-
公开(公告)号：US4676630A
公开(公告)日：1987-06-30
申请号：US854541
申请日：1986-04-22
申请人： Koichi Matsushita , Junji Isohata , Hironori Yamamoto , Makoto Miyazaki , Kunitaka Ozawa , Hideki Yoshinari
发明人： Koichi Matsushita , Junji Isohata , Hironori Yamamoto , Makoto Miyazaki , Kunitaka Ozawa , Hideki Yoshinari
CPC分类号： G03F7/70691
摘要： An exposure apparatus for exposing a plate-like member to a pattern with radiation in a step-and-repeat manner thereby to transfer images of the pattern onto different regions on a surface of the plate-like member. The apparatus includes an X-Y stage for moving the plate-like member in X and Y directions, a .theta.-stage for moving the plate-like member in a .theta. (rotational) direction relative to the X-Y stage, and laser interferometers for measuring an amount of movement of the plate-like member, by the X-Y stage, in each of the X and Y directions by use of a mirror mounted on the .theta.-stage. Placement of the mirror on the .theta.-stage allows correction of yawing if it occurs during movement of the plate-like member by X-Y stage. Also, deviation of the plate-like member in the Y direction if it occurs during movement of the plate-like member by the X-Y stage in the X direction, is detected by the laser interferometers. This allows detection of a positional error of the mirror in the .theta. direction and allows correction of the .theta.-error by the .theta.-stage.
摘要翻译： 一种用于以逐步重复的方式将板状构件暴露于具有辐射的图案的曝光装置，从而将图案的图像转印到板状构件的表面上的不同区域上。 该装置包括用于在X和Y方向上移动板状构件的XY平台，用于相对于XY平台以θ（旋转）方向移动板状构件的θ级和用于测量量的激光干涉仪 通过使用安装在θ级上的反射镜，通过XY台在X和Y方向中的每一个中移动板状构件。 如果在X-Y平台上移动板状构件时发生偏转，则可以在θ级放置镜子。 此外，通过激光干涉仪检测板状构件在X方向上通过X-Y台移动期间在Y方向上的偏移。 这允许在θ方向上检测反射镜的位置误差，并且允许通过θ级校正θ-误差。
-
公开(公告)号：US4556285A
公开(公告)日：1985-12-03
申请号：US591233
申请日：1984-03-19
申请人： Yoji Sugiura , Hironori Yamamoto , Keijiro Nishida , Naoki Shirai , Kimio Takahashi , Mikio Nakasugi , Norihisa Saito
发明人： Yoji Sugiura , Hironori Yamamoto , Keijiro Nishida , Naoki Shirai , Kimio Takahashi , Mikio Nakasugi , Norihisa Saito
CPC分类号： G03B19/12 , G02B5/08 , Y10S428/938 , Y10T428/12639 , Y10T428/12764
摘要： In making reflection mirrors for optics, a technique is provided for making up a reflection mirror not of a glass-system material but of metallic material, and a method for high-precision mirror-machining of a metal plate is also disclosed.
摘要翻译： 在制造光学用反射镜时，提供了用于构成不是玻璃系材料而是由金属材料制成的反射镜的技术，还公开了金属板的高精度镜面加工方法。
-
公开(公告)号：US4448460A
公开(公告)日：1984-05-15
申请号：US474736
申请日：1983-03-17
申请人： Hironori Yamamoto
发明人： Hironori Yamamoto
CPC分类号： F16C32/06 , F16C29/025 , F16C32/0603
摘要： A hydrostatic bearing having an increased load capacity and rigidity as compared with conventional hydrostatic bearings. To increase its load capacity and rigidity, the hydrostatic bearing of this application has peripheral air supply holes substantially on the same circumference centered at a central air supply hole provided centrally of a recess.
摘要翻译： 与常规静压轴承相比，具有增加的负载能力和刚性的静压轴承。 为了增加其承载能力和刚度，该应用的静压轴承具有基本上位于设置在凹部中心的中心供气孔的同一圆周上的周边空气供给孔。
-
公开(公告)号：US09802262B2
公开(公告)日：2017-10-31
申请号：US14401745
申请日：2012-06-22
CPC分类号： B23G5/06 , B23G7/02 , B23G2200/46
摘要： A thread forming tap includes a screw thread formed into a male thread shape with margin portions disposed to project in radial direction and relief portions having a diameter smaller than the margin portions, the margin portions and relief portions alternatively arranged and, thread forming tap causes the margin portions of the screw thread to cut into a surface layer portion of a prepared hole formed in a work to plastically deform the surface layer portion to form a female thread, margin portions are formed into a ridge line shape with a width dimension of zero at least at a thread bottom of the screw thread, and margin portions are formed into a ridge line shape with a width dimension of zero in a range from a thread bottom of the screw thread to a position between the thread bottom and an effective diameter position of the screw thread.
