-
21.发明授权Method of manufacturing a cloverleaf microgyroscope and cloverleaf microgyroscope 失效三叶草微镜和三叶草微陀螺的制作方法公开(公告)号：US07202100B1
公开(公告)日：2007-04-10
申请号：US10933853
申请日：2004-09-03
IPC分类号： H01L21/00
CPC分类号： G01C19/5719
摘要： The present invention relates to a method of manufacturing a cloverleaf microgyroscope containing an integrated post comprising: attaching a post wafer to a resonator wafer, forming a bottom post from the post wafer being attached to the resonator wafer, attaching the resonator wafer to a base wafer, wherein the bottom post fits into a post hole in the base wafer, forming a top post from the resonator wafer, wherein the bottom and top post are formed symmetrically around the same axis, and attaching a cap wafer on top of the base wafer. The present invention relates further to a gyroscope containing an integrated post with on or off-chip electronics.
摘要翻译： 本发明涉及一种制造含有一体式立柱的三叶草微陀螺仪的方法，该方法包括：将后晶片连接到共振器晶片，从后晶片形成底柱，附着于谐振晶片，将谐振晶片连接到基片 其中所述底柱装配到所述基底晶片中的柱孔中，从所述谐振器晶片形成顶部柱，其中所述底部和顶部柱围绕相同的轴线对称地形成，并且将盖子晶片附接在所述基底晶片的顶部上。 本发明还涉及一种包含具有片上或片外电子器件的集成柱的陀螺仪。
-
22.发明授权Cloverleaf microgyroscope with through-wafer interconnects and method of manufacturing a cloverleaf microgyroscope with through-wafer interconnects 失效具有晶片间互连的三叶草微型陀螺仪和具有贯穿晶片互连的三叶草微型制造器的制造方法公开(公告)号：US07015060B1
公开(公告)日：2006-03-21
申请号：US11008721
申请日：2004-12-08
IPC分类号： H01L21/00
CPC分类号： G01C19/5719 , H01L21/76898
摘要： The present invention relates to a method of manufacturing a cloverleaf microgyroscope containing an integrated post comprising: attaching a post wafer to a resonator wafer, forming a bottom post from the post wafer being attached to the resonator wafer, preparing a base wafer with through-wafer interconnects, attaching the resonator wafer to the base wafer, wherein the bottom post fits into a post hole in the base wafer, forming a top post from the resonator wafer, wherein the bottom and top post are formed symmetrically around the same axis, and attaching a cap wafer on top of the base wafer.
摘要翻译： 本发明涉及一种制造含有一体式立柱的三叶草微陀螺的方法，其特征在于，包括：将后晶片连接到谐振晶片，从后晶片形成底柱，附着于谐振晶片，制备带晶圆的基晶片 互连，将谐振器晶片连接到基底晶片，其中底部支架装配到基底晶片中的柱孔中，从谐振器晶片形成顶部柱，其中底部和顶部柱围绕相同的轴线对称地形成，并且附接 在基底晶片顶部的盖子晶片。
-
23.发明授权Single crystal, tunneling and capacitive, three-axes sensor using eutectic bonding and a method of making same 失效单晶，隧道和电容，三轴传感器采用共晶接合及其制作方法公开(公告)号：US06835587B2
公开(公告)日：2004-12-28
申请号：US10639289
申请日：2003-08-11
申请人： Randall L. Kubena , David T. Chang
发明人： Randall L. Kubena , David T. Chang
IPC分类号： H01L2100
CPC分类号： B81C3/002 , B81B2201/0242 , B81B2201/025 , B81C2201/019 , B81C2203/036 , B81C2203/058 , G01C19/5656 , G01P15/0802 , G01P15/0894 , G01P15/18 , G01P2015/084 , G01P2015/0842 , H01H1/0036 , H01H59/0009
摘要： A first axis MEM tunneling/capacitive sensor and method of making same. Cantilever beam structures for at least two orthogonally arranged sensors and associated mating structures are defined on a first substrate or wafer, the at least two orthogonally arrange sensors having orthogonal directions of sensor sensitivity. A resonator structure of at least a third sensor is also defined, the third sensor being sensitive in a third direction orthogonal to the orthogonal directions of sensor sensitivity of the two orthogonally arranged sensors and the resonator structure having a mating structure thereon. Contact structures for at least two orthogonally arranged sensors are formed together with mating structures on a second substrate or wafer, the mating structures on the second substrate or wafer being of a complementary shape to the mating structures on the first substrate or wafer.
