公开(公告)号：US07218188B2

公开(公告)日：2007-05-15

申请号：US11037307

申请日：2005-01-18

申请人： Qing Ma ,  Dong S. Shim

发明人： Qing Ma ,  Dong S. Shim

IPC分类号： H03H9/00

CPC分类号： H03H9/0542 ,  H03H9/02779 ,  H03H9/6403

摘要： Microelectromechanical system (MEMS) apparatus and methods for surface acoustic wave (SAW) switching are disclosed. The apparatus includes a piezoelectric substrate having spaced apart input and output SAW transducers. A MEMS switch is arranged between the input and output SAW transducers The MEMS switch has a deformable member in electromagnetic communication with one or more actuation electrodes formed on or above the substrate. The deformable member is deformable to mechanically contact the substrate to deflect or absorb a SAW generated by the input SAW transducer.

摘要翻译： 公开了用于表面声波（SAW）切换的微机电系统（MEMS）装置和方法。 该装置包括具有间隔开的输入和输出SAW换能器的压电基片。 MEMS开关布置在输入和输出SAW换能器之间MEMS开关具有与形成在基板上或上方的一个或多个致动电极电磁连通的可变形构件。 可变形构件可变形以机械地接触衬底以偏转或吸收由输入SAW换能器产生的SAW。

公开(公告)号：US20070013023A1

公开(公告)日：2007-01-18

申请号：US11525982

申请日：2006-09-22

申请人： Qing Ma ,  Jin Lee ,  Harry Fujimoto ,  Changhong Dai ,  Shiuh-Wuu Lee ,  Travis Eiles ,  Krishna Seshan

发明人： Qing Ma ,  Jin Lee ,  Harry Fujimoto ,  Changhong Dai ,  Shiuh-Wuu Lee ,  Travis Eiles ,  Krishna Seshan

IPC分类号： H01L29/00

CPC分类号： H01L29/7842 ,  H01L21/76224 ,  H01L29/7846 ,  H01L2224/16225 ,  H01L2224/32225 ,  H01L2224/48091 ,  H01L2224/73204 ,  H01L2224/73265 ,  H01L2924/13091 ,  H01L2924/00014 ,  H01L2924/00

摘要： An apparatus and methods for modifying isolation structure configurations for MOS devices to either induce or reduce tensile and/or compressive stresses on an active area of the MOS devices. The isolation structure configurations according to the present invention include the use of low-modulus and high-modulus, dielectric materials, as well as, tensile stress-inducing and compressive stress-inducing, dielectric materials, and further includes altering the depth of the isolation structure and methods for modifying isolation structure configurations, such as trench depth and isolation materials used, to modify (i.e., to either induce or reduce) tensile and/or compressive stresses on an active area of a semiconductor device.

摘要翻译： 一种用于修改MOS器件的隔离结构配置以诱导或减小MOS器件的有源区上的拉伸和/或压缩应力的装置和方法。 根据本发明的隔离结构构造包括使用低模量和高模量介电材料以及拉伸应力诱导和压应力诱导介电材料，还包括改变隔离深度 用于改变隔离结构构造的结构和方法，例如使用的沟槽深度和隔离材料，以修饰（即，诱发或减少）半导体器件的有源区域上的拉伸和/或压缩应力。

公开(公告)号：US20060125703A1

公开(公告)日：2006-06-15

申请号：US11013594

申请日：2004-12-14

申请人： Qing Ma ,  Xintian Lin ,  Al Bettner

发明人： Qing Ma ,  Xintian Lin ,  Al Bettner

IPC分类号： H01Q13/10

CPC分类号： H01Q13/103

摘要： Briefly, in accordance with one embodiment of the invention, a slot antenna may include a primary slot and one or more secondary slots. The size of the antenna may be reduced by adding one or more of the secondary slots which may add additional inductance to the antenna. Furthermore, the size of the antenna may be reduced by increasing the inductance of the secondary slots via increasing the length of the slots or by changing the shape of the slots. The antenna may include one or more MEMS varactors coupled to one or more of the secondary slots. The resonant frequency of the slot antenna may be tuned to a desired frequency by changing the capacitance value of one or more of the MEMS varactors to a desired capacitance value.