-
公开(公告)号：US20150158102A1
公开(公告)日：2015-06-11
申请号：US14401745
申请日：2012-06-22
IPC分类号： B23G5/06
CPC分类号： B23G5/06 , B23G7/02 , B23G2200/46
摘要： A thread forming tap includes a screw thread formed into a male thread shape with margin portions disposed to project in radial direction and relief portions having a diameter smaller than the margin portions, the margin portions and relief portions alternatively arranged and, thread forming tap causes the margin portions of the screw thread to cut into a surface layer portion of a prepared hole formed in a work to plastically deform the surface layer portion to form a female thread, margin portions are formed into a ridge line shape with a width dimension of zero at least at a thread bottom of the screw thread, and margin portions are formed into a ridge line shape with a width dimension of zero in a range from a thread bottom of the screw thread to a position between the thread bottom and an effective diameter position of the screw thread.
摘要翻译： 螺纹成型丝锥包括形成为阳螺纹形状的螺纹，其具有设置成沿径向突出的边缘部分和具有小于边缘部分的直径的凸出部分，边缘部分和释放部分交替布置，并且螺纹成形丝锥使得 螺纹的边缘部分切割成在工件中形成的预制孔的表面层部分，以使表面层部分塑性变形以形成阴螺纹，边缘部分形成为宽度尺寸为零的棱线形状 至少在螺纹的螺纹底部，并且边缘部分形成为从螺纹的螺纹底部到螺纹底部与螺纹底部与有效直径位置之间的位置的宽度尺寸为零的棱线形状 螺纹。
-
公开(公告)号：US08828178B2
公开(公告)日：2014-09-09
申请号：US13417530
申请日：2012-03-12
申请人： Hironori Yamamoto , Koki Ishida , Tatsuo Katayama , Tadashi Kasamoto , Yoshihiko Yamaguchi , Chihiro Asanuma
发明人： Hironori Yamamoto , Koki Ishida , Tatsuo Katayama , Tadashi Kasamoto , Yoshihiko Yamaguchi , Chihiro Asanuma
IPC分类号： B29C65/00 , B32B37/00 , B32B38/00 , B31B1/60 , F16C32/00 , F16C41/04 , F16C33/76 , F01B25/00 , F03B15/00 , F04D15/00 , F04D27/00 , F16J15/34 , F16J15/32 , H03M1/22 , G01P3/48 , G01P3/54 , F16C41/00 , F16C33/78 , F16C19/18
CPC分类号： F16C41/007 , F16C19/186 , F16C33/7883 , F16C2326/02 , Y10T156/10
摘要： A sealing device which comprises a slinger fixedly fitted to the rotary side member, a core member fixedly fitted to the stationary side member, and an elastic sealing member fixed to the core member and having a seal lip which elastically and slidably contacts the slinger. The slinger comprises a fitting cylindrical portion to be fitted into the rotary side member, a brim portion extending its radial direction at one end of its outside relative to a sealed portion of the fitting cylindrical portion, and a rotary side fixing member fixed to the brim portion. Further, the slinger is made in such a manner that an adhesive layer is formed on its whole surface including a contacting side surface where the seal lip contacts by applying adhesive agent thereon, then the fixing member is integrally fixed thereto, thereafter the adhesive layer is partially removed only in the contacting side surface.
摘要翻译： 一种密封装置，其特征在于，包括固定在所述旋转侧部件上的挡泥板，固定在所述固定侧部件上的芯部件，以及弹性密封部件，该弹性密封部件固定于所述芯部部件，并且具有与所述抛油环弹性且可滑动接触的密封唇部。 抛油环包括装配到旋转侧构件中的装配圆柱形部分，在其外侧的一端处相对于配合圆柱形部分的密封部分沿其径向方向延伸的边缘部分，以及固定到边缘的旋转侧固定构件 一部分。 此外，抛油环的制造方式是在其整个表面上形成粘合剂层，该整个表面包括通过在其上施加粘合剂而使密封唇接触的接触侧面，然后将固定部件一体地固定在其上，然后粘合剂层为 仅在接触侧表面部分除去。
-
公开(公告)号：US08425163B2
公开(公告)日：2013-04-23
申请号：US12933834
申请日：2008-03-21
CPC分类号： B23G7/02 , B23G2200/32 , Y10T408/904 , Y10T408/9046 , Y10T408/9048
摘要： A thread forming tap having a complete thread portion, formed with a predetermined back taper with that decreases rotational torque during tapping work, which reduces load acting on first complete protruding portions, formed at an extreme leading end of the complete thread portion, and thereby suppressing degradation in service life of the tool due to wear.
