公开(公告)号：US11222765B2

公开(公告)日：2022-01-11

申请号：US16734548

申请日：2020-01-06

申请人： Protochips, Inc.

发明人： Franklin Stampley Walden, II ,  John Damiano, Jr. ,  Daniel Stephen Gardiner ,  William Bradford Carpenter

IPC分类号： H01J37/20 ,  G01F1/34 ,  G05D7/06

摘要： A fluid metering system for gas independent pressure and flow control through an electron microscope sample holder includes: a pressure control system that supplies gas; an inlet line providing gas from the pressure control system to the sample holder; an outlet line receiving gas from the sample holder; and a variable leak valve that controls gas flow in the outlet line. The gas flows from an upstream tank of the pressure control system through the sample holder and variable leak valve to a downstream tank of the pressure control system due to the pressure difference of the two tanks as the variable leak valve meters flow in the outlet line. Flow rates are established by monitoring pressure changes at source and collection tanks of known volumes with gas independent pressure gauges. A method of directing the gas flow to a residual gas analyzer (RGA) is also presented.

公开(公告)号：US10460906B2

公开(公告)日：2019-10-29

申请号：US15811911

申请日：2017-11-14

申请人： Protochips, Inc.

发明人： Daniel Stephen Gardiner ,  William Bradford Carpenter ,  John Damiano, Jr. ,  Franklin Stampley Walden, II ,  David P. Nackashi

IPC分类号： H01J37/26 ,  G01K11/32 ,  G01L11/02 ,  H01J37/16 ,  H01J37/20 ,  G01L19/04 ,  H01J37/317

摘要： An apparatus and a method for measuring and monitoring the properties of a fluid, for example, pressure, temperature, and chemical properties, within a sample holder for an electron microscope. The apparatus includes at least one fiber optic sensor used for measuring temperature and/or pressure and/or pH positioned in proximity of the sample.

公开(公告)号：US10446363B2

公开(公告)日：2019-10-15

申请号：US16185519

申请日：2018-11-09

申请人： Protochips, Inc.

发明人： Franklin Stampley Walden, II ,  John Damiano, Jr. ,  Daniel Stephen Gardiner ,  David P. Nackashi ,  William Bradford Carpenter

IPC分类号： H01J37/20 ,  H01J37/26

摘要： A heating device having a heating element patterned into a robust MEMs substrate, wherein the heating element is electrically isolated from a fluid reservoir or bulk conductive sample, but close enough in proximity to an imagable window/area having the fluid or sample thereon, such that the sample is heated through conduction. The heating device can be used in a microscope sample holder, e.g., for SEM, TEM, STEM, X-ray synchrotron, scanning probe microscopy, and optical microscopy.

公开(公告)号：US09984850B2

公开(公告)日：2018-05-29

申请号：US15051210

申请日：2016-02-23

申请人： PROTOCHIPS, INC.

发明人： John Damiano, Jr. ,  Stephen E. Mick ,  David P. Nackashi

IPC分类号： H01J37/26 ,  H01J37/20

CPC分类号： H01J37/20 ,  H01J37/26 ,  H01J37/261 ,  H01J2237/188 ,  H01J2237/2001 ,  H01J2237/2002 ,  H01J2237/2003 ,  H01J2237/2007 ,  H01J2237/2008 ,  H01J2237/2602 ,  H01J2237/28 ,  H01J2237/2802

摘要： Electron microscope support structures and methods of making and using same. The support structures are generally constructed using semiconductor materials and semiconductor manufacturing processes. The temperature of the support structure may be controlled and/or gases or liquids may be confined in the observation region for reactions and/or imaging.

公开(公告)号：US09837746B2

公开(公告)日：2017-12-05

申请号：US15254522

申请日：2016-09-01

申请人： PROTOCHIPS, INC.

发明人： John Damiano, Jr. ,  David P. Nackashi ,  Stephen E. Mick

IPC分类号： H01J37/20 ,  H01R13/24 ,  H01J37/26 ,  H01R12/79 ,  H01R12/72

CPC分类号： H01R13/24 ,  H01J37/20 ,  H01J37/26 ,  H01J2237/2003 ,  H01J2237/2007 ,  H01J2237/2008 ,  H01J2237/206 ,  H01R12/721 ,  H01R12/79

摘要： An electrical connector for use in electron microscopy sample holders. The electrical connector provides electrical contacts to the sample support devices which are positioned in the sample holders for electrical, temperature and/or electrochemical control.

公开(公告)号：US20150235805A1

公开(公告)日：2015-08-20

申请号：US14626234

申请日：2015-02-19

申请人： PROTOCHIPS, INC.

