公开(公告)号：US20140138560A1

公开(公告)日：2014-05-22

申请号：US14083020

申请日：2013-11-18

Applicant: GIGAPHOTON INC.

Inventor： Hiroshi UMEDA ,  Osamu WAKABAYASHI

IPC: G01J3/10

CPC classification number: H05G2/006 ,  H05G2/005 ,  H05G2/008

Abstract: A target supply device may include a tank including a nozzle, a first electrode provided with a first through-hole and disposed so that a center axis of the nozzle is positioned within the first through-hole, a second electrode that includes a main body portion provided with a second through-hole and a collection portion formed in a cylindrical shape extending in a direction from a circumferential edge of the second through-hole toward the nozzle and that is disposed so that the center axis of the nozzle is positioned within the second through-hole, a third electrode disposed within the tank, and a heating unit configured to heat the second electrode.

Abstract translation: 目标供给装置可以包括：包括喷嘴的第一电极，设置有第一通孔的第一电极，并且设置成使得喷嘴的中心轴线位于第一通孔内;第二电极，包括主体部分 设置有第二通孔和收集部，所述第二通孔和收集部形成为从所述第二通孔的周缘方向朝向所述喷嘴的方向延伸的圆筒形状，并且所述收集部被配置为使得所述喷嘴的中心轴线位于所述第二通孔 通孔，设置在所述槽内的第三电极，以及构造成加热所述第二电极的加热单元。

公开(公告)号：US20190252846A1

公开(公告)日：2019-08-15

申请号：US16396072

申请日：2019-04-26

Applicant: National University Corporation Nagaoka University of Technology ,  Gigaphoton Inc.

Inventor： Weihua JIANG ,  Hiroshi UMEDA ,  Hakaru MIZOGUCHI ,  Takashi MATSUNAGA ,  Hiroaki TSUSHIMA ,  Tomoyuki OHKUBO

IPC: H01S3/097 ,  H01S3/041 ,  H01S3/225 ,  H01S3/134 ,  H01S3/038

CPC classification number: H01S3/09702 ,  H01S3/036 ,  H01S3/038 ,  H01S3/041 ,  H01S3/08009 ,  H01S3/0971 ,  H01S3/10069 ,  H01S3/134 ,  H01S3/225

Abstract: A high-voltage pulse generator may include a number “n” (n is a natural number of not less than 2) of primary electric circuits connected in parallel to one another on the primary side of a pulse transformer, and a secondary electric circuit of the pulse transformer, which is connected to a pair of discharge electrodes disposed in a laser chamber of a gas laser apparatus. The “n” primary electric circuits may include a number “n” of primary coils connected in parallel to one another, a number “n” of capacitors respectively connected in parallel to the “n” primary coils, and a number “n” of switches respectively connected in series to the “n” capacitors. The “n” primary electric circuits may be connected to a number “n” of chargers for charging the “n” capacitors, respectively. The secondary electric circuit may include a number “n” of secondary coils connected in series to one another, and a number “n” of diodes each connected to opposite ends of each of the “n” secondary coils, to prevent a reverse current flowing from the pair of discharge electrodes toward the secondary coils.

公开(公告)号：US20180191124A1

公开(公告)日：2018-07-05

申请号：US15895634

申请日：2018-02-13

Applicant: Gigaphoton Inc.

Inventor： Hiroshi UMEDA ,  Osamu WAKABAYASHI

IPC: H01S3/097 ,  H01S3/23 ,  H01S3/104

CPC classification number: H01S3/09702 ,  H01L21/2026 ,  H01S3/104 ,  H01S3/225 ,  H01S3/2383

Abstract: The laser system includes a first laser apparatus, a second laser apparatus, a charging voltage measuring unit configured to measure the charging voltage of the first storage capacitor and the charging voltage of the second storage capacitor, at least one bleeding circuit configured to reduce the charging voltage of the first storage capacitor and the charging voltage of the second storage capacitor, and a bleeding circuit controller configured to control the at least one bleeding circuit based on the voltage measured by the charging voltage measuring unit.

公开(公告)号：US20170338033A1

公开(公告)日：2017-11-23

申请号：US15671660

申请日：2017-08-08

Applicant: Gigaphoton Inc.

Inventor： Hiroshi UMEDA

IPC: H01F27/32 ,  H01S3/04 ,  H01F27/12 ,  H01F27/16 ,  H01S3/097 ,  H01S3/041

CPC classification number: H01F27/322 ,  H01F27/12 ,  H01F27/16 ,  H01F27/324 ,  H01F38/023 ,  H01S3/0407 ,  H01S3/041 ,  H01S3/09702 ,  H01S3/0971 ,  H01S3/225

Abstract: To reduce the size of a magnetic circuit to be provided in a pulse power module for applying a high voltage in the form of a pulse across a pair of discharge electrodes which are disposed in a laser chamber of a gas laser apparatus, the magnetic circuit may include a magnetic core, an insulation member configured to contain a refrigerant flow path therein and cover the periphery of the magnetic core, and a winding wound around the insulation member.

