公开(公告)号：US08390037B2

公开(公告)日：2013-03-05

申请号：US12983866

申请日：2011-01-03

申请人： Christoph Senft

发明人： Christoph Senft

IPC分类号： G01N27/403

CPC分类号： G01N27/4143

摘要： A gas sensor having at least one gas-sensitive electrically conductive layer having a surface region which can be brought into contact with a target gas and in which the work function depends on the concentration of the target gas in contact therewith. At least one electrical potential sensor is capacitively coupled to the surface region via an air gap. The surface region is structured by at least one recess in which a flat material element which is connected to the gas-sensitive layer in an electrically conductive manner is arranged, the material of the material element differing from that of the gas-sensitive layer and comprising a metal and/or a metal-containing chemical compound.

摘要翻译： 一种气体传感器，其具有至少一个气敏导电层，其具有能够与目标气体接触的表面区域，其中功函数取决于与其接触的目标气体的浓度。 至少一个电位传感器通过气隙电容耦合到表面区域。 表面区域由至少一个凹部构成，其中布置以导电方式连接到气敏层的平坦材料元件，材料元素的材料与气敏层的材料不同，并且包括 金属和/或含金属的化合物。

公开(公告)号：US20120001615A1

公开(公告)日：2012-01-05

申请号：US13174465

申请日：2011-06-30

申请人： Peter LEVINE

发明人： Peter LEVINE

IPC分类号： G01N27/00

CPC分类号： G01N27/4148 ,  C12Q1/6869 ,  G01J1/46 ,  G01N27/4143 ,  G01N27/4145 ,  G01N33/00 ,  G01R29/26 ,  H01L27/14609 ,  H01L27/14632 ,  H01L27/14643 ,  H01L29/66 ,  H01L2924/0002 ,  H04N5/374 ,  Y10T436/25875 ,  H01L2924/00

摘要： The described embodiments may provide a chemical detection circuit with an improved signal-to-noise ration. The chemical detection circuit may include a current source, a chemical detection pixel, an amplifier and a capacitor. The chemical detection pixel may comprise a chemical-sensitive transistor that may have a first and second terminals and a row-select switch coupled between the current source and chemically-sensitive transistor. The amplifier may have a first input and a second input, with the first input coupled to an output of the chemically-sensitive transistor via a switch and the second input coupled to an offset voltage line. The capacitor may be coupled between an output of the amplifier and the first input of the amplifier. The capacitor and amplifier may form an integrator and may be shared by a column of chemical detection pixels.

摘要翻译： 所描述的实施例可以提供具有改进的信噪比的化学检测电路。 化学检测电路可以包括电流源，化学检测像素，放大器和电容器。 化学检测像素可以包括可以具有第一和第二端子的化学敏感晶体管和耦合在电流源和化学敏感晶体管之间的行选择开关。 放大器可以具有第一输入和第二输入，其中第一输入经由开关耦合到化学敏感晶体管的输出，并且第二输入耦合到偏移电压线。 电容器可以耦合在放大器的输出端和放大器的第一输入端之间。 电容器和放大器可以形成积分器，并且可以被一列化学检测像素共享。

公开(公告)号：US07707869B2

公开(公告)日：2010-05-04

申请号：US11587172

申请日：2005-04-21

申请人： Maximilian Fleischer ,  Hans Meixner ,  Elfriede Simon ,  Uwe Lampe ,  Roland Pohle

发明人： Maximilian Fleischer ,  Hans Meixner ,  Elfriede Simon ,  Uwe Lampe ,  Roland Pohle

IPC分类号： G01N33/00 ,  B01L5/00

CPC分类号： G01N33/0013 ,  G01N27/4143

摘要： An operating method is disclosed for the selective detection of a target gas in a gas mixture to be measured by a field effect transistor with a gas-sensitive layer disposed on a carrier substrate, wherein the gas mixture to be measured is prepared by an electrochemical element such that the measured gas mixture includes minimal amounts of interfering gases that interfere with the measurement of the target gas, and/or at least one target gas is activated such that it is detected by the gas-sensitive layer.

摘要翻译： 公开了一种操作方法，用于选择性地检测待由气体敏感层设置在载体基底上的场效应晶体管测量的气体混合物中的目标气体，其中待测量的气体混合物由电化学元素 使得测量的气体混合物包括干扰目标气体测量的最小量的干扰气体，和/或至少一个目标气体被激活，使得其被气敏层检测到。

公开(公告)号：US20090078026A1

公开(公告)日：2009-03-26

申请号：US12142292

申请日：2008-06-19

申请人： Christoph Wilbertz ,  Heinz-Peter Frerichs

发明人： Christoph Wilbertz ,  Heinz-Peter Frerichs

IPC分类号： G01N27/00

CPC分类号： G01N27/4143

摘要： A gas sensor has at least one gas sensitive layer, which has at least one surface area in which the work function is dependent upon the concentration of a target gas capable of being brought into contact with the surface zone. At least one electric potential sensor is capacitatively coupled to the surface zone over an air gap. The surface zone of the gas sensitive layer is covered with an electrically insulating coating which is inert to the target gas and which is adhesively bound to the gas sensitive layer. The coating is configured so that it is permeable to the target gas and so that when the target gas contacts the surface zone of the gas sensitive layer, it prevents or at least impedes an alteration of the bound state of atoms and/or molecules bound to the surface zone and differing from the target gas.