摘要翻译： 一种具有完整螺纹部分的螺纹成型丝锥，其形成有预定的后锥形，其减小了攻丝加工期间的旋转扭矩，这降低了形成在完整螺纹部分的极端前端处的第一完成突出部分上的负载，从而抑制 磨损使工具使用寿命下降。
-
公开(公告)号：US08367559B2
公开(公告)日：2013-02-05
申请号：US13013554
申请日：2011-01-25
IPC分类号： H01L21/31
CPC分类号： H01L21/02274 , C23C16/401 , H01L21/02126 , H01L21/02216 , H01L21/3122 , H01L21/31633 , H01L21/76807 , H01L21/76829 , H01L21/76883
摘要： Characteristics of a low-k insulating film grown on a substrate is modulated in the thickness-wise direction, by varying the ratio of high-frequency input and low-frequency input used for inducing plasma in the course of forming the film, to thereby improve the adhesion strength while keeping the dielectric constant at a low level, wherein the high-frequency input and the low-frequency input for inducing plasma are applied from a single electrode, while elevating the level of low-frequency input at least either at the start of formation or at the end of formation of the insulating film, as compared with the input level in residual time zone.
摘要翻译： 通过改变在形成膜的过程中用于诱导等离子体的高频输入和低频输入的比例，在厚度方向上调制在衬底上生长的低k绝缘膜的特性，从而改善 粘合强度同时保持介电常数在低水平，其中用于诱导等离子体的高频输入和低频输入从单个电极施加，同时在开始时至少提高低频输入的电平 的形成或绝缘膜形成结束时，与残留时区的输入电平相比较。
-
公开(公告)号：US08278763B2
公开(公告)日：2012-10-02
申请号：US13238796
申请日：2011-09-21
CPC分类号： H01L23/53295 , H01L21/02126 , H01L21/02216 , H01L21/02274 , H01L21/0234 , H01L21/31633 , H01L21/76807 , H01L21/76808 , H01L21/76814 , H01L21/76826 , H01L21/76829 , H01L21/76831 , H01L21/76832 , H01L21/76835 , H01L23/53238 , H01L23/5329 , H01L2924/0002 , H01L2924/00
摘要： The present invention provides a multilayer wiring technology by which high adhesiveness and high insulation reliability between wirings are obtained, while maintaining effective low capacitance between wirings. A semiconductor device is characterized in that a first insulating film is an insulating film formed of at least one layer which contains a siloxane structure containing silicon, oxygen and carbon; the siloxane structure in the inner part of the first insulating film contains a larger number of carbon atoms than the number of silicon atoms; and a modified layer which containing a smaller number of carbon atoms and a larger number of oxygen atoms per unit volume than the inner part of the first insulating film is formed on at least one of an interface between the first insulating film and the metal and an interface between the first insulating film and a second insulating film.
摘要翻译： 本发明提供了一种多层布线技术，其中在布线之间保持有效的低电容的同时获得了布线之间的高粘合性和高绝缘可靠性。 半导体器件的特征在于，第一绝缘膜是由至少一层包含含有硅，氧和碳的硅氧烷结构的层形成的绝缘膜; 第一绝缘膜的内部的硅氧烷结构含有比硅原子数多的碳原子数; 并且在第一绝缘膜和金属之间的界面中的至少一个上形成有含有比第一绝缘膜的内部少的碳原子数和更多数量的单位体积的氧原子的改性层， 第一绝缘膜和第二绝缘膜之间的界面。
-
公开(公告)号：US07824407B2
公开(公告)日：2010-11-02
申请号：US11553084
申请日：2006-10-26
IPC分类号： A61B18/14
CPC分类号： A61B18/1445 , A61B2017/00269 , A61B2017/2215 , A61B2017/2937 , A61B2018/144
摘要： A treatment tool for an endoscope which grasps an object of treatment, includes: a flexible sheath; a forward-and-backward moving section; and elastic grippers, wherein each of the pair of arms includes: a connector; a bent portion; a rectilinear portion; and a distal clasp, wherein in conjunction with the forward and backward movement operation of the forward-and-backward moving section, the distal ends of the pair of arms are deployed when the pair of arms are projected from the distal end of the sheath, the distal ends of the pair of arms are closed by elastic deformation when the pair of arms are moved into the sheath.
摘要翻译： 一种用于抓握治疗对象的内窥镜治疗工具，包括：柔性护套; 前后移动部分; 和弹性夹持器，其中所述一对臂中的每一个包括：连接器; 弯曲部分 直线部分 和远端扣环，其中结合前进和后退移动部分的向前和向后移动操作，当该对臂从护套的远端突出时，一对臂的远端展开， 当一对臂移动到护套中时，一对臂的远端由弹性变形封闭。
-
-
-
-
-
-
-
-
-
搜索结果
90 条记录 (耗时 0.044 秒)
