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公开(公告)号：US06220831B1
公开(公告)日：2001-04-24
申请号：US09133331
申请日：1998-08-13
IPC分类号： F04B1704
CPC分类号： F04D17/168 , F04D19/04
摘要： A turbomolecular pump comprising a rotor and a stator housed in a casing and forming an exhaust channel therebetween, and a suction port and a discharge port formed in the casing; wherein the turbomolecular pump has a valve body for opening and closing the suction port, the valve body is movable in an axial direction of the turbomolecular pump, a valve driving mechanism for driving the valve body via a valve body supporting member which extends through a throughhole formed in the rotor and/or the stator and magnetic bearing units for non-contactingly supporting the valve body supporting member within the throughhole, whereby a turbomolecular pump having a compact overall construction including valve units can be provided.
摘要翻译： 一种涡轮分子泵，包括转子和定子，其容纳在壳体中并在其间形成排气通道，以及形成在所述壳体中的吸入口和排出口。 其中所述涡轮分子泵具有用于打开和关闭所述吸入口的阀体，所述阀体可在所述涡轮分子泵的轴向方向上移动;阀驱动机构，其经由阀体支撑构件驱动所述阀体，所述阀体支撑构件延伸穿过通孔 形成在转子和/或定子和磁轴承单元中，用于在通孔内非接触地支撑阀体支撑构件，由此可以提供具有包括阀单元的紧凑整体结构的涡轮分子泵。
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公开(公告)号：US6062810A
公开(公告)日：2000-05-16
申请号：US133332
申请日：1998-08-13
CPC分类号： F04D19/04 , F04D17/168
摘要： A turbomolecular pump evacuates gas in an apparatus (or a chamber) by means of a rotor having blades and/or spiral grooves which rotates at a high speed. The turbomolecular pump includes a casing housing a rotor and a stator therein, a pumping section comprising the rotor and the stator, a valve element capable of opening or closing an intake port of the casing, and a supporting member for supporting the valve element. The supporting member extends through at least one of the rotor and the stator. The turbomolecular pump further includes an actuating mechanism for actuating the valve element, and the actuating mechanism is provided at a side opposite to the intake port with respect to the rotor.
摘要翻译： 涡轮分子泵通过具有高速旋转的叶片和/或螺旋槽的转子在装置（或室）中排出气体。 涡轮分子泵包括壳体，壳体中包括转子和定子，泵体部分包括转子和定子，能够打开或关闭壳体的进气口的阀元件和用于支撑阀元件的支撑构件。 支撑构件延伸穿过转子和定子中的至少一个。 涡轮分子泵还包括用于致动阀元件的致动机构，并且致动机构设置在相对于转子的与进气口相对的一侧。
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公开(公告)号：US4926648A
公开(公告)日：1990-05-22
申请号：US318206
申请日：1989-03-03
CPC分类号： F04B37/06 , F04D19/046 , Y10S417/901
摘要： A turbomolecular pump having a rotor provided with a plurality of rotor blades and a spacer provided with a plurality of stator blades so that gas molecules are sucked in from a suction port, compressed and discharged from an exhaust port. The pump further has a heat exchanger provided inside the suction port, the heat exchanger being connected to a refrigerator through a refrigerant pipe and a gate valve provided on the upstream side of the suction port. Gases having low molecular weights, particularly water vapor, are freeze-trapped on the heat exchanger. Thus, it is possible to efficiently exhaust gases having low molecular weights, particularly water vapor, and hence to obtain a high vacuum of good quality. In addition, it is easy to start and suspend operation of the system and possible to run it on a continuous basis.
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公开(公告)号：US08530869B2
公开(公告)日：2013-09-10
申请号：US13184047
申请日：2011-07-15
申请人： Shinji Nagai , Takanobu Ishihara , Kouji Kakizaki , Hiroshi Sobukawa , Takeshi Murakami , Masahiro Inoue
发明人： Shinji Nagai , Takanobu Ishihara , Kouji Kakizaki , Hiroshi Sobukawa , Takeshi Murakami , Masahiro Inoue
CPC分类号： H05G2/003 , G03F7/70033 , G03F7/70858 , G03F7/70916 , G03F7/70983 , H05G2/005
摘要： An extreme ultraviolet light source apparatus comprises a target supply unit supplying a target into a vacuum chamber, a laser oscillator outputting a laser light into the vacuum chamber, a collector mirror outputting an extreme ultraviolet light outside by reflecting the extreme ultraviolet light emitted from the target being ionized as a plasma by irradiation with the laser light at a plasma luminescence point in the vacuum chamber, and an ion debris removal unit at least a part of which is located in an obscuration region including the plasma luminescence point.
