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21.发明授权Method for integrating SONOS non-volatile memory into a sub-90 nm standard CMOS foundry process flow 有权将SONOS非易失性存储器集成到90nm以下的标准CMOS铸造工艺流程中的方法公开(公告)号：US08409950B1
公开(公告)日：2013-04-02
申请号：US13100986
申请日：2011-05-04
IPC分类号： H01L21/336
CPC分类号： H01L27/11568 , H01L21/28282 , H01L21/823456 , H01L21/823462 , H01L27/105 , H01L27/1052 , H01L27/11573 , H01L29/4234
摘要： An embodiment of a method is disclosed to integrate silicon oxide nitride oxide silicon (SONOS) non-volatile memory (NVM) into a standard sub-90 nm complementary metal oxide semiconductor (CMOS) semiconductor foundry process flow. An embodiment of the method adds a few additional steps to a standard CMOS foundry process flow and makes minor changes to the rest of the baseline CMOS foundry process flow to form a new process module that includes both CMOS devices and an embedded SONOS NVM. An embodiment of the method utilizes new material sets (which are not utilized at larger nodes) that enhance NVM performance by improving charge tunneling behavior and reducing leakage currents. Furthermore, an embodiment of the method integrates CMOS with SONOS NVM at ever-shrinking dimensions while enhancing the NVM performance, without performing extra, costly processing steps.
摘要翻译： 公开了将氧化硅氮氧化物硅（SONOS）非易失性存储器（NVM）集成到标准sub-90nm互补金属氧化物半导体（CMOS）半导体铸造工艺流程中的方法的实施例。 该方法的一个实施例为标准CMOS铸造工艺流程增加了一些附加步骤，并且对基准CMOS铸造工艺流程的其余部分进行了微小的改变以形成包括CMOS器件和嵌入式SONOS NVM的新工艺模块。 该方法的一个实施例利用通过改善电荷隧道行为和减少泄漏电流来增强NVM性能的新材料组（其不被用于较大节点）。 此外，该方法的实施例在不增加NVM性能的情况下将CMOS与SONOS NVM集成在一起，同时不增加NVM性能，而无需执行额外的昂贵的处理步骤。
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公开(公告)号：US07208326B2
公开(公告)日：2007-04-24
申请号：US10967869
申请日：2004-10-18
申请人： Michael Rennie , Jon Davis , Robert Fuller , Franz Hagl
发明人： Michael Rennie , Jon Davis , Robert Fuller , Franz Hagl
IPC分类号： H01L21/00
CPC分类号： H01L21/3083 , H01L21/3065
摘要： An edge protection process for semiconductor device fabrication includes forming a protective layer on the circumferential edge region of a semiconductor substrate. The semiconductor substrate is placed in a plasma atmosphere and trench structures, such as deep trenches and shallow trench isolation structures are etched in the substrate. The protective layer substantially prevents the etching of the circumferential edge region, such that the formation of black silicon is substantially minimized during the etching process.
摘要翻译： 用于半导体器件制造的边缘保护工艺包括在半导体衬底的周缘区域上形成保护层。 将半导体衬底放置在等离子体气氛中，并且在衬底中蚀刻诸如深沟槽和浅沟槽隔离结构的沟槽结构。 保护层基本上防止了周边边缘区域的蚀刻，使得在蚀刻工艺期间黑色硅的形成基本上被最小化。
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公开(公告)号：US06927462B2
公开(公告)日：2005-08-09
申请号：US10232786
申请日：2002-08-28
IPC分类号： H01L21/768 , H01L21/8239 , H01L21/8242 , H01L27/105 , H01L27/108 , H01L27/115 , H01L29/76
CPC分类号： H01L27/10888 , H01L21/76802 , H01L27/105 , H01L27/1052 , H01L27/10891 , H01L27/10894 , H01L27/10897 , H01L27/115
摘要： A processing sequence for definition of gate contacts can be implemented using either a deep ultra-violet (DUV) or mid ultra-violet (MUV) positive resist processing and supports the use of a reticle that integrates contacts to various regions including gates, sources and drains of various devices. In a one example, the wafer is coated with a planarizing anti-reflective coating (ARC), which then supports imaging of gate contacts using a positive DUV or MUV resist. This processing allows the nitride cap of certain transistor gates to be replaced with an oxide. In this example, the ARC can serve as an etch guide for selective removal of a film.
