公开(公告)号：US11417772B2

公开(公告)日：2022-08-16

申请号：US16778114

申请日：2020-01-31

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Min Hee Cho ,  Woo Bin Song ,  Hyun Mog Park ,  Min Woo Song

IPC: H01L29/786 ,  H01L29/417 ,  H01L29/04 ,  H01L29/45

Abstract: A semiconductor device includes a substrate, an oxide semiconductor film on the substrate, a first gate structure on the oxide semiconductor film and a contact that is in contact with the oxide semiconductor film, the contact being disposed on a boundary surface with the oxide semiconductor film, and including a metal oxide film that includes a transition metal.

公开(公告)号：US11342330B2

公开(公告)日：2022-05-24

申请号：US17172124

申请日：2021-02-10

Applicant: Samsung Electronics Co., Ltd.

Inventor： Min Hee Cho ,  Hyunmog Park ,  Woo Bin Song ,  Minsu Lee ,  Wonsok Lee

IPC: H01L27/108

Abstract: A semiconductor memory device is provided. The device may include a lower gate line provided on a substrate and extended in a first direction, an upper gate line vertically overlapped with the lower gate line and extended in the first direction, a first capacitor provided between the lower gate line and the upper gate line, a second capacitor provided between the lower gate line and the upper gate line and spaced apart from the first capacitor in the first direction, a lower semiconductor pattern provided to penetrate the lower gate line and connected to the first capacitor, an upper semiconductor pattern provided to penetrate the upper gate line and connected to the second capacitor, and a lower insulating pattern provided between the second capacitor and the lower gate line to cover the entire region of a bottom surface of the second capacitor.

公开(公告)号：US20210057417A1

公开(公告)日：2021-02-25

申请号：US17076025

申请日：2020-10-21

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Minhee Cho ,  Junsoo Kim ,  Ho Lee ,  Chankyung Kim ,  Hei Seung Kim ,  Jaehong Min ,  Sangwuk Park ,  Woo Bin Song ,  Sang Woo Lee

IPC: H01L27/108

Abstract: A semiconductor device can include a semiconductor substrate and an active region in the semiconductor substrate, where the active region can include an oxide semiconductor material having a variable atomic concentration of oxygen. A first source/drain region can be in the active region, where the first source/drain region can have a first atomic concentration of oxygen in the oxide semiconductor material. A second source/drain region can be in the active region spaced apart from first source/drain region and a channel region can be in the active region between the first source/drain region and the second source/drain region, where the channel region can have a second atomic concentration of oxygen in the oxide semiconductor material that is less than the first atomic concentration of oxygen. A gate electrode can be on the channel region and extend between the first source/drain region and the second source/drain region.

公开(公告)号：US10854612B2

公开(公告)日：2020-12-01

申请号：US16185892

申请日：2018-11-09

Applicant: Samsung Electronics Co., Ltd.

Inventor： Minhee Cho ,  Junsoo Kim ,  Ho Lee ,  Chankyung Kim ,  Hei Seung Kim ,  Jaehong Min ,  Sangwuk Park ,  Woo Bin Song ,  Sang Woo Lee

IPC: H01L27/108

Abstract: A semiconductor device can include a semiconductor substrate and an active region in the semiconductor substrate, where the active region can include an oxide semiconductor material having a variable atomic concentration of oxygen. A first source/drain region can be in the active region, where the first source/drain region can have a first atomic concentration of oxygen in the oxide semiconductor material. A second source/drain region can be in the active region spaced apart from first source/drain region and a channel region can be in the active region between the first source/drain region and the second source/drain region, where the channel region can have a second atomic concentration of oxygen in the oxide semiconductor material that is less than the first atomic concentration of oxygen. A gate electrode can be on the channel region and extend between the first source/drain region and the second source/drain region.

公开(公告)号：US10776549B2

公开(公告)日：2020-09-15

申请号：US16266143

申请日：2019-02-04

Applicant: Samsung Electronics Co., Ltd. ,  Industry-Academic Cooperation Foundation, Yonsei University

Inventor： Dong Chan Suh ,  Mann-Ho Cho ,  Woo Bin Song ,  Kwang Sik Jeong

IPC: H01L21/66 ,  G06F30/39 ,  H01L21/265 ,  G06F119/18

Abstract: A method for manufacturing a semiconductor device with an improved doping profile is provided. The method includes providing a measuring target including a first region having a plurality of layers, inputting a first input signal into the measuring target and measuring a resulting first output signal, such as a change over time of a first output electric field that is transmitted through or reflected by the first region. Based on a first model including first structural information of a plurality of first modeling layers and information on doping concentrations of each of the plurality of first modeling layers, calculating a second output signal. When a result of comparing the first output signal with the second output signal is smaller than a threshold value, a three-dimensional model of the measuring target may be estimated based on the first model. Such non-destructive measurements may be used to determine manufacturing process parameters corresponding to ideal doping profiles and used to manufacture semiconductor devices implementing such manufacturing process parameters.