发明授权
- 专利标题: Gas sensor
- 专利标题(中): 气体传感器
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申请号: US12983866申请日: 2011-01-03
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公开(公告)号: US08390037B2公开(公告)日: 2013-03-05
- 发明人: Christoph Senft
- 申请人: Christoph Senft
- 申请人地址: DE Freiburg I.BR.
- 专利权人: Micronas GmbH
- 当前专利权人: Micronas GmbH
- 当前专利权人地址: DE Freiburg I.BR.
- 代理机构: Muncy, Geissler Olds & Lowe, PLLC
- 优先权: EP08011919 20080702
- 主分类号: G01N27/403
- IPC分类号: G01N27/403
摘要:
A gas sensor having at least one gas-sensitive electrically conductive layer having a surface region which can be brought into contact with a target gas and in which the work function depends on the concentration of the target gas in contact therewith. At least one electrical potential sensor is capacitively coupled to the surface region via an air gap. The surface region is structured by at least one recess in which a flat material element which is connected to the gas-sensitive layer in an electrically conductive manner is arranged, the material of the material element differing from that of the gas-sensitive layer and comprising a metal and/or a metal-containing chemical compound.
公开/授权文献
- US20110163353A1 GAS SENSOR 公开/授权日:2011-07-07
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