公开(公告)号：US4652761A

公开(公告)日：1987-03-24

申请号：US677950

申请日：1984-12-04

Applicant: James B. Kerr ,  Charles T. McElroy ,  David I. Wardle

Inventor： James B. Kerr ,  Charles T. McElroy ,  David I. Wardle

IPC: G01J3/06 ,  G01J3/18 ,  G01J3/28 ,  G01J3/32

CPC classification number: G01J3/32 ,  G01J2003/063 ,  G01J2003/2866 ,  G01J2003/2876 ,  G01J2003/326 ,  G01J3/0202 ,  G01J3/0229 ,  G01J3/0291 ,  G01J3/1838

Abstract: A holographic grating spectrophotometer for detecting ozone and sulphur dioxide in the atmosphere is described which provides automatic calibration and which provides automatic linearity correction for the photomultiplier tube. Automatic calibration is provided by using a computer to control a stepper motor to move the grating so that the photomultiplier tube receives maximum intensity at the calibration wavelength of 302.1 nm from a mercury source. Automatic linearity correction is obtained by cycling a wavelength selection mask across exit slits located in the focal plane of the device and firstly combines separately taken counts of two different wavelengths and comparing this sum with the sum of counts of these wavelengths taken simultaneously. The difference is used to calculate photomultiplier tube deadtime and improve accuracy of the results. In a preferred embodiment five wavelengths are used to calculate ozone and sulphur dioxide levels, and a stepper motor driving a cylindrical wavelength selection mask permits exit slits to be exposed to predetermined wavelengths one at a time.

Abstract translation: 描述了用于检测大气中的臭氧和二氧化硫的全息光栅分光光度计，其提供自动校准，并且为光电倍增管提供自动线性校正。 通过使用计算机来控制步进电机来移动光栅来提供自动校准，使得光电倍增管在距离汞源的302.1nm的校准波长处接收最大强度。 通过将波长选择掩模穿过位于器件的焦平面中的出口狭缝来获得自动线性校正，并且首先将分离的两个不同波长的计数组合并将该和与同时采用的这些波长的计数之和进行比较。 差异用于计算光电倍增管死区时间，提高结果精度。 在优选实施例中，使用五个波长来计算臭氧和二氧化硫水平，并且驱动圆柱形波长选择掩模的步进电机允许出口狭缝一次暴露于预定波长。

公开(公告)号：US4500204A

公开(公告)日：1985-02-19

申请号：US364911

申请日：1982-04-02

Applicant: Mutsuo Ogura

Inventor： Mutsuo Ogura

IPC: G01J3/02 ,  G01J3/06 ,  G02B6/04 ,  G02B6/26 ,  G02B21/00 ,  G03F7/20 ,  G01N21/63

CPC classification number: G03F7/7045 ,  B82Y10/00 ,  G01J3/02 ,  G01J3/0218 ,  G02B21/002 ,  G02B26/103 ,  G02B6/262 ,  G03F7/70383 ,  G01J2003/065

Abstract: A scanning-type lithographic and image-pickup device causes the terminal face of either a projecting optical fiber or a picking-up optical fiber to scan a given object in the plane of real image of an objective lens, projects a light through the projecting optical fiber onto the object, and receives the reflected light or a light of photoluminescence through the picking-up optical fiber. When this device is applied to a spectromicroscope, the quantitative surface information can be spectrally measured with high resolution and high reproducibility. When the device is applied to a contracting-projection exposure device or a selective laser annealing device, positional alignment and exposure pattern correction can be easily effected with high accuracy and high productivity. Simultaneous fabrication of a plurality of electronic components can be also obtained by use of this device.