发明人： Daniel Stephen Gardiner ,  William Bradford Carpenter ,  John Damiano, Jr. ,  Franklin Stampley Walden, II ,  David P. Nackashi

IPC分类号： H01J37/26 ,  H01J37/20 ,  G01L11/02 ,  H01J37/16 ,  G01K11/32

CPC分类号： H01J37/261 ,  G01K11/32 ,  G01L11/025 ,  G01L19/04 ,  H01J37/16 ,  H01J37/20 ,  H01J37/3178 ,  H01J2237/2001 ,  H01J2237/2002 ,  H01J2237/2801

摘要： An apparatus and a method for measuring and monitoring the properties of a fluid, for example, pressure, temperature, and chemical properties, within a sample holder for an electron microscope. The apparatus includes at least one fiber optic sensor used for measuring temperature and/or pressure and/or pH positioned in proximity of the sample.

摘要翻译： 用于电子显微镜的样品架内的用于测量和监测流体性质的设备和方法，例如压力，温度和化学性质。 该装置包括用于测量位于样品附近的温度和/或压力和/或pH的至少一个光纤传感器。

公开(公告)号：US08859991B2

公开(公告)日：2014-10-14

申请号：US13799871

申请日：2013-03-13

申请人： Protochips, Inc.

发明人： David P. Nackashi ,  John Damiano, Jr. ,  Stephen E. Mick ,  Thomas G. Schmelzer ,  Michael Zapata, III

IPC分类号： H01J37/20 ,  G01N1/28

CPC分类号： H01J37/20 ,  G01N1/28 ,  H01J2237/2007 ,  H01J2237/2008

摘要： A novel specimen holder for specimen support devices for insertion in electron microscopes. The novel specimen holder of the invention provides mechanical support for specimen support devices and as well as electrical contacts to the specimens or specimen support devices.

摘要翻译： 用于插入电子显微镜的样品支撑装置的新型样品架。 本发明的新型样品保持器为样品支撑装置提供机械支撑，以及对试样或样品支撑装置的电接触。

公开(公告)号：US08853646B2

公开(公告)日：2014-10-07

申请号：US13758839

申请日：2013-02-04

申请人： Protochips, Inc.

发明人： David P. Nackashi ,  John Damiano, Jr. ,  Stephen E. Mick ,  Thomas G. Schmelzer ,  Michael Zapata, III

IPC分类号： H01J37/20 ,  G01N1/28

CPC分类号： H01J37/20 ,  G01N1/28 ,  H01J2237/2007 ,  H01J2237/2008

摘要： A novel specimen holder for specimen support devices for insertion in electron microscopes. The novel specimen holder of the invention provides mechanical support for specimen support devices and as well as electrical contacts to the specimens or specimen support devices.

公开(公告)号：US11902665B2

公开(公告)日：2024-02-13

申请号：US17585222

申请日：2022-01-26

申请人： Protochips, Inc.

发明人： Franklin Stampley Walden, II ,  John Damiano, Jr. ,  David P. Nackashi ,  Daniel Stephen Gardiner ,  Mark Uebel ,  Alan Philip Franks ,  Benjamin Jacobs ,  Joshua Brian Friend ,  Katherine Elizabeth Marusak ,  Nelson L Marthe, Jr. ,  Benjamin Bradshaw Larson

IPC分类号： G01B11/16 ,  H04N23/695 ,  G06T7/33 ,  G06T7/215 ,  H01J37/20

CPC分类号： H04N23/695 ,  G06T7/215 ,  G06T7/337 ,  H01J37/20 ,  G06T2207/10061 ,  H01J2237/2594

摘要： Methods and systems for calibrating a transmission electron microscope are disclosed. A fiducial mark on the sample holder is used to identify known reference points so that a current collection area and a through-hole on the sample holder can be located. A plurality of beam current and beam area measurements are taken, and calibration tables are extrapolated from the measurements for a full range of microscope parameters. The calibration tables are then used to determine electron dose of a sample during an experiment at a given configuration.

公开(公告)号：US11476083B2

公开(公告)日：2022-10-18

申请号：US16491057

申请日：2018-03-13

申请人： Protochips, Inc.

发明人： John Damiano, Jr. ,  Hessam Ghassemi ,  Ian Patrick Wellenius ,  Rémy Berthier

IPC分类号： H01J37/244 ,  H01J37/20 ,  H01J37/26

摘要： An electrical device for electrically measuring a sample during electron microscope imaging includes: a chip through which a slit is defined, the chip having at least one peripheral edge, the slit having an open end at the at least one peripheral edge; an electrically conductive first contact on the chip; and an electrically conductive second contact on the chip; wherein the slit is at least partially positioned between the first contacts and second contact. An electrically conductive first wire may extend along the chip electrically connected to the first contact; and an electrically conductive second wire may extend along the chip electrically connected to the second contact. The first wire and second wire may diverge from each other in extending along the chip away from the slit.