摘要翻译： 简而言之，根据本发明的一个实施例，缝隙天线可以包括主槽和一个或多个次槽。 可以通过增加一个或多个次级槽来减小天线的尺寸，这可能为天线增加额外的电感。 此外，可以通过增加槽的长度或通过改变槽的形状来增加辅助槽的电感来减小天线的尺寸。 天线可以包括耦合到一个或多个次级插槽的一个或多个MEMS变容二极管。 可以通过将一个或多个MEMS可变电抗器的电容值改变为期望的电容值来将缝隙天线的谐振频率调谐到期望的频率。

公开(公告)号：US06995440B2

公开(公告)日：2006-02-07

申请号：US10857101

申请日：2004-05-28

申请人： Qing Ma

发明人： Qing Ma

IPC分类号： H01L29/84

CPC分类号： H01H59/0009 ,  H01H2059/0036

摘要： A microelectromechanical system (MEMS) switch has a beam with a high-resonance frequency. The MEMS switch includes a substrate having an electrical contact and a hexsil beam coupled to the substrate in order to transfer electric signals between the beam and the contact when an actuating voltage is applied to the switch. A method of fabricating a MEMS switch includes forming a substrate having a contact and forming a beam. The method further includes attaching the beam to the substrate such that the beam is maneuverable into and out of contact with the substrate.

公开(公告)号：US20060001329A1

公开(公告)日：2006-01-05

申请号：US10882510

申请日：2004-06-30

申请人： Valluri Rao ,  Qing Ma ,  Quan Tran ,  Dong Shim ,  Li-Peng Wang

发明人： Valluri Rao ,  Qing Ma ,  Quan Tran ,  Dong Shim ,  Li-Peng Wang

IPC分类号： H01L41/08

CPC分类号： H03H9/02102 ,  H03H2009/02196

摘要： A film bulk acoustic resonator (FBAR) comprises a piezoelectric film sandwiched between a top electrode and a bottom electrode. A temperature sensor is provided to sense a temperature to determine a temperature induced frequency drift for the FBAR. A voltage controller operatively connected to the temperature sensor supplies a direct current (DC) bias voltage to the FBAR to induce an opposite voltage induced frequency drift to compensate for the temperature induced frequency drift.

摘要翻译： 薄膜体声波谐振器（FBAR）包括夹在顶部电极和底部电极之间的压电薄膜。 提供温度传感器以感测温度以确定FBAR的温度感应频率漂移。 可操作地连接到温度传感器的电压控制器向FBAR提供直流（DC）偏置电压以引起相反的电压感应频率漂移以补偿温度引起的频率漂移。

公开(公告)号：US20050148065A1

公开(公告)日：2005-07-07

申请号：US10749529

申请日：2003-12-30

申请人： Yuegang Zhang ,  Andrew Berlin ,  Qing Ma ,  Li-Peng Wang ,  Valluri Rao ,  Mineo Yamakawa

发明人： Yuegang Zhang ,  Andrew Berlin ,  Qing Ma ,  Li-Peng Wang ,  Valluri Rao ,  Mineo Yamakawa

IPC分类号： G01N29/02 ,  G01N29/036 ,  G01N29/34 ,  G01N33/543 ,  C12M1/34

CPC分类号： G01N33/54373 ,  B82Y15/00 ,  B82Y30/00 ,  G01N27/126 ,  G01N29/022 ,  G01N29/036 ,  G01N29/2437 ,  G01N29/348 ,  G01N33/0031 ,  G01N2291/02466 ,  G01N2291/0255 ,  G01N2291/0256 ,  G01N2291/0426 ,  Y10T436/11 ,  Y10T436/143333 ,  Y10T436/144444 ,  Y10T436/25375

摘要： Systems and methods for detecting the presence of biomolecules in a sample using biosensors that incorporate resonators which have functionalized surfaces for reacting with target biomolecules. In one embodiment, a device includes a piezoelectric resonator having a functionalized surface configured to react with target molecules, thereby changing the mass and/or charge of the resonator which consequently changes the frequency response of the resonator. The resonator's frequency response after exposure to a sample is compared to a reference, such as the frequency response before exposure to the sample, a stored baseline frequency response or a control resonator's frequency response.

摘要翻译： 使用包含具有功能化表面以与靶生物分子反应的共振器的生物传感器来检测样品中存在生物分子的系统和方法。 在一个实施例中，器件包括压电谐振器，其具有被配置为与靶分子反应的官能化表面，从而改变谐振器的质量和/或电荷，从而改变谐振器的频率响应。 将曝光后的谐振器频率响应与参考值进行比较，例如在暴露于采样之前的频率响应，存储的基准频率响应或控制谐振器的频率响应。

