公开(公告)号：US06586737B2

公开(公告)日：2003-07-01

申请号：US09773792

申请日：2001-02-01

Applicant: Toshikatsu Kaneyama

Inventor： Toshikatsu Kaneyama

IPC: H01J4944

CPC classification number: H01J37/26 ,  H01J37/05

Abstract: A transmission electron microscope (TEM) equipped with an energy filter which functions, the microscope being characterized in that rotation of the created image or diffraction pattern is prevented. The microscope has 6 lens systems, i.e., objective lens system, four intermediate lens systems, and projector lens system. If the mode of operation is varied, the total sum of the products of the numbers of turns of wire on the coils of the lenses of the various lens systems including the objective lens system, the four intermediate lens systems, and the projector lens system, and their respective excitation currents is kept constant.

公开(公告)号：US06720558B2

公开(公告)日：2004-04-13

申请号：US10056218

申请日：2002-01-24

Applicant: Toshikatsu Kaneyama

Inventor： Toshikatsu Kaneyama

IPC: H01J4944

CPC classification number: H01J37/26 ,  H01J37/05

Abstract: A transmission electron microscope (TEM) equipped with an energy filter, the microscope being characterized in that rotation of the created image or diffraction pattern is prevented. The microscope has 6 lens systems, i.e., an objective lens system, four intermediate lens systems, and a projector lens system. If the mode of operation is varied, the total sum of the products of the numbers of turns of wire on the coils of the lenses of the various lens systems including the objective lens system, the four intermediate lens systems, and the projector lens system, and their respective excitation currents is kept constant.

Abstract translation: 配备有能量过滤器的透射电子显微镜（TEM），显微镜的特征在于防止了所产生的图像或衍射图案的旋转。 显微镜具有6个透镜系统，即物镜系统，四个中间透镜系统和投影透镜系统。 如果操作模式改变，则包括物镜系统，四个中间透镜系统和投影透镜系统的各种透镜系统的透镜的线圈的线圈数的乘积的总和， 并且它们各自的激励电流保持恒定。

公开(公告)号：US06310341B1

公开(公告)日：2001-10-30

申请号：US09253456

申请日：1999-02-22

Applicant: Hideo Todokoro ,  Tohru Ishitani ,  Yasutsugu Usami ,  Shunroku Taya ,  Hiroyuki Shinada ,  Taku Ninomiya ,  Tsuyoshi Ohnishi

Inventor： Hideo Todokoro ,  Tohru Ishitani ,  Yasutsugu Usami ,  Shunroku Taya ,  Hiroyuki Shinada ,  Taku Ninomiya ,  Tsuyoshi Ohnishi

IPC: H01J4944

CPC classification number: H01J37/28 ,  H01J37/05

Abstract: An irradiation electron beam emitted from an electron gun is deflected by an energy filter, and passes through a first projective lens and an objective lens, and then irradiated onto a sample to produce secondary electrons. The secondary electron beam accelerated by a negative voltage applied to the sample passes through the objective lens and the first projective lens, and deflected by the energy filter to be energy dispersed. Only the secondary electrons having a specified energy pass through energy selecting aperture, and further pass through a second projective lens to form a projected image of the secondary electrons on an imager. Such an electron-optical system may be used for dimension evaluation or inspection of semiconductor substrates.

Abstract translation: 从电子枪发射的照射电子束被能量过滤器偏转，并通过第一投射透镜和物镜，然后照射到样品上以产生二次电子。 施加到样品的负电压加速的二次电子束通过物镜和第一投射透镜，并被能量过滤器偏转以进行能量分散。 只有具有指定能量的二次电子通过能量选择孔，并且进一步通过第二投影透镜以在成像器上形成二次电子的投影图像。 这样的电子 - 光学系统可以用于半导体衬底的尺寸评估或检查。

公开(公告)号：US06407384B1

公开(公告)日：2002-06-18

申请号：US09610126

申请日：2000-07-05

Applicant: Michiyoshi Tanaka ,  Masami Terauchi ,  Katsushige Tsuno ,  Toshikazu Honda

Inventor： Michiyoshi Tanaka ,  Masami Terauchi ,  Katsushige Tsuno ,  Toshikazu Honda

IPC: H01J4944

CPC classification number: H01J37/05

Abstract: There is disclosed an energy filter capable of reducing the Boersch effect. Also, an electron microscope using this energy filter is disclosed. This energy filter is composed of a first-stage energy filter and a second-stage energy filter arranged along the optical axis of an electron beam. The length L1 of the first-stage filter is selected to be greater than the length L2 of the second-stage filter. An energy-selecting slit is positioned in the electron beam path within the free space between the first- and second-stage filters. Each of these two stages of filters is a Wien filter having mutually perpendicular electric and magnetic fields.

Abstract translation: 公开了能够降低Boersch效应的能量过滤器。 此外，公开了使用该能量过滤器的电子显微镜。 该能量滤波器由沿着电子束的光轴布置的第一级能量滤波器和第二级能量滤波器组成。 第一级滤波器的长度L1被选择为大于第二级滤波器的长度L2。 能量选择狭缝位于第一和第二级过滤器之间的自由空间内的电子束路径中。 这两级滤波器中的每一个都是具有相互垂直的电场和磁场的维恩滤波器。