公开(公告)号：US06670611B1

公开(公告)日：2003-12-30

申请号：US09786064

申请日：2001-05-30

Applicant: Pieter Kruit ,  Hindrik Willem Mook

Inventor： Pieter Kruit ,  Hindrik Willem Mook

IPC: H01J37244

CPC classification number: H01J37/05 ,  H01J37/153 ,  H01J37/28

Abstract: Electron optical aberrations of an energy filtering system of an energy filtering transmission electron microscope (EFTEM) are automatically corrected under computer control to set up the EFTEM for use. Optics of the electron microscope preceding an energy filter are used to scan the beam at the entrance to the filter in a pattern corresponding to a defined geometry. The beam can either be finely focused to yield a spot at each position visited during the pattern scan, or the beam can be spread out and imprinted with a well-defined intensity distribution, such as normally occurs due to passage of the beam through a specimen, so that its relative scanned displacements can be assessed using cross-correlation techniques. In the case of the finely focused beam, electron images of the scanned pattern directly yield a spot pattern image. Deviation of the recorded spot pattern image from the defined scan geometry reflect the imaging aberrations introduced by the energy filter. In the case of the spread out beam, post-filter electron images of the scanned beam are cross-correlated with an image of the beam taken without scanning yielding cross-correlation peak images that give the effective displacement of each scanned beam position due to the aberrations/distortions of the filter. Summing the cross-correlation peak images again yields a spot pattern image that is equivalent to that obtained in the focused beam case. Deviations of the recorded spot pattern image from the defined scan geometry are analyzed to assess and subsequently correct aberrations introduced by the energy filter.

Abstract translation: 能量过滤透射电子显微镜（EFTEM）的能量过滤系统的电子光学像差在计算机控制下自动校正，以建立使用的EFTEM。 使用能量过滤器之前的电子显微镜的光学元件以对应于限定的几何形状的图案在过滤器入口处扫描光束。 光束可以精细聚焦，以在图案扫描期间访问的每个位置处产生斑点，或者光束可以被展开并且以明确的强度分布进行印刷，例如通常由于光束通过样本而发生 ，使得其相对扫描的位移可以使用互相关技术来评估。 在精细聚焦光束的情况下，扫描图案的电子图像直接产生点图案图像。 记录的斑点图像与定义的扫描几何的偏差反映了能量过滤器引入的成像像差。 在扩展光束的情况下，扫描光束的后置滤光子电子图像与不扫描的光束的图像交叉相关，产生互相关峰值图像，由此产生每个扫描光束位置的有效位移 过滤器的像差/失真。 对互相关峰值图像进行求和再次产生等同于在聚焦光束情况下获得的斑点图像图像的斑点图像。 分析记录的斑点图像与定义的扫描几何形状的偏差，以评估和随后校正由能量过滤器引入的像差。

公开(公告)号：US06593578B1

公开(公告)日：2003-07-15

申请号：US10010321

申请日：2001-11-08

Applicant: Paul J. Duval ,  Allan I. Rubin ,  Ira Rosenberg ,  Vladimir Vayner ,  Neal T. Sullivan

Inventor： Paul J. Duval ,  Allan I. Rubin ,  Ira Rosenberg ,  Vladimir Vayner ,  Neal T. Sullivan

IPC: H01F700

CPC classification number: H01J49/466 ,  H01J37/05 ,  H01J2237/057

Abstract: A charged particle filter such as a Wien filter in which components used as the pole pieces and electrodes are precisely and reliably secured to a supporting structure through which they extend and to which they are brazed. Electrical insulating gaps in the magnetic circuit are located very remotely from the pole faces of the pole pieces so as to minimize any adverse effect of the gaps on the produced magnetic field.