摘要翻译： 第一轴MEM隧道/电容传感器及其制造方法。 至少两个正交布置的传感器和相关联的配合结构的悬臂梁结构被限定在第一基板或晶片上，所述至少两个正交布置的传感器具有传感器灵敏度的正交方向。 还限定了至少第三传感器的谐振器结构，第三传感器在正交于两个正交布置的传感器的传感器灵敏度的正交方向的第三方向和在其上具有匹配结构的谐振器结构的灵敏度。 至少两个正交布置的传感器的接触结构与第二衬底或晶片上的配合结构一起形成，第二衬底或晶片上的配合结构与第一衬底或晶片上的配合结构互补形状。
-
24.发明授权公开(公告)号：US06730978B2
公开(公告)日：2004-05-04
申请号：US10429988
申请日：2003-05-06
IPC分类号： H01L2714
CPC分类号： B81C1/0015 , B81B2201/0292 , B81C2203/036 , H01H59/0009
摘要： A method of making a micro electromechanical switch or tunneling sensor. A cantilevered beam structure and a mating structure are defined on a first substrate or wafer; and at least one contact structure and a mating structure are defined on a second substrate or wafer, the mating structure on the second substrate or wafer being of a complementary shape to the mating structure on the first substrate or wafer. A bonding layer, preferably a eutectic bonding layer, is provided on at least one of the mating structures. The mating structure of the first substrate is moved into a confronting relationship with the mating structure of the second substrate or wafer. Pressure is applied between the two substrates so as to cause a bond to occur between the two mating structures at the bonding or eutectic layer. Then the first substrate or wafer is removed to free the cantilevered beam structure for movement relative to the second substrate or wafer.
摘要翻译： 制造微机电开关或隧道传感器的方法。 在第一基板或晶片上限定悬臂梁结构和配合结构; 并且在第二衬底或晶片上限定至少一个接触结构和配合结构，所述第二衬底或晶片上的配合结构与第一衬底或晶片上的配合结构互补形状。 在至少一个配合结构上提供粘合层，优选共晶粘合层。 第一基板的配合结构被移动成与第二基板或晶片的配合结构面对面的关系。 在两个基板之间施加压力，以便在接合或共晶层处在两个配合结构之间发生结合。 然后移除第一衬底或晶片以释放悬臂梁结构以相对于第二衬底或晶片移动。
-
25.发明授权
公开(公告)号：US6109105A
公开(公告)日：2000-08-29
申请号：US186174
申请日：1998-11-04
CPC分类号： G01C19/56 , G01P15/0894 , G01P15/131 , G01P15/18 , G01P21/00
摘要： Various structures for cantilever beam tunneling rate gyro devices formed on a single substrate are disclosed. A cantilever electrode having a plurality of portions extending from the substrate with one end of the cantilever is suspended above the substrate at a distance from a tunneling electrode so that a tunneling current flows through the cantilever and tunneling electrode in response to an applied bias voltage. The cantilever and tunneling electrodes form a circuit that produces an output signal. A force applied to the sensor urges the cantilever electrode to deflect relative to the tunneling electrode to modulate the output signal. The output signal is a control voltage that is applied between the cantilever electrode and a control electrode to maintain a constant tunneling current. In the preferred embodiment, two cantilever portions extend from the wafer surface forming a Y-shape. In a further embodiment, a strap is fabricated on the cantilever electrode. In an alternate embodiment, a ridge emitter is formed such that it remains under the cantilever electrode during lateral motion of the cantilever. In an alternate embodiment, a cantilever having a varying width is fabricated.