公开(公告)号：US20170070023A1

公开(公告)日：2017-03-09

申请号：US15354670

申请日：2016-11-17

Applicant: Gigaphoton Inc.

Inventor： Hiroshi UMEDA ,  Takeshi ASAYAMA ,  Osamu WAKABAYASHI

IPC: H01S3/097 ,  H01S3/23

CPC classification number: H01S3/09702 ,  B23K26/00 ,  B23K26/0608 ,  H01L21/02686 ,  H01L21/67115 ,  H01S3/0057 ,  H01S3/104 ,  H01S3/1305 ,  H01S3/1394 ,  H01S3/225 ,  H01S3/2308 ,  H01S3/2383

Abstract: The laser system may include a delay circuit unit, first and second trigger-correction units, and a clock generator. The delay circuit unit may receive a trigger signal, output a first delay signal obtained by delaying the trigger signal by a first delay time, and output a second delay signal obtained by delaying the trigger signal by a second delay time. The first trigger-correction unit may receive the first delay signal and output a first switch signal obtained by delaying the first delay signal by a first correction time. The second trigger-correction unit may receive the second delay signal and output a second switch signal obtained by delaying the second delay signal by a second correction time. The clock generator may generate a clock signal that is common to the delay circuit unit and the first and second trigger-correction units.

Abstract translation: 激光系统可以包括延迟电路单元，第一和第二触发校正单元以及时钟发生器。 延迟电路单元可以接收触发信号，输出通过将触发信号延迟第一延迟时间而获得的第一延迟信号，并输出通过将触发信号延迟第二延迟时间而获得的第二延迟信号。 第一触发校正单元可以接收第一延迟信号并输出​​通过将第一延迟信号延迟第一校正时间而获得的第一开关信号。 第二触发校正单元可以接收第二延迟信号并输出​​通过将第二延迟信号延迟第二校正时间而获得的第二开关信号。 时钟发生器可以产生延迟电路单元和第一和第二触发校正单元共用的时钟信号。

公开(公告)号：US20140239203A1

公开(公告)日：2014-08-28

申请号：US14188428

申请日：2014-02-24

Applicant: GIGAPHOTON INC.

Inventor： Hiroshi UMEDA ,  Toshiyuki HIRASHITA

IPC: H05G2/00 ,  G21K5/00

CPC classification number: H05G2/008 ,  H05G2/005 ,  H05G2/006

Abstract: A target supply device 4 may include a tank 51, formed of a metal, that holds a target material, an insulating member 62 that makes contact with at least part of the periphery of the tank 51, and a heater 58 that is separated from the tank 51 and heats the tank 51 via the insulating member 62.

Abstract translation: 目标供给装置4可以包括由金属形成的保持目标材料的箱51，与罐51的周边的至少一部分接触的绝缘构件62和与罐51分离的加热器58 并通过绝缘构件62加热箱51。

公开(公告)号：US20140061512A1

公开(公告)日：2014-03-06

申请号：US14012642

申请日：2013-08-28

Applicant: GIGAPHOTON INC.

Inventor： Hiroshi UMEDA

IPC: H05G2/00

CPC classification number: H05G2/006 ,  H05G2/005 ,  H05G2/008

Abstract: A target supply device may include a receptacle for holding a liquid target material, a first electrode disposed within the receptacle, a nozzle portion provided in the receptacle, a second electrode provided with a first path and disposed facing the nozzle portion, a third electrode provided with a second path that, along with the first path, defines a trajectory of the liquid target material released from the nozzle portion, a first power source that applies a first potential that is higher than a common potential to the first electrode, a second power source that applies a second potential that is lower than the common potential to the third electrode, and a third power source that applies a third potential that is no greater than the first potential and is no less than the second potential to the second electrode.

Abstract translation: 目标供给装置可以包括用于保持液体目标材料的容器，设置在容器内的第一电极，设置在容器中的喷嘴部分，设置有面向喷嘴部分设置的第一路径的第二电极，设置在第三电极 具有与第一路径一起限定从喷嘴部分释放的液体目标材料的轨迹的第二路径，向第一电极施加高于公共电位的第一电位的第一电源，第二电力 源极，其向第三电极施加低于公共电位的第二电位;以及第三电源，其向第二电极施加不大于第一电位且不小于第二电位的第三电位。