摘要翻译： 可以使用深紫外（DUV）或中紫外（MUV）正抗蚀剂处理来实现用于定义栅极触点的处理顺序，并且支持使用将接触集成到各种区域，包括栅极，源和 各种设备的排水 在一个示例中，晶片涂覆有平坦化抗反射涂层（ARC），其然后使用正DUV或MUV抗蚀剂来支持栅极触点的成像。 该处理允许某些晶体管栅极的氮化物盖被氧化物代替。 在该示例中，ARC可用作选择性去除膜的蚀刻指南。
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公开(公告)号：US10003005B2
公开(公告)日：2018-06-19
申请号：US15244827
申请日：2016-08-23
CPC分类号： H01L39/2493 , H01L39/025 , H01L39/223
摘要： A method is provided of forming a superconductor device interconnect structure. The method includes forming a first high temperature dielectric layer overlying a substrate, forming a base electrode in the first high temperature dielectric layer with the base electrode having a top surface aligned with the top surface of the first high temperature dielectric layer, and depositing a second high temperature dielectric layer over the first high temperature dielectric layer and the base electrode. The method further comprises forming a first contact through the second dielectric layer to a first end of the base electrode, forming a Josephson junction (JJ) overlying and in contact with the first contact, and forming a second contact through the second dielectric layer to a second end of the base electrode.
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公开(公告)号：US09248991B2
公开(公告)日：2016-02-02
申请号：US12976596
申请日：2010-12-22
申请人： Ken Peters , Gordon Burke , Michael Rennie
发明人： Ken Peters , Gordon Burke , Michael Rennie
CPC分类号： B65H31/3063 , B65H29/60 , B65H2403/21 , B65H2403/512 , B65H2404/693 , B65H2408/13 , B65H2511/10 , B65H2511/152 , B65H2511/222 , B65H2701/1912 , G07D11/0018 , G07F19/202 , B65H2220/01 , B65H2220/02 , B65H2220/11
摘要： A media transport module comprising: a transport extending from a pick coupling area to a stacking port; and a retractable guide. The retractable guide is moveable to extend beyond the stacking port when media items are being stacked and thereby guide media items ejected from the stacking port onto a carriage plate. The retractable guide is also moveable to retract to the stacking port when media items have been stacked so that the carriage plate can close without touching the retractable guide.
摘要翻译： 一种媒体传输模块，包括：从拾取耦合区域延伸到堆叠端口的传输; 和可伸缩导轨。 当介质物品被堆叠时，可伸缩的导向件可移动以延伸超过堆叠端口，从而将从堆叠端口排出的介质物品引导到滑架板上。 当介质物品已被堆叠时，可缩回的引导件也可移动以缩回到堆叠端口，使得托架板可以在不接触可伸缩的引导件的情况下关闭。
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公开(公告)号：US08479910B2
公开(公告)日：2013-07-09
申请号：US12868863
申请日：2010-08-26
申请人： Michael Rennie , Ken Peters , Gordon Burke
发明人： Michael Rennie , Ken Peters , Gordon Burke
IPC分类号： G07D11/00
CPC分类号： G07F19/203 , G07D11/0006 , G07D11/0018
摘要： A removable media container for use in a media dispenser is described. The media container comprises: a diverter entrance for receiving diverted media items prior to stacking of the media items; a non-present stack entrance for receiving a stack of media items subsequent to stacking of the media items but prior to presentation of the stack of media items to a customer; and a present stack entrance for receiving a stack of media items subsequent to presentation of the stack of media items to a customer.
摘要翻译： 描述了用于介质分配器中的可移动介质容器。 介质容器包括：在堆叠媒体物品之前接收转移媒体物品的分流器入口; 一个不存在的堆叠入口，用于在媒体物品的堆叠之后但在向客户呈现媒体物品堆之前接收媒体物品的堆叠; 以及当前的堆叠入口，用于在向客户呈现媒体项目堆叠之后接收媒体项目的堆叠。
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公开(公告)号：US08366107B2
公开(公告)日：2013-02-05
申请号：US12868844
申请日：2010-08-26
申请人： Scott Deas , Gordon Burke , Michael Rennie , Scott L. Colston
发明人： Scott Deas , Gordon Burke , Michael Rennie , Scott L. Colston
IPC分类号： B65H29/20
CPC分类号： B65H31/3063 , B65H31/3027 , B65H2301/4213 , B65H2403/512 , B65H2405/11162 , B65H2405/1117 , B65H2405/325 , B65H2405/35 , B65H2408/13 , B65H2701/1912 , G07D11/0018
摘要： A media presenter is described. The media presenter comprises: a chassis including a central track; a nose coupled to the chassis at a nose end of the chassis; and a carriage. The nose includes a presenting end distal from the chassis, and a nose track arranged to couple to the central track to provide a presenting track extending from the chassis to the presenting end. The carriage is mounted on the presenting track for movement therealong, and comprises a carriage body and a carriage plate movable between an open position at which media items can be placed on the carriage plate, and a closed position for clamping media items between the carriage plate and the carriage body.