摘要翻译： 公开了在单个基板上形成的用于悬臂梁隧穿率陀螺装置的各种结构。 具有多个从悬臂的一端延伸的基板的悬臂电极在隧道电极的一定距离处悬挂在基板上方，使得隧道电流响应于所施加的偏置电压而流过悬臂和隧道电极。 悬臂和隧道电极形成产生输出信号的电路。 施加到传感器的力促使悬臂电极相对于隧道电极偏转，以调制输出信号。 输出信号是施加在悬臂电极和控制电极之间以保持恒定的隧道电流的控制电压。 在优选实施例中，两个悬臂部分从形成Y形的晶片表面延伸。 在另一个实施例中，在悬臂电极上制造带。 在替代实施例中，脊形发射器形成为使得其在悬臂的横向运动期间保持在悬臂电极下方。 在替代实施例中，制造具有变化宽度的悬臂。
-
26.发明授权
公开(公告)号：US5756895A
公开(公告)日：1998-05-26
申请号：US522878
申请日：1995-09-01
CPC分类号： G01C19/56 , G01P15/0894 , G01P15/131 , G01P15/18 , G01P21/00
摘要： Various structures for cantilever beam tunneling rate gyro devices formed on a single substrate are disclosed. A cantilever electrode having a plurality of portions extending from the substrate with one end of the cantilever is suspended above the substrate at a distance from a tunneling electrode so that a tunneling current flows through the cantilever and tunneling electrode in response to an applied bias voltage. The cantilever and tunneling electrodes form a circuit that produces an output signal. A force applied to the sensor urges the cantilever electrode to deflect relative to the tunneling electrode to modulate the output signal. The output signal is a control voltage that is applied between the cantilever electrode and a control electrode to maintain a constant tunneling current. In the preferred embodiment, two cantilever portions extend from the wafer surface forming a Y-shape. In a further embodiment, a strap is fabricated on the cantilever electrode. In an alternate embodiment, a ridge emitter is formed such that it remains under the cantilever electrode during lateral motion of the cantilever In an alternate embodiment, a cantilever having a varying width is fabricated.
摘要翻译： 公开了在单个基板上形成的用于悬臂梁隧穿率陀螺装置的各种结构。 具有多个从悬臂的一端延伸的基板的悬臂电极在隧道电极的一定距离处悬挂在基板上方，使得隧道电流响应于所施加的偏置电压而流过悬臂和隧道电极。 悬臂和隧道电极形成产生输出信号的电路。 施加到传感器的力促使悬臂电极相对于隧道电极偏转，以调制输出信号。 输出信号是施加在悬臂电极和控制电极之间以保持恒定的隧道电流的控制电压。 在优选实施例中，两个悬臂部分从形成Y形的晶片表面延伸。 在另一个实施例中，在悬臂电极上制造带。 在替代实施例中，脊形发射器形成为使得其在悬臂的横向运动期间保持在悬臂电极下方。在替代实施例中，制造具有变化宽度的悬臂。
-
27.发明授权Secondary ion mass spectrometry system and method for focused ion beam with parallel ion detection 失效二次离子质谱系统和聚焦离子束并行离子检测方法
公开(公告)号：US4785172A
公开(公告)日：1988-11-15
申请号：US947153
申请日：1986-12-29
申请人： Randall L. Kubena , John W. Reeds
发明人： Randall L. Kubena , John W. Reeds
IPC分类号： G01Q30/02 , H01J37/244 , H01J37/252 , H01J49/02
CPC分类号： H01J37/252 , H01J37/244 , H01J49/025 , H01J2237/24435 , H01J2237/2446 , H01J2237/2449 , H01J2237/24585
摘要： A secondary ion mass spectrometry system and method is described which operates several orders of magnitude more quickly than previous systems, and captures information that might previously have been missed. A parallel detection approach is used which simultaneously monitors all secondary ion masses of interest, as opposed to prior serial approaches which sense only one ion mass at a time. The secondary ions are spatially separated according to mass and sensed by a detector array. An ion-electron converter and amplifier, implemented as a microchannel plate assembly, is preferably interfaced between the mass separator and detector. The detector preferably uses an array of wires to collect charge emitted by the microchannel plate. The wires are coupled to output lines by an encoding scheme which allows many fewer output lines to be employed than there are wires.