Abstract translation: 带电粒子滤波器如维恩滤波器，其中用作极片和电极的部件被精确可靠地固定到支撑结构，通过它们延伸并被钎焊到该支撑结构。 磁路中的电气绝缘间隙非常远离极片的极面，以最小化间隙对所产生的磁场的任何不利影响。

公开(公告)号：US06559445B2

公开(公告)日：2003-05-06

申请号：US09780721

申请日：2001-02-08

Applicant: Harald Rose

Inventor： Harald Rose

IPC: H01J4946

CPC classification number: H01J37/05 ,  H01J49/48

Abstract: The invention relates to an electron energy filter with magnetic deflection regions and a substantially W-shaped beam path. The energy filter has at least four magnetic deflection regions, that are respectively separated from each other by drift paths in the space free from magnetic fields. The whole filter is thus symmetrical with respect to a midplane (M). The total deflection angle in the first and last deflection region is at least 135°, and all the deflection regions together effect a deflection of the optical axis through an angle between 90° and 210°, preferably through 180°. The energy filter has a large Helmholtz length that is greater than double the average value of the deflection radii in the deflection regions.

公开(公告)号：US06541781B1

公开(公告)日：2003-04-01

申请号：US09625718

申请日：2000-07-25

Applicant: Victor M. Benveniste ,  John Ye ,  William F. DiVergilio

Inventor： Victor M. Benveniste ,  John Ye ,  William F. DiVergilio

IPC: G21K510

CPC classification number: H01J37/32678 ,  H01J37/05 ,  H01J37/3171

Abstract: An apparatus and method for providing a low energy, high current ion beam for ion implantation applications are disclosed. The apparatus includes a mass analysis magnet mounted in a passageway along the path of an ion beam, a power source adapted to provide an electric field in the passageway, and a magnetic device adapted to provide a multi-cusped magnetic field in the passageway, which may include a plurality of magnets mounted along at least a portion of the passageway. The power source and the magnets may cooperatively interact to provide an electron cyclotron resonance (ECR) condition along at least a portion of the passageway. The multi-cusped magnetic field may be superimposed on the dipole field at a specified field strength in a region of the mass analyzer passageway to interact with an electric field of a known RF or microwave frequency for a given low energy ion beam. The invention further comprises a mass analyzer waveguide adapted to couple the electric field to the beam plasma consistently along the length of the mass analyzer passageway to thereby improve the creation of the ECR condition. The invention thus provides enhancement of beam plasma within a mass analyzer dipole magnetic field for low energy ion beams without the introduction of externally generated plasma. The invention further includes a method of providing ion beam containment in a low energy ion implantation system, as well as an ion implantation system.

Abstract translation: 公开了一种用于提供用于离子注入应用的低能量高电流离子束的装置和方法。 该装置包括安装在沿着离子束的路径的通道中的质量分析磁体，适于在通道中提供电场的电源以及适于在通道中提供多通道磁场的磁性装置，其中 可以包括沿通道的至少一部分安装的多个磁体。 电源和磁体可以协同地相互作用以沿着通道的至少一部分提供电子回旋共振（ECR）状态。 多质量磁场可以在质量分析器通道的区域中以指定的场强叠加在偶极子场上，以与给定的低能离子束的已知RF或微波频率的电场相互作用。 本发明还包括质量分析器波导，其适于沿着质量分析器通道的长度一致地将电场耦合到束等离子体，从而改善ECR条件的产生。 因此，本发明在低能量离子束的质量分析器偶极磁场内提供束等离子体的增强，而不引入外部产生的等离子体。 本发明还包括一种在低能离子注入系统中提供离子束容纳的方法以及离子注入系统。

公开(公告)号：US06492644B1

公开(公告)日：2002-12-10

申请号：US09598612

申请日：2000-06-21

Applicant: Philippe Staib

Inventor： Philippe Staib

IPC: H01J4900

CPC classification number: H01J37/05 ,  H01J37/252

Abstract: A device for imaging a beam of particles composed of charged particles with a certain energy and angle distribution on a detector device using a device, including a deflection unit with at least one deceleration lens provided for forming essentially parallel particle paths in the particle beam, whose reciprocal distances correspond to the angle distribution of the particles, and a filtering unit, which is located between the deflection unit and the detector facility, whereby the filtering unit may be biased with a potential for formation of a braking field and is adapted to be energy-selectively permeable for the particles, on the sample side before the deflection unit, an entry window in the form of an axial-symmetrical staged aperture or an entry grid is located, which is electrically separated from the deflection unit and at ground potential.