摘要翻译： 描述媒体主持人。 媒体演示者包括：包括中心轨道的底盘; 在底盘的鼻端连接到底盘的鼻子; 和一个马车。 鼻子包括远离底盘的呈现端，以及鼻梁，其布置成联接到中心轨道以提供从底盘延伸到呈现端的呈现轨迹。 滑架安装在呈现轨道上，用于在其上移动，并且包括滑架主体和滑架板，滑架主体和滑架板可在打开位置之间移动，介质项目可以放置在滑架板上，以及关闭位置，用于将介质物品夹持在滑架板 和车体。
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公开(公告)号：US20120161389A1
公开(公告)日：2012-06-28
申请号：US12976596
申请日：2010-12-22
申请人： Ken Peters , Gordon Burke , Michael Rennie
发明人： Ken Peters , Gordon Burke , Michael Rennie
CPC分类号： B65H31/3063 , B65H29/60 , B65H2403/21 , B65H2403/512 , B65H2404/693 , B65H2408/13 , B65H2511/10 , B65H2511/152 , B65H2511/222 , B65H2701/1912 , G07D11/0018 , G07F19/202 , B65H2220/01 , B65H2220/02 , B65H2220/11
摘要： A media transport module comprising: a transport extending from a pick coupling area to a stacking port; and a retractable guide. The retractable guide is moveable to extend beyond the stacking port when media items are being stacked and thereby guide media items ejected from the stacking port onto a carriage plate. The retractable guide is also moveable to retract to the stacking port when media items have been stacked so that the carriage plate can close without touching the retractable guide.
摘要翻译： 一种媒体传输模块，包括：从拾取耦合区域延伸到堆叠端口的传输; 和可伸缩导轨。 当介质物品被堆叠时，可伸缩的导向件可移动以延伸超过堆叠端口，从而将从堆叠端口排出的介质物品引导到滑架板上。 当介质物品已被堆叠时，可缩回的引导件也可移动以缩回到堆叠端口，使得托架板可以在不接触可伸缩的引导件的情况下关闭。
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公开(公告)号：US20120048877A1
公开(公告)日：2012-03-01
申请号：US12868863
申请日：2010-08-26
申请人： Michael Rennie , Ken Peters , Gordon Burke
发明人： Michael Rennie , Ken Peters , Gordon Burke
CPC分类号： G07F19/203 , G07D11/0006 , G07D11/0018
摘要： A removable media container for use in a media dispenser is described. The media container comprises: a diverter entrance for receiving diverted media items prior to stacking of the media items; a non-present stack entrance for receiving a stack of media items subsequent to stacking of the media items but prior to presentation of the stack of media items to a customer; and a present stack entrance for receiving a stack of media items subsequent to presentation of the stack of media items to a customer.
摘要翻译： 描述了用于介质分配器中的可移动介质容器。 介质容器包括：在堆叠媒体物品之前接收转移媒体物品的分流器入口; 一个不存在的堆叠入口，用于在媒体物品的堆叠之后但在向客户呈现媒体物品堆之前接收媒体物品的堆叠; 以及当前的堆叠入口，用于在向客户呈现媒体项目堆叠之后接收媒体项目的堆叠。
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公开(公告)号：US20120048876A1
公开(公告)日：2012-03-01
申请号：US12868844
申请日：2010-08-26
申请人： Scott Deas , Gordon Burke , Michael Rennie , Scott L. Colston
发明人： Scott Deas , Gordon Burke , Michael Rennie , Scott L. Colston
CPC分类号： B65H31/3063 , B65H31/3027 , B65H2301/4213 , B65H2403/512 , B65H2405/11162 , B65H2405/1117 , B65H2405/325 , B65H2405/35 , B65H2408/13 , B65H2701/1912 , G07D11/0018
摘要： A media presenter is described. The media presenter comprises: a chassis including a central track; a nose coupled to the chassis at a nose end of the chassis; and a carriage. The nose includes a presenting end distal from the chassis, and a nose track arranged to couple to the central track to provide a presenting track extending from the chassis to the presenting end. The carriage is mounted on the presenting track for movement therealong, and comprises a carriage body and a carriage plate movable between an open position at which media items can be placed on the carriage plate, and a closed position for clamping media items between the carriage plate and the carriage body.
摘要翻译： 描述媒体主持人。 媒体演示者包括：包括中心轨道的底盘; 在底盘的鼻端连接到底盘的鼻子; 和一个马车。 鼻子包括远离底盘的呈现端，以及鼻梁，其布置成联接到中心轨道以提供从底盘延伸到呈现端的呈现轨迹。 滑架安装在呈现轨道上，用于在其上移动，并且包括滑架主体和滑架板，滑架主体和滑架板可在打开位置之间移动，介质项目可以放置在滑架板上，以及关闭位置，用于将介质物品夹持在滑架板 和车体。
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