Abstract translation: 扫描型光刻和图像拾取装置使得投影光纤或拾取光纤的终端面扫描物镜的实像平面中的给定对象，通过投影光学器件投射光 并且通过拾取光纤接收反射光或光致发光的光。 当该装置应用于显微镜时，定量表面信息可以以高分辨率和高再现性进行光谱测量。 当将装置应用于收缩投影曝光装置或选择性激光退火装置时，可以容易地以高精度和高生产率实现位置对准和曝光图案校正。 通过使用该装置也可以获得多个电子部件的同时制造。

公开(公告)号：US4211486A

公开(公告)日：1980-07-08

申请号：US888229

申请日：1978-03-20

Applicant: Haakon T. Magnussen, Jr. ,  Roy P. Moeller

Inventor： Haakon T. Magnussen, Jr. ,  Roy P. Moeller

IPC: G01J3/06 ,  G01J3/42

CPC classification number: G01J3/06

Abstract: A spectrophotometer utilizing a multiple wavelength electromagnetic wave source which is intercepted and dispersed into a spectrum. The spectrophotometer includes a closed loop servo positioning mechanism for simultaneously directing selected portions of the electromagnetic spectrum to a detector which analyzes these portions of the spectrum for analytical purposes.

Abstract translation: 利用多波长电磁波源的分光光度计被截取并分散到光谱中。 分光光度计包括闭环伺服定位机构，用于同时将电磁波谱的选定部分引导到检测器，该分析仪分析光谱的这些部分用于分析目的。

公开(公告)号：US4158505A

公开(公告)日：1979-06-19

申请号：US754810

申请日：1976-12-27

Applicant: Einar S. Mathisen ,  Paul A. Schumann, Jr. ,  Alvin H. Tong

Inventor： Einar S. Mathisen ,  Paul A. Schumann, Jr. ,  Alvin H. Tong

IPC: G01J3/10 ,  G01J3/28 ,  G01J3/06 ,  G01J3/42

CPC classification number: G01J3/08 ,  G01J3/02 ,  G01J3/0213 ,  G01J3/0232 ,  G01J3/10 ,  G01J3/2803

Abstract: A spectrum analyzing system measures or analyzes the colorimetric properties of a test sample at a preselected wavelength or range of wavelengths within the ultraviolet, visible, and near infrared regions. The system includes a spectrophotometer provided with a wideband light source, optical devices providing a sample light path and a reference light path, a chopper wheel allowing light to be directed alternately along the sample and reference paths interspersed with dark periods during which no light travels along either path, a dispersion grating for dispersing the light from both paths, a series of neutral density filters for limiting to various degrees the amount of light traversing each path, and a linear array of photodiodes for detecting the dispersed light at different wavelengths. The system also includes an electronic control section including a programmable power supply for controlling the intensity of light from the light source whereby the combination of the use of the neutral density filters in conjunction with controlling the intensity of light from the light source can be used to operate the photodiode array to prevent operation thereof near the saturated and dark current levels, and means for scanning the photodiode array at high speeds during rotation of the chopper wheel to provide a high speed spectral readout.

Abstract translation: 光谱分析系统测量或分析在紫外线，可见光和近红外区域内的预选波长或波长范围内的测试样品的比色性质。 该系统包括配备有宽带光源的分光光度计，提供样品光路的光学装置和参考光路，切割轮，允许沿着样品交替地引导光，并且散布着没有光沿着其间行进的暗期的参考路径 任一路径，用于分散来自两个路径的光的色散光栅，用于限制各种程度的不同程度的中性密度滤光器，以遍及每个路径的光线，以及用于检测不同波长的分散光的光电二极管的线阵列。 该系统还包括电子控制部分，其包括用于控制来自光源的光的强度的可编程电源，由此结合使用中性密度滤光片与控制来自光源的光的强度的组合可以用于 操作光电二极管阵列以防止在饱和和暗电流水平附近的操作，以及用于在斩波轮旋转期间高速扫描光电二极管阵列以提供高速光谱读数的装置。

公开(公告)号：US4146332A

公开(公告)日：1979-03-27

申请号：US788861

申请日：1977-04-19

Applicant: Kenneth L. Moore

Inventor： Kenneth L. Moore

IPC: G01J3/28 ,  G01J3/06

CPC classification number: G01J3/2803

Abstract: A spectrometer with the basic optical elements is described which scans the spectrum electronically rather than by mechanical manipulation or use of image tubes. The detecting elements are light sensitive charge coupled device detector arrays.