摘要翻译： 气体传感器具有至少一个气体敏感层，其具有至少一个表面积，其中功函数取决于能够与表面区域接触的目标气体的浓度。 至少一个电位传感器通过气隙电容耦合到表面区域。 气体敏感层的表面区域被对目标气体呈惰性的电绝缘涂层覆盖，并且粘合到气敏层上。 涂层被配置成使得其对目标气体是可渗透的，并且当目标气体接触气敏层的表面区域时，其防止或至少阻止了结合到的原子和/或分子的结合状态的改变 表面区域和目标气体不同。

公开(公告)号：US07326974B2

公开(公告)日：2008-02-05

申请号：US10719648

申请日：2003-11-21

申请人： Heinz-Peter Frerichs

发明人： Heinz-Peter Frerichs

IPC分类号： H01L23/58

CPC分类号： G01N27/4143

摘要： A field-effect transistor used as a sensor for measuring a gas or ion concentration utilizes a surface structure such as rings along with surface profiling, for example elevations of the rings and depressions therebetween, to decrease the surface conductivity between a guard ring and the FET, to thereby increase the concentration rise per unit time of a gas signal and increase the time for a potential on a channel region of the FET to approximate the potential on a guard ring. The rings, which may be arranged around the FET structure, may be defined by a surface material different from the remaining surface material and thus having different surface conductivities. The surface profiling, together with the rings, can be utilized to increase an amount of time that may describe the equalization of the channel region potential to the guard ring potential. The elevations may have a surface conductivity different from, for example smaller than, that of the depressions. The surface profiling may be formed by forming the elevations on a thick oxide layer and spaced a distance apart. The annular structures arranged on the thick oxide layer and defined by a surface material different from the remaining surface material may have different surface conductivities and thus may form different, for example higher, contact resistances.

摘要翻译： 用作测量气体或离子浓度的传感器的场效应晶体管利用诸如环的表面结构以及表面轮廓，例如其间的环和凹陷的升高，以降低保护环和FET之间的表面电导率 ，从而增加气体信号的每单位时间的浓度上升，并增加FET的沟道区上的电位接近保护环上的电位的时间。 可以围绕FET结构布置的环可以由与其余表面材料不同的表面材料限定，因此具有不同的表面电导率。 表面轮廓与环一起可以用于增加可描述通道区域电位到保护环电位的均衡的时间量。 高度可以具有不同于例如凹陷的表面电导率的表面电导率。 表面轮廓可以通过在厚氧化物层上形成高度并且间隔开一定距离而形成。 布置在厚氧化层上并由与剩余表面材料不同的表面材料限定的环形结构可以具有不同的表面电导率，并且因此可以形成不同的，例如更高的接触电阻。

公开(公告)号：US20080016949A1

公开(公告)日：2008-01-24

申请号：US11587173

申请日：2005-04-22

申请人： Maximillian Fleischer ,  Uwe Lampe ,  Hans Meixner ,  Roland Pohle ,  Elfriede Simon

发明人： Maximillian Fleischer ,  Uwe Lampe ,  Hans Meixner ,  Roland Pohle ,  Elfriede Simon

IPC分类号： G01N7/00 ,  G01N33/00

CPC分类号： G01N27/4143 ,  G01N33/006

摘要： A gas sensor based on a field effect transistor (“FET”) evaluates both a change in work function of a gas-sensitive layer of the FET and a change in the capacitance of the layer. Thus, two physically independent signals are read from the gas-sensitive layer, each signal representing a sensitivity to a different gas. This reduces the effect of cross-sensitivities; that is, of one gas on the target gas. The underlying physical mechanisms, the first causing a change in the work function in a reaction with gases and the second causing a change in the capacitance of the sensitive layer, are widely different. Because of this, the two parameters demonstrate different gas sensitivities. If the reactions to both gases are known, the effect of the interfering gas on the sensor signal can be compensated for, and with this the concentration of the target gas can be determined.

摘要翻译： 基于场效应晶体管（“FET”）的气体传感器评估FET的气敏层的功函数变化和层的电容变化。 因此，从气体敏感层读取两个物理独立的信号，每个信号表示对不同气体的敏感性。 这降低了交叉敏感性的影响; 也就是目标气体上的一种气体。 潜在的物理机制，首先引起与气体反应的功函数的变化，第二个导致敏感层的电容变化的物理机制是不同的。 因此，这两个参数表现出不同的气体敏感性。 如果对两种气体的反应是已知的，则可以补偿干扰气体对传感器信号的影响，并且可以确定目标气体的浓度。

公开(公告)号：US20070262358A1

公开(公告)日：2007-11-15

申请号：US10588559

申请日：2005-02-01

申请人： Markus Burgmair ,  Ignaz Eisele ,  Thorsten Knittel

发明人： Markus Burgmair ,  Ignaz Eisele ,  Thorsten Knittel

IPC分类号： H01L29/68 ,  G01N27/414 ,  H01L21/336

CPC分类号： G01L9/0073 ,  G01N27/4143 ,  G01N33/005 ,  G01P15/08 ,  G01P15/0802 ,  H01L2924/0002 ,  H01L2924/00

摘要： The invention concerns a sensor with silicon-containing components from whose sensitive detection element electrical signals relevant to a present analyte can be read out by means of a silicon semiconductor system. The invention is characterized in that the silicon-containing components are covered with a layer made of hydrophobic material in order to prevent unwanted signals caused by moisture.

