公开(公告)号：US11842883B2

公开(公告)日：2023-12-12

申请号：US17718047

申请日：2022-04-11

Applicant: Samsung Display Co., Ltd.

Inventor： Jong-hoon Park ,  Sukwon Jung ,  Hyunwoo Joo ,  Jaihyuk Choi ,  Kyungjoo Min ,  Wonwoong Park

IPC: H01J37/32 ,  C23C16/44 ,  C23C16/505 ,  C23C16/455 ,  C23C16/509 ,  H10K71/00 ,  C23C16/34 ,  H10K71/16

CPC classification number: H01J37/32082 ,  C23C16/4411 ,  C23C16/4412 ,  C23C16/45565 ,  C23C16/505 ,  C23C16/5096 ,  H01J37/3244 ,  H01J37/32091 ,  H01J37/32458 ,  H01J37/32467 ,  H01J37/32568 ,  H01J37/32577 ,  H10K71/00 ,  C23C16/345 ,  H01J2237/3321 ,  H10K71/164

Abstract: A chemical vapor deposition apparatus includes a chamber, a susceptor supporting a substrate, a backing plate to which power is applied, a diffuser providing a deposition gas, and a first insulator. The first insulator may include a first portion covering a top surface of the backing plate, and a second portion assembled with the first portion and covering a sidewall of the backing plate.

公开(公告)号：US10991790B2

公开(公告)日：2021-04-27

申请号：US16595357

申请日：2019-10-07

Applicant: Samsung Display Co., Ltd.

Inventor： Youngsu Kim ,  Dawoon Kim ,  Cheuljin Park ,  Sukwon Jung

IPC: H01L27/32

Abstract: A display device includes: a substrate having a first surface, a second surface opposite to the first surface, and an inner side surface defining through holes; a first wiring and a second wiring disposed on the first surface; and a first conductor and a second conductor disposed in one of the through holes. The first conductor is connected to the first wiring, the second conductor is connected to the second wiring, and the first and second conductors are insulated from each other.

公开(公告)号：US09722206B2

公开(公告)日：2017-08-01

申请号：US14811729

申请日：2015-07-28

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Myungsoo Huh ,  Sunghun Key ,  Sungchul Kim ,  Cheollae Roh ,  Sukwon Jung ,  Hyunwoo Joo ,  Jaihyuk Choi

IPC: H01L33/00 ,  H01L51/52 ,  H01J37/32 ,  C23C16/04 ,  C23C16/34 ,  C23C16/455 ,  C23C16/505

CPC classification number: H01L51/5256 ,  C23C16/042 ,  C23C16/345 ,  C23C16/45565 ,  C23C16/505 ,  H01J37/32091 ,  H01J37/3244

Abstract: A display device and an apparatus and method for manufacturing the same are disclosed. The display device includes: a substrate; a display unit formed on the substrate; and an inorganic layer formed on the display unit, wherein a water vapor transmission rate (WVTR) of the inorganic layer is 5×10−5 g/m2 day or less. The apparatus for manufacturing a display device includes: a chamber; a shower head for spraying a mixed gas into the chamber; a plasma generation unit for forming plasma from the mixed gas; a susceptor facing the shower head and on which a substrate is seated; and a power supply unit electrically connected to the plasma generation unit, wherein a frequency of a current supplied from the power supply unit to the plasma generation unit is between about 27 MHz and about 42 MHz.

公开(公告)号：US20160226031A1

公开(公告)日：2016-08-04

申请号：US14929159

申请日：2015-10-30

Applicant: Samsung Display Co., Ltd.

Inventor： Choelmin Jang ,  Dongkyun Ko ,  Inkyo Kim ,  Sukwon Jung ,  Nam Ha ,  Myungsoo Huh

IPC: H01L51/56 ,  H01L51/00 ,  H01L51/52

CPC classification number: H01L51/56 ,  C23C16/4412 ,  C23C16/45551 ,  C23C16/45563 ,  C23C16/54 ,  H01L51/0097 ,  H01L51/5253 ,  H01L51/5256

Abstract: An apparatus and method for manufacturing a display apparatus includes: a chamber; a first nozzle unit at the chamber, the first nozzle unit configured to deposit an organic layer or an inorganic layer on a substrate; a second nozzle unit at the chamber, the second nozzle unit configured to deposit the organic layer or the inorganic layer on a substrate and the second nozzle unit being linearly aligned with the first nozzle unit in a first direction; and an injection nozzle unit between the first nozzle unit and the second nozzle unit, the injection nozzle unit configured to inject a first gas in the chamber toward the substrate.

Abstract translation: 一种显示装置的制造装置和方法，包括：室; 在所述腔室处的第一喷嘴单元，所述第一喷嘴单元被配置为在基板上沉积有机层或无机层; 所述第二喷嘴单元被配置为将所述有机层或所述无机层沉积在基板上，并且所述第二喷嘴单元在所述第一方向上与所述第一喷嘴单元线性对准; 以及在所述第一喷嘴单元和所述第二喷嘴单元之间的喷嘴单元，所述喷射喷嘴单元被配置为将所述室中的第一气体朝向所述基板喷射。

公开(公告)号：US20160204364A1

公开(公告)日：2016-07-14

申请号：US14730126

申请日：2015-06-03

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Hyunwoo Joo ,  Sungwoo Ryu ,  Jaewon Shim ,  Whanchae Yong ,  Sukwon Jung ,  Myungsoo Huh

IPC: H01L51/00 ,  B05D1/02 ,  H01L51/52 ,  H01L27/32 ,  H01L51/56 ,  B05B7/00 ,  C23C4/134

CPC classification number: H01L51/0096 ,  B05B7/00 ,  B05D1/02 ,  C23C4/134 ,  C25D5/08 ,  H01L27/3244 ,  H01L51/003 ,  H01L51/5237 ,  H01L51/56 ,  H01L2227/323 ,  H01L2227/326

Abstract: Provided are a display apparatus and an apparatus and method of manufacturing the display apparatus. The apparatus for manufacturing a display apparatus includes: a dry cleansing unit configured to remove impurities from a surface of a mother substrate; an electrolyte treatment unit connected to the dry cleansing unit and configured to treat the surface of the mother substrate with electrolytes; and an exfoliated layer forming unit connected to the electrolyte treatment unit and configured to form an exfoliated layer on the mother substrate.

Abstract translation: 提供一种显示装置及其制造方法。 用于制造显示装置的装置包括：干洗单元，其构造成从母基板的表面去除杂质; 电解质处理单元，连接到所述干洗单元并且被配置为用电解质处理所述母基板的表面; 以及剥离层形成单元，连接到所述电解质处理单元并且被配置为在所述母体基板上形成剥离层。