摘要翻译： 极紫外光源装置包括将目标供给到真空室中的目标供给单元，将激光输出到真空室中的激光振荡器，通过反射从目标发射的极紫外光而向外部输出极紫外光的集光镜 通过在真空室中的等离子体发光点用激光照射等离子体，以及离子碎片去除单元，其至少一部分位于包括等离子体发光点的遮蔽区域中。
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公开(公告)号：US08067732B2
公开(公告)日：2011-11-29
申请号：US11996701
申请日：2006-07-24
申请人： Mamoru Nakasuji , Takeshi Murakami , Tohru Satake , Tsutomi Karimata , Toshifumi Kimba , Matsutaro Miyamoto , Hiroshi Sobukawa , Satoshi Mori , Yuichiro Yamazaki , Ichirota Nagahama
发明人： Mamoru Nakasuji , Takeshi Murakami , Tohru Satake , Tsutomi Karimata , Toshifumi Kimba , Matsutaro Miyamoto , Hiroshi Sobukawa , Satoshi Mori , Yuichiro Yamazaki , Ichirota Nagahama
IPC分类号： G01N23/00
CPC分类号： H01J37/05 , H01J37/147 , H01J37/153 , H01J37/26 , H01J2237/057
摘要： An electron beam emitted from an electron gun (G) forms a reduced image on a sample (S) through a non-dispersion Wien-filter (5-1), an electromagnetic deflector (11-1), a beam separator (12-1), and a tablet lens (17-1) as an objective lens. The beam separator (12-1) is configured such that a distance by which a secondary electron beam passes through the beam separator is approximately three times longer than a distance by which a primary electron beam passes through the beam separator. Therefore, even if a magnetic field in the beam separator is set to deflect the primary electron beam by a small angle equal to or less than approximately 10 degrees, the secondary electron beam can be deflected by approximately 30 degrees, so that the primary and secondary electron beams are sufficiently separated. Also, since the primary electron beam is deflected by a small angle, less aberration occurs in the primary electron beam. Accordingly, since a light path length of a primary electro-optical system, it is possible to reduce the influence of space charge and the occurrence of deflection aberration.
摘要翻译： 从电子枪（G）发射的电子束通过非分散维恩滤波器（5-1），电磁偏转器（11-1），光束分离器（12- 1）和作为物镜的平板电脑镜头（17-1）。 束分离器（12-1）被构造成使得二次电子束通过分束器的距离比一次电子束通过分束器的距离大约三倍。 因此，即使将分束器中的磁场设定为使一次电子束偏转等于或小于约10度的小角度，二次电子束可以偏转大约30度，使得初级和次级 电子束充分分离。 此外，由于一次电子束以小角度偏转，所以在一次电子束中产生较小的像差。 因此，由于一次电光学系统的光路长度，可以减小空间电荷的影响和偏转像差的发生。
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公开(公告)号：US5875168A
公开(公告)日：1999-02-23
申请号：US891594
申请日：1997-07-11
申请人： Mikio Ogusu , Shinji Ohba , Hiroshi Sobukawa
发明人： Mikio Ogusu , Shinji Ohba , Hiroshi Sobukawa
CPC分类号： G11B17/057 , G11B33/08 , G11B7/08582
摘要： A first adjusting base made of a leaf spring material is supported on a holder in such a manner that the first adjusting base crosses the moving direction of the holder and is slightly pivotable about a first pivot axis which is parallel to a disk surface. A second adjusting base made of a leaf spring material is supported on the first adjusting base in such a manner that the second adjusting base crosses the first pivot axis and is slightly pivotable about a second pivot axis. The first and second adjusting bases are biased in a slightly pivoting direction by their own elasticity and, by turning screws which restrict the biasing, the first and second bases are pivoted to adjust the direction of an optical axis of a pickup head. Shaking of the pickup head is prevented and shock to the pickup head is absorbed by elasticity of the first and second adjusting bases whereby the device can be made compact and light.
摘要翻译： 由板簧材料制成的第一调节基座以这样的方式被支撑在保持器上，使得第一调节基座跨过保持器的移动方向，并且能够绕平行于盘表面的第一枢转轴线稍微地枢转。 由板簧材料制成的第二调节基座以这样的方式支撑在第一调节基座上，使得第二调节基座与第一枢转轴线相交并且可围绕第二枢转轴线稍微转动。 第一调节基座和第二调节基座通过其自身的弹性以稍微的枢转方向偏置，并且通过转动限制偏置的螺钉，第一和第二基座枢转以调节拾取头的光轴的方向。 防止拾取头的晃动，并且通过第一和第二调节基座的弹性来吸收对拾取头的冲击，由此可使装置紧凑且轻便。
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公开(公告)号：US5062271A
公开(公告)日：1991-11-05
申请号：US519377
申请日：1990-05-04
CPC分类号： F04D19/046 , F04B37/06 , Y10S417/901
摘要： An evacuation apparatus and method using a turbomolecular pump having a rotor provided with a plurality of rotor blades and a spacer provided with a plurality of stator blades so that gas molecules are sucked in from a suction port, compressed and discharged from an exhaust port of the turbomolecular pump is disclosed. A heat exchanger is provided at the suction port side of the turbomolecular pump to freeze-trap gas molecules from being cooled by a helium refrigerator.The gate valve is disposed upstream of the heat exchanger and is provided in a suction pipe which extends between the vacuum vessel and the turbomolecular pump. In exhausting the vacuum vessel, the gate valve is opened and, in this state, the turbomolecular pump and the helium refrigerator are run. During regeneration, the gate valve is closed, the turbomolecular pump is run, and the heat exchanger is heated by means of a heater or by operation of the helium refrigator being suspended, thereby sublimating molecules freeze-trapped in the heat exchanger.
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