Abstract translation: 描述了具有基本光学元件的光谱仪，其以电子扫描光谱，而不是通过机械操纵或使用图像管。 检测元件是光敏电荷耦合器件检测器阵列。

公开(公告)号：US3942893A

公开(公告)日：1976-03-09

申请号：US522607

申请日：1974-11-11

Applicant: Allan S. Way

Inventor： Allan S. Way

IPC: G01J3/06 ,  G01J3/42

CPC classification number: G01J3/06

Abstract: A spectrophotometer system having a first stepper motor driving a wavelength scanning mechanism and a second stepper motor driving a chart recorder, both motors being operative in response to pulses from a system clock. The clock frequency is successively divided by first and second cascaded, switch-selectable sets of frequency dividers. The output of the first divider is applied to the wavelength motor and determines wavelength scan speed. The output of the second divider is applied to the chart motor and determines chart scale expansion. A decoder monitors the frequency selections of the first and second sets of frequency dividers, and upon detection of a frequency selection outside the capability of the chart motor, the decoder provides an output which inhibits both motors. The decoder output additionally actuates a visual indicator to inform an operator of the invalid selection.

Abstract translation: 一种具有驱动波长扫描机构的第一步进电机和驱动图表记录器的第二步进电机的分光光度计系统，两个电机响应于来自系统时钟的脉冲而工作。 时钟频率由第一级和第二级联的可切换选择的分频器组相继划分。 第一分频器的输出被施加到波长电机并确定波长扫描速度。 第二个分频器的输出应用于图表电机，并确定图表比例扩展。 解码器监视第一和第二组分频器的频率选择，并且在检测到图表电机的能力之外的频率选择时，解码器提供抑制两个电动机的输出。 解码器输出另外启动视觉指示器以通知操作者无效选择。

公开(公告)号：US3728029A

公开(公告)日：1973-04-17

申请号：US3728029D

申请日：1971-02-22

Applicant: BLOCK ENGINEERING

Inventor： HIRSCHFELD TOMAS

IPC: H04N3/30 ,  G01J3/06

CPC classification number: H04N3/30

Abstract: An electronic image-encoder with an SEC vidicon in which the electron beam is positioned according to a coordinate pair stored as digital signals and applied as analog signals to the deflection coils of the vidicon. This permits the beam to read selected points on the vidicon target and the beam is blanked until the desired deflection signals are applied. In one version of the device, the deflection signals are simply voltages corresponding to the values of the digital signals. In another version, one digital signal is converted to an analog deflection voltage and a standard ramp is used as the other deflection voltage, the beam being turned on to read only after a time interval following initiation of the ramp, which interval is proportional to the other digital signal. A special application of the encoder incorporates a crosseddispersion optical system for projecting several stacked spectral orders into the vidicon target. In all cases, the electron beam actuation provides an output signal corresponding to the image intensity at the point selected by the digital signal pair, and this output signal is digitized for storage, manipulation or display.

Abstract translation: 一种具有SEC摄像机的电子图像编码器，其中电子束根据作为数字信号存储的坐标对定位，并作为模拟信号施加到摄像机的偏转线圈。 这允许光束读取摄像机目标上的选定点，并且将光束消隐直到施加所需的偏转信号。

公开(公告)号：US3711708A

公开(公告)日：1973-01-16

申请号：US3711708D

申请日：1971-02-25

Applicant: OPTICAL COATING LABORATORY INC

Inventor： GEIGER D ,  DOLIN S ,  FOLCH A

IPC: G01J3/02 ,  G01J3/04 ,  G01J3/06 ,  G01J3/26 ,  G01J3/28 ,  G01J3/42 ,  G01N30/74 ,  G01N21/26

CPC classification number: G01J3/02 ,  G01J3/0202 ,  G01J3/0232 ,  G01J3/04 ,  G01J3/06 ,  G01J3/26 ,  G01J3/2889 ,  G01J3/42 ,  G01N30/74

