PLASMA DIAGNOSTIC CIRCUIT INCLUDING VARIABLE AMPLIFICATION UNIT AND METHOD OF OPERATING THE SAME

    公开(公告)号:US20240429034A1

    公开(公告)日:2024-12-26

    申请号:US18389713

    申请日:2023-12-19

    Abstract: A plasma diagnostic circuit includes a signal generator that outputs a first alternating current (AC) signal to a first reference node, a variable diagnostic circuit that includes a default electronic element connected between the first reference node and a measurement node and floated other electronic elements, a first probe that is connected to the measurement node and is exposed to plasma in a chamber, a differential amplifier that amplifies a difference between a first voltage of the first reference node and a second voltage of the measurement node and generates an analysis signal, and a selection controller that outputs a selection signal to the variable diagnostic circuit responsive to the analysis signal, wherein the selection signal indicates a target electronic element among the floated other electronic elements.

    PLASMA DIAGNOSTIC APPARATUS AND OPERATING METHOD THEREOF

    公开(公告)号:US20240242944A1

    公开(公告)日:2024-07-18

    申请号:US18351242

    申请日:2023-07-12

    CPC classification number: H01J37/32917 H01J2237/24564

    Abstract: A plasma diagnostic apparatus includes a substrate having at least one probe, a plasma diagnostic circuit mounted on the substrate, configured to diagnose plasma in a chamber with the at least one probe, and to store diagnosis result information, a wireless communication circuit mounted on the substrate and configured to wirelessly transmit the diagnosis result information to an external device, and a battery mounted on the substrate and configured to supply power to the plasma diagnostic circuit and to the wireless communication circuit.

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