摘要翻译： 本发明涉及一种具有含硅组分的传感器，其敏感检测元件与本分析物相关的电信号可通过硅半导体系统读出。 本发明的特征在于，用疏水材料制成的层覆盖含硅组分，以防止由水分引起的不必要的信号。

公开(公告)号：US06929728B2

公开(公告)日：2005-08-16

申请号：US10121935

申请日：2002-04-12

申请人： Heinz-Peter Frerichs

发明人： Heinz-Peter Frerichs

IPC分类号： G01N27/414

CPC分类号： G01N27/4143

摘要： The invention relates to a sensor for measuring a gas concentration or ion concentration which has a substrate (11), a drain (3) formed on the substrate, a source (2) formed on the substrate, a channel area (4) of the substrate located between drain (3) and source (2), a conductive guard ring (1) located outside the channel area, and a sensitive gate layer (8) whose potential depends on the surrounding gas or ion concentration, with an air gap (10) provided between the gate layer and channel area (4). In order to create a sensor that can be made economically and compactly which nevertheless ensures exact measurement of a change in concentration with time, it is provided that surface profiling (7 and 12) be formed between guard ring (1) and channel area (4).

摘要翻译： 本发明涉及一种用于测量气体浓度或离子浓度的传感器，其具有衬底（11），形成在衬底上的漏极（3），形成在衬底上的源极（2） 位于漏极（3）和源极（2）之间的衬底，位于沟道区域外部的导电保护环（1）和电位取决于周围气体或离子浓度的敏感栅极层（8）与气隙（ 设置在栅极层和沟道区域（4）之间。 为了创建可以经济且紧凑地制造的传感器，其仍能确保精确测量浓度随时间的变化，在保护环（1）和通道区域（4）之间形成表面轮廓（7和12） ）。

公开(公告)号：US20040025568A1

公开(公告)日：2004-02-12

申请号：US10422713

申请日：2003-04-25

发明人： Maximilian Fleischer ,  Hans Meixner ,  Bernhard Ostrick ,  Roland Pohle ,  Elfriede Simon ,  Martin Zimmer

IPC分类号： G01N027/26

CPC分类号： G01N33/0039 ,  G01N27/4143 ,  Y02A50/247

摘要： The invention relates to an ozone sensor having an ozone-sensitive layer containing an ozone-sensitive material which is encapsulated in a polymer or in a polymer mixture or is coated by at least one polymer or polymer mixture. Advantages result from a longer service life of the ozone-sensitive materials which, because of their high hygroscopic properties, would not be stable without encapsulation or coating. Furthermore, a polymer matrix can be selectively used as a filter or in order to eliminate interfering influences.

摘要翻译： 本发明涉及一种具有臭氧敏感层的臭氧传感器，该臭氧敏感层包含臭氧敏感材料，该臭氧敏感层被封装在聚合物或聚合物混合物中或由至少一种聚合物或聚合物混合物涂覆。 优点是由于其具有高吸湿性能的臭氧敏感材料的使用寿命更长，在不进行包封或涂覆的情况下将不稳定。 此外，聚合物基质可以选择性地用作过滤器或为了消除干扰影响。

公开(公告)号：US5683569A

公开(公告)日：1997-11-04

申请号：US608357

申请日：1996-02-28

申请人： Young Sir Chung ,  Keenan L. Evans

发明人： Young Sir Chung ,  Keenan L. Evans

IPC分类号： G01N27/12 ,  G01N27/27 ,  G01N27/414 ,  G01N27/26

CPC分类号： G01N27/4143

摘要： A sensor (10) includes a gate electrode (20) overlying a channel region (34). A gap (22) between the gate electrode (20) and the channel region (34) allows a surface (28) of the gate electrode (20) to be exposed to a chemical. Upon exposure to the chemical, a surface potential or an electrical impedance of the gate electrode (20) may change. Comparing the changes in surface potential versus the changes in electrical impedance provides a method to distinguish between similar chemical species and also to extend the detection range of the sensor (10).

摘要翻译： 传感器（10）包括覆盖通道区域（34）的栅电极（20）。 栅电极（20）与沟道区（34）之间的间隙（22）允许栅极（20）的表面（28）暴露于化学物质。 在暴露于化学品时，栅电极（20）的表面电位或电阻抗可能改变。 比较表面电位与电阻抗变化的变化提供了区分类似化学物质的方法，并扩展了传感器（10）的检测范围。