Abstract: A rapid scan spectrum identifier fur use in identifying infrared spectrum of the output of a gas chromatograph to identify its absorption characteristics and includes an infrared source and beam splitter, a double beam chopper for alternately sending the infrared beam through a sample or reference gas cell mounted in a suitable furnace, the output of which is recombined and analyzed by a monochromator having a narrow output passband of energy detected by a rapid response detector, the output of which is processed by suitable electronic circuitry to provide a readout. The monochromator is of the scanning type in which a grating is synchronously scanned with a circular variable filter so that the first order output of the grating is selectively passed and higher orders rejected by the filter. The sample and reference gas cell furnace assembly utilizes specially constructed sample and reference gas cells symmetrically mounted in a furnace arrangement for maintaining input gas streams at equal temperatures within each cell and above the temperature of condensation of the sample under investigation. The beam chopper contains associated photoelectronics for physically determining the location of a chopping blade to thereby provide gating signals for indicating the presence at the detector of a sample, reference, or a background signals. These grating signals are used in sample and hold circuits to convert an essentially digitally sampled output into a relatively smooth continuous curve indicative of the absorption of the sample so that the readout represents the sample absorption characteristics corrected for reference for the carrier gas and background effects. The instrument is designed to operate with scan rates of approximately 6 and 30 seconds.

Abstract translation: 快速扫描光谱标识符用于识别气相色谱仪的输出的红外光谱以识别其吸收特性，并且包括红外源和分束器，用于交替地将红外光束通过样品或参考气体电池安装的双光束斩波器 在合适的炉中，其输出由具有由快速响应检测器检测到的能量的窄输出通带的单色仪重组和分析，其输出由合适的电子电路处理以提供读数。 单色仪是扫描型的，其中光栅与圆形可变滤波器同步扫描，使得光栅的一阶输出被选择性地通过，并且较高阶数被滤光器拒绝。

公开(公告)号：US3695764A

公开(公告)日：1972-10-03

申请号：US3695764D

申请日：1970-12-01

Applicant: PIERRE DELMAS ,  PIERRE IMBERT

Inventor： DELMAS PIERRE ,  IMBERT PIERRE

IPC: G01J3/06 ,  G01N21/31 ,  G01J3/42 ,  G01J3/12 ,  G01N21/04

CPC classification number: G01J3/06 ,  G01N21/314

Abstract: An automatic spectrophotometric absorption analyzer for continuous determination of a plurality of components of a fluid sample, comprising a monochromator with a diffraction grating receiving the light transmitted by a vessel with transparent faces which contains said sample, a photoelectric converter so arranged that the light beam emerging from the monochromator falls on its sensitive element, a unit for determining cyclically a plurality of stop positions of said diffraction grating which define wavelengths corresponding to the absorption lines of components of said sample, and means for automatic computation of the concentration of said components from the signal which is delivered by the converter.

Abstract translation: 一种用于连续测定流体样品的多个组分的自动分光光度吸收分析仪，包括具有衍射光栅的单色仪，所述衍射光栅接收由容器透射的光，所述透明面包含所述样品;光电转换器，其布置成使得所述光束出现 单色器落在其敏感元件上，用于周期性地确定所述衍射光栅的多个停止位置的单元，其限定与所述样品的组分的吸收线对应的波长，以及用于自动计算所述组分的浓度的装置， 由转换器传送的信号。

公开(公告)号：US3658424A

公开(公告)日：1972-04-25

申请号：US3658424D

申请日：1971-01-14

Applicant: SPECTRA METRICS INC

Inventor： ELLIOTT WILLIAM G

IPC: G01J3/00 ,  G01J3/06 ,  G01J3/12 ,  G01J3/14 ,  G01J3/18 ,  G01J3/02

CPC classification number: G01J3/1809 ,  G01J3/06 ,  G01J3/14 ,  G01J2003/1204 ,  G01J2003/1828

Abstract: A method for focusing the horizontal and vertical components of energy reflected from an echelle grating which includes rotating the grating about a first axis substantially parallel to a prism face and rotating the grating about a second axis substantially normal to the first axis.

Abstract translation: 一种用于聚焦从电梯光栅反射的能量的水平和垂直分量的方法，该方法包括围绕基本上平行于棱镜面的第一轴旋转光栅，并围绕基本上垂直于第一轴线的第二轴旋转光栅。