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公开(公告)号：US11835626B2
公开(公告)日：2023-12-05
申请号：US17948026
申请日：2022-09-19
Inventor： Duhyun Lee , Muhammad Alam , Harry Atwater , Ragip Pala , Byunghoon Na , Seunghoon Han
CPC classification number: G01S17/02 , G01S7/481 , G01S7/4817 , G02F1/01716 , G02F1/21 , G02F1/292 , G02F1/0151 , G02F1/213 , G02F2202/30
Abstract: Provided are an optical modulating device and a system including the optical modulating device. The optical modulating device includes a substrate, and a phase modulator formed on the substrate and including a Fabry-Perot cavity. The Fabry-Perot cavity of the phase modulator includes a first reflective layer, a second reflective layer, and a tunable core formed between the first reflective layer and the second reflective layer, wherein the tunable core is formed of a semiconductor material and is configured to modulate a phase of light corresponding to modulation of a refractive index of the tunable core according to electrical control.
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公开(公告)号：US11747657B2
公开(公告)日：2023-09-05
申请号：US17697791
申请日：2022-03-17
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor： Sunil Kim , Junghyun Park , Duhyun Lee , Byunggil Jeong
CPC classification number: G02F1/015 , H01S5/0085 , H01S5/18375 , G02F2202/10
Abstract: Provided is an optical modulator including a plurality of unit cells, an active layer including a plurality of refractive index changing areas that are separated from each other, each of the plurality of refractive index changing areas having a refractive index that changes based on an electrical signal applied thereto, a plurality of antenna patterns provided over the active layer, and a mirror layer provided under the active layer opposite to the plurality of antenna patterns.
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23.发明授权公开(公告)号：US11714301B2
公开(公告)日：2023-08-01
申请号：US16880350
申请日：2020-05-21
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor： Junghyun Park , Yeonsang Park , Sunil Kim , Duhyun Lee , Byunggil Jeong
CPC classification number: G02F1/0311 , G02B26/10 , G02F1/0147 , G02F1/0316 , G02F1/09 , G02F2201/307 , G02F2201/346
Abstract: Provided is a light modulator including a substrate, and a resonator configured to modulate a phase of incident light by modulating a refractive index based on an external stimulus, the resonator comprising a first reflective structure provided on the substrate, a cavity layer provided on the first reflective structure, and a second reflective structure provided on the cavity layer, wherein at least one of the first reflective structure or the second reflective structure comprises first material layers, second material layers that are alternately stacked with the first material layers, and a third material layer, and wherein each of the first material layers has a first refractive index, each of the second material layers has a second refractive index that is different from the first refractive index, and the third material layer has a third refractive index that is different from the first refractive index.
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公开(公告)号：US11513219B2
公开(公告)日：2022-11-29
申请号：US16884850
申请日：2020-05-27
Inventor： Duhyun Lee , Muhammad Alam , Harry Atwater , Ragip Pala , Byunghoon Na , Seunghoon Han
Abstract: Provided are an optical modulating device and a system including the optical modulating device. The optical modulating device includes a substrate, and a phase modulator formed on the substrate and including a Fabry-Perot cavity. The Fabry-Perot cavity of the phase modulator includes a first reflective layer, a second reflective layer, and a tunable core formed between the first reflective layer and the second reflective layer, wherein the tunable core is formed of a semiconductor material and is configured to modulate a phase of light corresponding to modulation of a refractive index of the tunable core according to electrical control.
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公开(公告)号：US11287667B2
公开(公告)日：2022-03-29
申请号：US16362020
申请日：2019-03-22
Inventor： Duhyun Lee , Andrei Faraon
Abstract: A spatial filtering apparatus includes a composite filter including first filter patterns respectively having a first phase profile, and second filter patterns respectively having a second phase profile, wherein the first filter patterns and the second filter patterns overlap with each other, wherein first light in a first polarization direction that is emitted on the composite filter is first spatially filtered by the first filter patterns, and wherein second light in a second polarization direction that is emitted on the composite filter is second spatially filtered by the second filter patterns.