Abstract translation: 一种用于使用装置在检测器装置上对具有一定能量和角度分布的带电粒子组成的粒子束进行成像的装置，该装置包括具有至少一个减速透镜的偏转单元，用于在粒子束中形成基本上平行的粒子路径， 互相距离对应于颗粒的角度分布，以及位于偏转单元和检测器设备之间的过滤单元，由此过滤单元可能被施加用于形成制动场的可能性，并且适于作为能量 - 对于颗粒，在偏转单元之前的样品侧是可选择地渗透的，位于轴向对称分段孔或入口栅格形式的入口窗处，其与偏转单元电接地并处于地电位。

公开(公告)号：US06441378B1

公开(公告)日：2002-08-27

申请号：US09585852

申请日：2000-06-01

Applicant: Katsushige Tsuno ,  Eric Munro ,  John Rouse

Inventor： Katsushige Tsuno ,  Eric Munro ,  John Rouse

IPC: G21K108

CPC classification number: H01J49/463 ,  H01J37/05 ,  H01J2237/055 ,  H01J2237/057

Abstract: A compact magnetic energy filter having at least four magnetic fields to deflect the trajectory of an electron beam from the entrance window to the exit slit. A rotational symmetry axis is located midway between the second and third magnetic fields. The magnetic fields on the opposite sides of the rotational symmetry axis are opposite in polarity.

Abstract translation: 一种具有至少四个磁场以将电子束从入口窗口的轨迹偏转到出口狭缝的紧凑型磁能过滤器。 旋转对称轴位于第二和第三磁场之间的中间位置。 旋转对称轴的相对侧的磁场极性相反。

公开(公告)号：US06437353B1

公开(公告)日：2002-08-20

申请号：US09453991

申请日：1999-12-02

Applicant: Gerd Benner

Inventor： Gerd Benner

IPC: H01J37153

CPC classification number: B82Y10/00 ,  B82Y40/00 ,  H01J37/05 ,  H01J37/3174

Abstract: The invention relates to a particle-optical apparatus for particle-optical mask projection. According to the invention, an energy filter is used, by which particles which are inelastically scattered in a mask plane are separated from particles which are elastically scattered in the mask plane. Particles from a selected energy range are used for the particle-optical imaging of the mask in the final image plane. The energy filter is an imaging energy filter, the mask plane being coincident with the input image plane of the energy filter or being imaged in it. The output image plane of the energy filter is imaged, reduced in scale, by a following imaging system on a wafer arranged in the projection plane. Beam deflection systems are provided in addition, by which the particle beam is deflectable in the mask plane and onto out-of-axis regions, so that different regions of the mask plane can be imaged in the image plane at successive times.

Abstract translation: 本发明涉及一种用于粒子光学掩模投影的粒子光学装置。 根据本发明，使用能量过滤器，通过其将在掩模平面中非弹性散射的颗粒与在掩模平面中弹性散射的颗粒分离。 来自所选能量范围的粒子用于最终图像平面中掩模的粒子光学成像。 能量过滤器是成像能量过滤器，掩模平面与能量过滤器的输入图像平面重合或被成像在其中。 通过在投影平面上布置的晶片上的随后的成像系统对能量滤波器的输出像平面成像，缩小比例。 此外还提供光束偏转系统，通过该光束，粒子束可以在掩模平面中偏转到轴外区域，使得掩模平面的不同区域可以在连续的时间在图像平面中成像。

公开(公告)号：US20010052744A1

公开(公告)日：2001-12-20

申请号：US09832298

申请日：2001-04-10

Applicant: JEOL Ltd.

Inventor： Katsushige Tsuno

IPC: H01J029/00

CPC classification number: H01J37/05

Abstract: A monochrometer mounted with the electron gun of an electron microscope or the like. This monochrometer does not need movement of a slit. An electron source consisting of any one of a thermal emission-type electron source (such as an LaB6 electron source or a tungsten hairpin), a Schottky emission-type electron source, and a tunneling field emission-type electron source is used. The slit is made of a single metal plate and mounted in position fixedly. Electrons are emitted from the electron source and dispersed within a plane including the slit according to energies. The slit is so positioned that it passes only those of the dispersed electrons which have energies close to the peak energy and blocks electrons having energies higher or lower than the peak energy.