公开(公告)号：US20050122001A1

公开(公告)日：2005-06-09

申请号：US11037307

申请日：2005-01-18

申请人： Qing Ma ,  Dong Shim

发明人： Qing Ma ,  Dong Shim

IPC分类号： B81B3/00 ,  H03H9/02 ,  H03H9/05 ,  H03H9/25 ,  H01L41/107

CPC分类号： H03H9/0542 ,  H03H9/02779 ,  H03H9/6403

摘要： Microelectromechanical system (MEMS) apparatus and methods for surface acoustic wave (SAW) switching are disclosed. The apparatus includes a piezoelectric substrate having spaced apart input and output SAW transducers. A MEMS switch is arranged between the input and output SAW transducers The MEMS switch has a deformable member in electromagnetic communication with one or more actuation electrodes formed on or above the substrate. The deformable member is deformable to mechanically contact the substrate to deflect or absorb a SAW generated by the input SAW transducer.

摘要翻译： 公开了用于表面声波（SAW）切换的微机电系统（MEMS）装置和方法。 该装置包括具有间隔开的输入和输出SAW换能器的压电基片。 MEMS开关布置在输入和输出SAW换能器之间MEMS开关具有与形成在基板上或上方的一个或多个致动电极电磁连通的可变形构件。 可变形构件可变形以机械地接触衬底以偏转或吸收由输入SAW换能器产生的SAW。

公开(公告)号：US20050083158A1

公开(公告)日：2005-04-21

申请号：US10971793

申请日：2004-10-22

申请人： Qing Ma

发明人： Qing Ma

IPC分类号： B81B3/00 ,  H01H59/00 ,  H01L21/00

CPC分类号： H01H59/0009

摘要： A microelectromechanical system (MEMS) switch that includes a signal contact, an actuation electrode and a beam that engages the signal contact when a voltage is applied to the actuation electrode. The signal contact includes a first portion and a second portion. The actuation electrode is positioned between the first and second portions of the signal contact.

摘要翻译： 一种微电子机械系统（MEMS）开关，其包括信号触点，致动电极和当电压施加到致动电极时与信号触点接合的光束。 信号触点包括第一部分和第二部分。 致动电极位于信号触点的第一和第二部分之间。

公开(公告)号：US06852926B2

公开(公告)日：2005-02-08

申请号：US10106728

申请日：2002-03-26

申请人： Qing Ma ,  Valluri Rao ,  John Heck ,  Daniel Wong ,  Michele Berry

发明人： Qing Ma ,  Valluri Rao ,  John Heck ,  Daniel Wong ,  Michele Berry

IPC分类号： B81B7/00 ,  H01L23/10 ,  H05K5/06

CPC分类号： B81B7/0006 ,  H01L23/10 ,  H01L2224/05567 ,  H01L2224/05568 ,  H01L2224/05572 ,  H01L2224/05573 ,  H01L2224/16 ,  H01L2924/01079 ,  H01L2924/1461 ,  H01L2924/00

摘要： A MEMS device may be formed in a hermetic cavity by sealing a pair of semiconductor structures to one another, enclosing the MEMS device. The two structures may be coupled using surface mount techniques as one example, so that the temperatures utilized may be compatible with many MEMS applications. Electrical interconnection layers in one or the other of these structures may be utilized to allow electrical interconnections from the exterior world to the MEMS components within the cavity.

摘要翻译： 通过将一对半导体结构彼此密封，封装MEMS器件，MEMS器件可以形成在密封腔中。 两个结构可以使用表面贴装技术作为一个例子进行耦合，使得所使用的温度可以与许多MEMS应用相兼容。 这些结构中的一个或另一个中的电互连层可用于允许从外部世界到空腔内的MEMS部件的电互连。

公开(公告)号：US06812810B2

公开(公告)日：2004-11-02

申请号：US10174935

申请日：2002-06-19

申请人： Qing Ma ,  Tsung-Kuan Allen Chou

发明人： Qing Ma ,  Tsung-Kuan Allen Chou

IPC分类号： H01P512

CPC分类号： H01L23/66 ,  B81B7/0006 ,  H01L23/5221 ,  H01L2924/0002 ,  H01L2924/00

摘要： A conductive bridge in a second conductive layer may be utilized to join a pair of spaced apart conductive strips in a first conductive layer. A gap between the first and second strips may be bridged by the bridge while isolating both the first and second strips and the bridge itself from another conductor which extends through the gap between the first and second strips.

摘要翻译： 第二导电层中的导电桥可用于在第一导电层中连接一对间隔开的导电条。 第一和第二条带之间的间隙可以由桥桥接，同时将第一和第二条带和桥接器本身与另一个延伸穿过第一和第二条带之间的间隙的导体隔离。