公开(公告)号：US11117265B2

公开(公告)日：2021-09-14

申请号：US16922805

申请日：2020-07-07

Applicant: Applied Materials, Inc.

Inventor： Paul Z. Wirth ,  Charles T. Carlson ,  Jason M. Schaller

IPC: H01L21/687 ,  B25J11/00 ,  B25J9/12 ,  B25J9/00 ,  B25J9/04 ,  H01L21/677 ,  B25J15/00

Abstract: Exemplary substrate processing systems may include a transfer region housing defining a transfer region fluidly coupled with a plurality of processing regions. A sidewall of the transfer region housing may define a sealable access for providing and receiving substrates. The systems may include a transfer apparatus having a central hub including a shaft extending at a distal end through the transfer region housing into the transfer region. The transfer apparatus may include a lateral translation apparatus coupled with an exterior surface of the transfer region housing, and configured to provide at least one direction of lateral movement of the shaft. The systems may also include an end effector coupled with the shaft within the transfer region. The end effector may include a plurality of arms having a number of arms equal to a number of substrate supports of the plurality of substrate supports in the transfer region.

公开(公告)号：US11032464B2

公开(公告)日：2021-06-08

申请号：US16669197

申请日：2019-10-30

Applicant: Applied Materials, Inc.

Inventor： Ozkan Celik ,  Patricia A. Schulze ,  Gregory J. Freeman ,  Paul Z. Wirth ,  Tommaso Vercesi

IPC: H04N5/232 ,  G06T7/571 ,  G01B11/00 ,  H04N13/00

Abstract: A depth measuring apparatus includes a camera assembly, a position sensor, and a controller. The camera assembly is configured to capture a plurality of images of a target at a plurality of distances from the target. The position sensor is configured to capture, for each of the plurality of images, corresponding position data associated with a relative distance between the camera assembly and the target. The controller is configured to, for each of a plurality of regions within the plurality of images: determine corresponding gradient values within the plurality of images; determine a corresponding maximum gradient value from the corresponding gradient values; and determine a depth measurement for the region based on the corresponding maximum gradient and the corresponding position data captured for an image from the plurality of images that includes the corresponding maximum gradient.

公开(公告)号：US20200068119A1

公开(公告)日：2020-02-27

申请号：US16669197

申请日：2019-10-30

Applicant: Applied Materials, Inc.

Inventor： Ozkan Celik ,  Patricia A. Schulze ,  Gregory J. Freeman ,  Paul Z. Wirth ,  Tommaso Vercesi

IPC: H04N5/232 ,  G06T7/571 ,  G01B11/00

Abstract: A depth measuring apparatus includes a camera assembly, a position sensor, and a controller. The camera assembly is configured to capture a plurality of images of a target at a plurality of distances from the target. The position sensor is configured to capture, for each of the plurality of images, corresponding position data associated with a relative distance between the camera assembly and the target. The controller is configured to, for each of a plurality of regions within the plurality of images: determine corresponding gradient values within the plurality of images; determine a corresponding maximum gradient value from the corresponding gradient values; and determine a depth measurement for the region based on the corresponding maximum gradient and the corresponding position data captured for an image from the plurality of images that includes the corresponding maximum gradient.

公开(公告)号：US10453725B2

公开(公告)日：2019-10-22

申请号：US15708806

申请日：2017-09-19

Applicant: Applied Materials, Inc.

Inventor： Paul Z. Wirth

IPC: H01L21/677 ,  B25J9/10 ,  B25J11/00 ,  B25J9/00

Abstract: A dual-blade robot having overlapping frog-leg linkages is disclosed. The robot includes first and second arms, coplanar with each other and each rotatably coupled to a first blade, in a frog-leg configuration, and third and fourth arms, coplanar with each other and each rotatably coupled to a second blade, in a frog-leg configuration, where the third and fourth arms are vertically offset from the first and second arms. The third and fourth arms are configured to overlap at least a portion of the first and second arms when the first and second blades are in a retracted position. Methods of operating the robot and electronic device processing systems including the robot are provided, as are numerous other aspects.

公开(公告)号：US20170117171A1

公开(公告)日：2017-04-27

申请号：US14921806

申请日：2015-10-23

Applicant: Applied Materials, Inc.

Inventor： Paul Z. Wirth

IPC: H01L21/677 ,  H01L21/67 ,  B25J5/02

CPC classification number: H01L21/67706 ,  B25J5/02 ,  B25J9/042 ,  B25J9/1045 ,  B25J11/0095 ,  H01L21/67161 ,  H01L21/67173 ,  H01L21/67196 ,  H01L21/67724 ,  H01L21/67742

Abstract: A robot assembly allowing remote actuation of a carriage supported robot. The robot assembly includes a track, a carriage moveable along the track, and a robot mounted to the carriage. The robot includes at least a first arm, and a first driven member coupled to the first arm. The robot assembly further includes a drive assembly having a first driving member, a first transmission member coupled to the first driving member and the first driven member, and a first drive motor coupled to the first driving member. The first drive motor is configured to move the first driving member causing remote rotation of the first driven member and rotation of the first arm. Substrate processing apparatus and methods of transporting a substrate within a substrate processing apparatus are also provided, as are numerous other aspects.