Abstract translation: 安装有电子显微镜等的电子枪的单色仪。 该单色仪不需要狭缝的移动。 使用由热发射型电子源（例如LaB 6电子源或钨发夹）中的任一种，肖特基型发射型电子源和隧道场致发射型电子源构成的电子源。 狭缝由单个金属板制成并固定在一起。 电子从电子源发射并分散在根据能量的包括狭缝的平面内。 狭缝的定位使得其仅通过具有接近峰值能量的能量的分散电子的那些，并且阻挡具有高于或低于峰值能量的能量的电子。

公开(公告)号：US06310341B1

公开(公告)日：2001-10-30

申请号：US09253456

申请日：1999-02-22

Applicant: Hideo Todokoro ,  Tohru Ishitani ,  Yasutsugu Usami ,  Shunroku Taya ,  Hiroyuki Shinada ,  Taku Ninomiya ,  Tsuyoshi Ohnishi

Inventor： Hideo Todokoro ,  Tohru Ishitani ,  Yasutsugu Usami ,  Shunroku Taya ,  Hiroyuki Shinada ,  Taku Ninomiya ,  Tsuyoshi Ohnishi

IPC: H01J4944

CPC classification number: H01J37/28 ,  H01J37/05

Abstract: An irradiation electron beam emitted from an electron gun is deflected by an energy filter, and passes through a first projective lens and an objective lens, and then irradiated onto a sample to produce secondary electrons. The secondary electron beam accelerated by a negative voltage applied to the sample passes through the objective lens and the first projective lens, and deflected by the energy filter to be energy dispersed. Only the secondary electrons having a specified energy pass through energy selecting aperture, and further pass through a second projective lens to form a projected image of the secondary electrons on an imager. Such an electron-optical system may be used for dimension evaluation or inspection of semiconductor substrates.

Abstract translation: 从电子枪发射的照射电子束被能量过滤器偏转，并通过第一投射透镜和物镜，然后照射到样品上以产生二次电子。 施加到样品的负电压加速的二次电子束通过物镜和第一投射透镜，并被能量过滤器偏转以进行能量分散。 只有具有指定能量的二次电子通过能量选择孔，并且进一步通过第二投影透镜以在成像器上形成二次电子的投影图像。 这样的电子 - 光学系统可以用于半导体衬底的尺寸评估或检查。

公开(公告)号：US5449914A

公开(公告)日：1995-09-12

申请号：US218343

申请日：1994-03-25

Applicant: Harald Rose ,  Stephan Uhlemann ,  Eugen Weimer

Inventor： Harald Rose ,  Stephan Uhlemann ,  Eugen Weimer

IPC: G01Q30/02 ,  H01J37/05 ,  H01J37/26 ,  H01J49/44 ,  H01J49/46 ,  H01J37/14

CPC classification number: H01J37/05 ,  H01J49/46 ,  H01J2237/055 ,  H01J2237/057 ,  H01J2237/26

Abstract: The invention relates to an electron energy filter for electron microscopes as well as to an electron microscope equipped with such a filter. The filter comprises three sector magnets with the deflection field in the first sector magnet being homogeneous. The deflection field in each of the two other sector magnets is an inhomogeneous gradient field. To generate the gradient field, the pole pieces of the two other sector magnets have the form of segments of truncated double cones. The electron beam passes the first homogeneous sector magnet twice. Multipole elements are arranged in front of, behind and between the three sector magnets. The filter has a large dispersion also for high-energy electrons while at the same time providing a compact configuration. All second-order aberrations and the significant second-rank aberrations are corrected by means of the multiple elements.

Abstract translation: 本发明涉及一种用于电子显微镜的电子能量过滤器以及配有这种过滤器的电子显微镜。 滤波器包括三扇形磁体，其中第一扇形磁体中的偏转场是均匀的。 两个其他扇形磁体中的每一个中的偏转场是不均匀的梯度场。 为了产生梯度场，两个其他扇形磁体的极片具有截顶双锥段的形式。 电子束通过第一均匀扇形磁体两次。 多极元件布置在三个扇形磁体之前，后面和之间。 该滤波器对于高能电子也具有大的色散，同时提供紧凑的结构。 通过多个元素校正所有二阶像差和显着的二次像差。