摘要翻译： 描述了二次离子质谱系统和方法，其操作比先前系统快几个数量级，并且捕获先前已经被遗漏的信息。 使用并行检测方法，其同时监测所有感兴趣的二次离子质量，而不是一次仅感测一个离子质量的先前的串联方法。 二次离子根据质量在空间上分离并由检测器阵列感测。 实现为微通道板组件的离子电子转换器和放大器优选地连接在质量分离器和检测器之间。 检测器优选使用阵列阵列来收集由微通道板发射的电荷。 导线通过编码方案耦合到输出线，该编码方案比使用导线允许使用更少的输出线。
-
公开(公告)号：US08782876B1
公开(公告)日：2014-07-22
申请号：US13163357
申请日：2011-06-17
申请人： Randall L. Kubena , David T. Chang
发明人： Randall L. Kubena , David T. Chang
CPC分类号： H03H9/542 , H03H9/0542
摘要： A process for fabricating an integrated Micro-Electro-Mechanical Systems (MEMS) filter includes bonding an insulating substrate having a first end and a second end to a base substrate, the second end of the insulating substrate cantilevered over and separated from the base substrate by a gap, forming a resonator element on the second end of the insulating substrate, forming an inductive element comprising a coil, wherein the coil is formed on the insulating substrate, and forming a capacitive element on the first side of the insulating substrate, the capacitive element comprised of two conductive plates, wherein one of the two conductive plates is formed on the insulating substrate.
摘要翻译： 一种用于制造集成的微电子机械系统（MEMS）滤波器的方法，包括将具有第一端和第二端的绝缘基板接合到基底基板，绝缘基板的第二端通过 间隙，在所述绝缘基板的第二端上形成谐振器元件，形成包括线圈的电感元件，其中所述线圈形成在所述绝缘基板上，并且在所述绝缘基板的第一侧上形成电容元件，所述电容 由两个导电板组成的元件，其中两个导电板中的一个形成在绝缘基板上。
-
29.发明授权Piezoelectric resonator with capacitive sense and/or force rebalance electrodes to control an amplitude of vibration 有权具有电容感应和/或力重新平衡电极的压电谐振器来控制振动的振幅公开(公告)号：US08569937B1
公开(公告)日：2013-10-29
申请号：US12835610
申请日：2010-07-13
申请人： Randall L. Kubena , Yook-Kong Yong
发明人： Randall L. Kubena , Yook-Kong Yong
IPC分类号： H03H9/125
CPC分类号： H03H9/1021 , H03H9/13 , H03H9/17
摘要： In an embodiment, a piezoelectric resonator configured for parametric amplification is disclosed. The piezoelectric resonator may include or comprise a piezoelectric member, and first and second resonator electrodes associated with the piezoelectric member and positioned to enable a first electric field to be generated in a first direction. The piezoelectric resonator may also include or comprise a parametric drive electrode associated with the piezoelectric member and positioned to enable a second electric field to be generated in a second direction.
摘要翻译： 在一个实施例中，公开了一种配置用于参数放大的压电谐振器。 压电谐振器可以包括或包括压电元件，以及与压电元件相关联并被定位成能够在第一方向上产生第一电场的第一和第二谐振器电极。 压电谐振器还可以包括或包括与压电元件相关联的参数驱动电极，并被定位成能够在第二方向上产生第二电场。
-
公开(公告)号：US08138016B2
公开(公告)日：2012-03-20
申请号：US12399680
申请日：2009-03-06
申请人： David T. Chang , Randall L. Kubena
发明人： David T. Chang , Randall L. Kubena
CPC分类号： H04R17/00 , H01L2924/0002 , Y10T29/42 , Y10T29/49005 , Y10T29/49007 , Y10T29/4908 , Y10T29/53178 , H01L2924/00
摘要： Methods for integrating quartz-based resonators with electronics on a large area wafer through direct pick-and-place and flip-chip bonding or wafer-to-wafer bonding using handle wafers are described. The resulting combination of quartz-based resonators and large area electronics wafer solves the problem of the quartz-electronics substrate diameter mismatch and enables the integration of arrays of quartz devices of different frequencies with the same electronics.
摘要翻译： 描述了通过直接拾取和倒装芯片接合或使用处理晶片的晶片到晶片结合将石英基谐振器与大面积晶片上的电子器件集成的方法。 所得到的石英基谐振器和大面积电子晶片的组合解决了石英电子衬底直径不匹配的问题，并且能够将具有不同频率的石英器件的阵列与相同的电子器件集成。
-
-
-
-
-
-
-
-
-
搜索结果
54 条记录 (耗时 0.025 秒)