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Patent Agency Ranking
公开(公告)号：US11237452B2
公开(公告)日：2022-02-01
申请号：US15683879
申请日：2017-08-23
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor： Jisoo Kyoung , Seokho Song , Changgyun Shin , Duhyun Lee
IPC: G02F1/29
Abstract: An optical modulating device, a beam steering device, and a system employing the same are provided. The optical modulating device includes an active layer, a driver configured to electrically control a refraction index of the active layer, and a nano-antenna disposed on the active layer, and having a dual nano-antenna structure including a first nano-antenna and a second nano-antenna, the first nano-antenna having a length different from a length of the second nano-antenna, and the first nano-antenna being spaced apart from the second nano-antenna. The driver includes a first driver electrically connected to the first nano-antenna, and a second driver electrically connected to the second nano-antenna.
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公开(公告)号：US20210405500A1
公开(公告)日：2021-12-30
申请号：US17101200
申请日：2020-11-23
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor： Junghyun Park , Sunil Kim , Duhyun Lee , Byunggil Jeong
IPC: G02F1/29
Abstract: Provided is an optical modulating device including an incidence optical system, an optical modulating assembly including a plurality of nano-antennas that form a meta-grating based on a driving signal, the optical modulating assembly being configured to change a traveling direction of incidence light incident at an incidence angle from the incidence optical system based on an effective displacement of the meta-grating according to the driving signal, and an emission optical system configured to emit light steered by the optical modulating assembly, wherein the emission optical system is further configured to emit first-order diffraction light of the incidence light based on the meta-grating.
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公开(公告)号：US10950749B2
公开(公告)日：2021-03-16
申请号：US16175113
申请日：2018-10-30
Inventor： Duhyun Lee , Ruzan Sokhoyan , Yu-Jung Lu , Ghazaleh Kafaie Shirmanesh , Harry A. Atwater , Ragip A. Pala , Chan-Wook Baik
Abstract: Provided are light emission devices including an output coupler and optical apparatuses having the same. The light emission device may include a QD layer containing quantum dots and a nano-antenna structure including an output coupler configured to control an output characteristic of light emitted from the QD layer. The output coupler may be configured to output an emission wavelength of the QD layer. The nano-antenna structure may include one of a metallic antenna, a dielectric antenna, and a slit-containing structure, or may have a multi-patch antenna structure or a fishbone antenna structure.
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公开(公告)号：US10168622B2
公开(公告)日：2019-01-01
申请号：US15628611
申请日：2017-06-20
Applicant: Samsung Electronics Co., Ltd.
Inventor： Yibing M. Wang , Duhyun Lee
Abstract: MQW devices, IC chips and methods may be used in semiconductor lithography patterning systems. An MQW device includes an array of pixels that have transmission elements and associated support circuits. The support circuits have preliminary memory cells and final memory cells. The final memory cells store transmittance values that control transmittances of the associated transmission elements. This way, exposure of a target with a lithography system for purposes of patterning the target may be performed through the transmission elements according to the controlled transmittances, while subsequent transmittance values are being received by the preliminary memory cells from memory banks. The exposure of the target therefore needs to pause for less time, in order to wait for the MQW device to be refreshed with the subsequent transmittance values. Accordingly the whole semiconductor lithography patterning system may operate faster and thus have more throughput.
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公开(公告)号：US09958609B2
公开(公告)日：2018-05-01
申请号：US15096568
申请日：2016-04-12
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor： Changbum Lee , Duhyun Lee , Sunil Kim , Jungwoo Kim , Byunggil Jeong
IPC: B65B33/00 , B05D1/32 , G02B6/13 , G02B6/122 , B05D7/00 , B05D5/06 , B05D3/00 , C23C30/00 , C23C28/00
CPC classification number: G02B6/13 , B05D3/007 , B05D5/06 , B05D7/5883 , B82Y20/00 , C23C28/32 , C23C28/345 , C23C30/005 , G02B1/002 , G02B5/008 , G02B6/1226
Abstract: A method of manufacturing a nano antenna is provided. The method includes forming a material layer on a substrate, defining a portion of the material layer, forming an adhesion layer on the defined portion of the material layer, forming a nano antenna material layer on the adhesion layer, and removing the adhesion layer to thereby manufacture the nano antenna.
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