号： G01N27/4071 ,  F02D19/024 ,  F02D19/027 ,  F02D41/0027 ,  F02D41/1444 ,  F02D41/1456 ,  F02M21/0215 ,  F02M21/0224 ,  Y02T10/32

摘要： An air-fuel ratio control system for a gas-fueled engine which is capable of achieving the combustion in a target air-fuel ratio to surely purify an exhaust gas through an exhaust purification catalyst. In the air-fuel ratio control system, a three-way catalytic converter is placed in an exhaust pipe of the engine and an O2 sensor is located on the upstream side of the three-way catalytic converter. The O2 sensor comprises an element, and an atmosphere side electrode is formed on an inner surface of the element while an exhaust gas side electrode is formed on an outer surface thereof. The exhaust gas side electrode is coated with a catalyst layer which can remove hydrogen through a catalytic reaction. A control unit of the control system controls a fuel supply quantity by a gas injector using a feedback correction coefficient on the basis of the output of the O2 sensor, thereby reducing the deviation between an air-fuel ratio measured by the O2 sensor and a target air-fuel ratio.

摘要翻译： 一种能够实现目标空燃比燃烧的气体燃料发动机的空燃比控制系统，通过排气净化催化剂可靠地净化废气。 在空燃比控制系统中，在发动机的排气管内配置有三元催化转化器，O2传感器位于三元催化转化器的上游侧。 O2传感器包括元件，并且在元件的内表面上形成气氛侧电极，同时在其外表面上形成排气侧电极。 排气侧电极涂覆有可以通过催化反应除去氢的催化剂层。 控制系统的控制单元基于O2传感器的输出，使用反馈校正系数通过气体喷射器控制燃料供给量，从而减少由O 2传感器测量的空燃比与目标之间的偏差 空燃比。

公开(公告)号：US20150171307A1

公开(公告)日：2015-06-18

申请号：US14572930

申请日：2014-12-17

申请人： Toshiaki MASUDA ,  Keishi Miwa ,  Keisuke Hayashi ,  Takahiko Kuroda

发明人： Toshiaki MASUDA ,  Keishi Miwa ,  Keisuke Hayashi ,  Takahiko Kuroda

IPC分类号： H01L41/053 ,  H01L41/23 ,  H01L41/29 ,  B41J2/14 ,  H01L41/047

CPC分类号： H01L41/0533 ,  H01L41/0805 ,  H01L41/0973 ,  H01L41/23

摘要： A method of producing an electromechanical transducer element includes forming a first, common electrode on one of a substrate and an undercoat layer; forming an electromechanical transducer film on the first electrode; forming a second electrode on the electromechanical transducer film; forming a first protective film on an upper surface of the second electrode, the electromechanical transducer film, and a side wall of the second electrode, and selectively forming a second protective film on a portion of the first protective film protecting the electromechanical transducer film and the side wall of the second electrode.

摘要翻译： 一种制造机电换能器元件的方法包括在基底和底涂层之一上形成第一公共电极; 在所述第一电极上形成机电换能器膜; 在所述机电换能器膜上形成第二电极; 在第二电极的上表面，机电换能器膜和第二电极的侧壁上形成第一保护膜，并且在保护机电换能器膜的第一保护膜的一部分上选择性地形成第二保护膜， 第二电极的侧壁。

公开(公告)号：US07328981B2

公开(公告)日：2008-02-12

申请号：US11511849

申请日：2006-08-28

申请人： Takahiko Kuroda

发明人： Takahiko Kuroda

IPC分类号： B41J2/05

CPC分类号： B41J2/14314 ,  B41J2/16 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1639 ,  B41J2/1642 ,  F04B43/043 ,  F04B43/082 ,  F04B43/12 ,  G02B26/0825 ,  G02B26/0841

摘要： An electrostatic actuator is disclosed that includes a deformable oscillating plate that is deformed by electrostatic force, an electrode that is arranged opposite the oscillating plate via a gap formed by sacrificial layer etching, a connection path that is connected to the gap, an atmosphere connecting hole that connects the connection path to the exterior, and a resistance path arranged between the atmosphere connecting hole and the connection path. The resistance path is configured to resist penetration of a sealing agent for sealing the atmosphere connecting hole into the connection path.

摘要翻译： 公开了一种静电致动器，其包括通过静电力变形的可变形振荡板，经由牺牲层蚀刻形成的间隙与振荡板相对设置的电极，连接到间隙的连接路径，大气连接孔 其将连接路径连接到外部，以及电阻路径，其布置在大气连接孔和连接路径之间。 电阻路径被构造成抵抗用于将大气连接孔密封到连接路径中的密封剂的穿透。

公开(公告)号：US20060232638A1

公开(公告)日：2006-10-19

申请号：US10555218

申请日：2005-03-11

申请人： Takahiko Kuroda ,  Shuya Abe

发明人： Takahiko Kuroda ,  Shuya Abe

IPC分类号： B41J2/045

CPC分类号： B41J2/1639 ,  B41J2/14314 ,  B41J2/16 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1642 ,  B41J2/1645 ,  G02B26/0841

摘要： An actuator includes a vibration plate area displaced by an electrostatic force, and electrodes facing each other via a first space in the vibration plate area The first space is formed by a sacrificial layer process using a sacrificial layer removing hole. A barrier as a fluid resistance is formed between the first space and a second space situated in the vicinity of the sacrificial layer removing hole.

摘要翻译： 致动器包括通过静电力移动的振动板区域和经由振动板区域中的第一空间相对的电极。第一空间由使用牺牲层去除孔的牺牲层工艺形成。 在位于牺牲层去除孔附近的第一空间和第二空间之间形成作为流体阻力的屏障。

公开(公告)号：US20050264617A1

公开(公告)日：2005-12-01

申请号：US10521055

申请日：2003-08-05

申请人： Manabu Nishimura ,  Takahiko Kuroda ,  Shuya Abe ,  Makoto Tanaka ,  Mitsugu Irinoda ,  Kenichiroh Hashimoto

发明人： Manabu Nishimura ,  Takahiko Kuroda ,  Shuya Abe ,  Makoto Tanaka ,  Mitsugu Irinoda ,  Kenichiroh Hashimoto

IPC分类号： B41J2/14 ,  B41J2/16 ,  B41J2/045

CPC分类号： B41J2/1628 ,  B06B1/0292 ,  B41J2/14314 ,  B41J2/16 ,  B41J2/1623 ,  B41J2/1629 ,  B41J2/1639 ,  B41J2/1642 ,  B41J2/1645 ,  B41J2/1646 ,  B41J2002/14411

摘要： An electrostatic actuator has high-reliability and less variation in characteristics. An electrode (12a) is formed on a substrate (1), and a plurality of partition parts (50a) are formed on the electrode. A vibration plate (19) is formed on the partition parts (50a), and is deformable by an electrostatic force generated by a voltage applied to the electrode (12a) so that an air gap (14a) is formed between the partition parts (50a) by etching a part of a sacrifice layer (14) formed between the electrode (12a) and the vibration plate (19). The partition parts (50a) are formed of remaining parts of the sacrifice layer (14) after the etching.

摘要翻译： 静电致动器具有高可靠性和较小的特性变化。 在基板（1）上形成电极（12a），在电极上形成多个分隔部（50a）。 振动板（19）形成在分隔部分（50a）上，并且由施加到电极（12a）的电压产生的静电力变形，使得在隔板 通过蚀刻形成在电极（12a）和振动板（19）之间的牺牲层（14）的一部分，部分（50μm）。 在蚀刻之后，分隔部分（50a）由牺牲层（14）的剩余部分形成。