公开(公告)号：US20250006477A1

公开(公告)日：2025-01-02

申请号：US18605110

申请日：2024-03-14

Applicant: Samsung Electronics Co., Ltd.

Inventor： Haewook PARK ,  Juhyun KIM ,  Younsok CHOI

IPC: H01J37/32 ,  G01R19/25 ,  H01L21/683

Abstract: A plasma diagnosis apparatus comprising; an upper substrate, a lower substrate stacked with the upper substrate, at least one probe on the upper substrate, a plasma diagnosis circuit mounted in the lower substrate and configured to diagnose plasma in a chamber through the probe, a wireless communication circuit mounted in the lower substrate and configured to wirelessly transmit a result of the plasma diagnosis circuit to an external device, a battery mounted in the lower substrate and configured to supply power to the plasma diagnosis circuit and the wireless communication circuit, and a wireless charging circuit mounted in the lower substrate and configured to wirelessly charge the battery. The plasma diagnosis circuit includes a transformer, a first circuit connected to a primary wound line of the transformer, a second circuit connected between a secondary wound line of the transformer and the probe, a current detection circuit connected to the primary wound line of the transformer, and a signal processing circuit configured to generate data with diagnostic characteristics of the plasma based on an output of the current detection circuit.

公开(公告)号：US20250123323A1

公开(公告)日：2025-04-17

申请号：US18628896

申请日：2024-04-08

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Haewook PARK ,  Sungyeol KIM ,  Junhyung KIM ,  Seongkwan LEE ,  Jaemoo CHOI

IPC: G01R31/28 ,  H01L21/66

Abstract: A semiconductor test device includes a test chamber having at least one device under test disposed therein. A test module tests the at least one device under test. A signal connection device electrically connects the at least one device under test and the test module to each other. The signal connection device includes an electrically conductive thermal insulator (ECTI). The ECTI has electrical conductivity greater than or equal to about 1700 S/cm and thermal conductivity less than or equal to about 2.2 W/mK.

公开(公告)号：US20240429034A1

公开(公告)日：2024-12-26

申请号：US18389713

申请日：2023-12-19

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Juhyun KIM ,  Haewook PARK ,  Younsok CHOI

IPC: H01J37/32 ,  H03F3/45

Abstract: A plasma diagnostic circuit includes a signal generator that outputs a first alternating current (AC) signal to a first reference node, a variable diagnostic circuit that includes a default electronic element connected between the first reference node and a measurement node and floated other electronic elements, a first probe that is connected to the measurement node and is exposed to plasma in a chamber, a differential amplifier that amplifies a difference between a first voltage of the first reference node and a second voltage of the measurement node and generates an analysis signal, and a selection controller that outputs a selection signal to the variable diagnostic circuit responsive to the analysis signal, wherein the selection signal indicates a target electronic element among the floated other electronic elements.

公开(公告)号：US20240242944A1

公开(公告)日：2024-07-18

申请号：US18351242

申请日：2023-07-12

Applicant: Samsung Electronics Co., Ltd.

Inventor： Haewook PARK ,  Juhyun KIM ,  Younsok CHOI

IPC: H01J37/32

CPC classification number: H01J37/32917 ,  H01J2237/24564

Abstract: A plasma diagnostic apparatus includes a substrate having at least one probe, a plasma diagnostic circuit mounted on the substrate, configured to diagnose plasma in a chamber with the at least one probe, and to store diagnosis result information, a wireless communication circuit mounted on the substrate and configured to wirelessly transmit the diagnosis result information to an external device, and a battery mounted on the substrate and configured to supply power to the plasma diagnostic circuit and to the wireless communication circuit.