摘要:
A helium management control system for controlling the helium refrigerant supply from a common manifold supplies cryogenic refrigerators with an appropriate helium supply. The system employs sensors to monitor and regulate the overall refrigerant supply to deliver an appropriate refrigerant supply to each of the cryogenic refrigerators depending on the computed aggregate cooling demand of all of the cryogenic refrigerators. An appropriate supply of helium is distributed to each cryopump by sensing excess and sparse helium and redistributing refrigerant accordingly. If the total refrigeration supply exceeds the demand, or consumption, excess refrigerant is directed to cryogenic refrigerators which can utilize the excess helium to complete a current cooling function more quickly. If the total refrigeration demand exceeds the total refrigeration supply, the refrigerant supply to some or all of the cryogenic refrigerators will be reduced accordingly so that detrimental or slowing effects are minimized based upon the current cooling function.
摘要:
A cryogenic refrigeration apparatus includes a compressor, a plurality of refrigerators, and a gas line configured to connect the plurality of refrigerators to the compressor in parallel so as to circulate a working gas between each of the plurality of refrigerators and the compressor. The gas line may include a flow rate control valve capable of individually controlling a pressure drop of a flow of working gas in a corresponding one of the plurality of refrigerators. The flow rate control valve may be provided in series with the corresponding refrigerator.
摘要:
A vacuum device comprises a plurality of cryopumps (10) connected with one or a plurality of vacuum chambers. The cryopumps (10) are connected via media supply conduits (12) and media return conduits (14) with a compressor (16). An adjusting device (18) is connected before at least one of the cryopumps for controlling the amount of media fed to the cryopump. Further, the cryopumps (10) comprise a temperature measuring device. The temperature measuring device and the adjusting device (18) are connected with a controller (28). To allow the desired amount of media to be fed to the cryopumps (10), the adjusting device (18) comprises a throttle (24) in a media supply conduit (12) and a controllable valve in a throttle bypass conduit (22).
摘要:
A stationary point is set on a cold end of a cryocooler. An article is mounted on the stationary point to be cooled via the stationary point. In this case, the article can be cooled up to an extremely low temperature with isolation of vibration to the article.
摘要:
A multi-type pulse-tube refrigerating system includes a common compressor 1 having a sucking port 1b and a discharging port 1a, a plurality of paralleled pressure changeover valve units 21, 22 and 23 connecting between the sucking port 1b and the discharging port 1a of the compressor 1, and a plurality of pulse-tube based cryogenic temperature generating devices 310, 410 and 510 connected to the respective pressure changeover valve units 21, 22 and 23. Employing such cryogenic temperature generating devices 310, 410 and 510, each of which is void of moving parts, limits vibrations. Moreover, instead of the pressure changeover valve units 21, 22 and 23, employing a common pressure changeover valve unit 24 for the units 21, 22 and 23 makes the refrigerating system more compact.
摘要:
A cryogenic refrigerator includes a shell having a reciprocative displacer and an adsorbent mounted within the shell. In one embodiment, the displacer contains both a regenerative media and the adsorbent, with the regenerative media placed between the adsorbent and a cold end of the displacer. In a method for removing contaminants from the reciprocative displacer, compressed and expanded helium gas is displaced through the displacer, with the adsorbent positioned to adsorb contaminant gases entrained in the helium gas. In another method, a filtering refrigerator containing an adsorbent is coupled to a helium circuit of a refrigeration system to remove contaminants from the circuit.
摘要:
A vacuum vessel has a member to be cooled to a low operating temperature inside the vacuum vessel and a main cooling circuit having fluid for cooling the member to operating temperature. The main cooling circuit has first fluid refrigerating means located at the vacuum vessel. To achieve rapid cooling, there is a pre-cooling circuit having the fluid for pre-cooling the member towards the operating temperature. The pre-cooling circuit has second fluid refrigerating means operating independently of the first fluid refrigerating means. The pre-cooling circuit cools the main cooling circuit, prior to operation of the main cooling circuit, by passage of the fluid from the pre-cooling circuit into the main cooling circuit. A heat shield cooling circuit for cooling a heat shield cools the second fluid refrigerating means of the pre-cooling circuit.
摘要:
A helium management control system for controlling the helium refrigerant supply from a common manifold supplies cryogenic refrigerators with an appropriate helium supply. The system employs sensors to monitor and regulate the overall refrigerant supply to deliver an appropriate refrigerant supply to each of the cryogenic refrigerators depending on the computed aggregate cooling demand of all of the cryogenic refrigerators. An appropriate supply of helium is distributed to each cryopump by sensing excess and sparse helium and redistributing refrigerant accordingly. If the total refrigeration supply exceeds the demand, or consumption, excess refrigerant is directed to cryogenic refrigerators which can utilize the excess helium to complete a current cooling function more quickly. If the total refrigeration demand exceeds the total refrigeration supply, the refrigerant supply to some or all of the cryogenic refrigerators will be reduced accordingly so that detrimental or slowing effects are minimized based upon the current cooling function.
摘要:
A helium management control system for controlling the helium refrigerant supply from a common manifold supplies a plurality of cryogenic refrigerators with an appropriate helium supply. The system employs a plurality of sensors to monitor and regulate the overall refrigerant supply to deliver an appropriate refrigerant supply to each of the cryogenic refrigerators depending on the computed aggregate cooling demand of all of the cryogenic refrigerators. An appropriate supply of helium is distributed to each cryopump by sensing excess and sparse helium refrigerant and redistributing refrigerant accordingly. If the total refrigeration supply exceeds the total refrigerant demand, or consumption, excess refrigerant is directed to cryogenic refrigerators which can utilize the excess helium to complete a current cooling function more quickly. Similarly, if the total refrigeration demand exceeds the total refrigeration supply, the refrigerant supply to some or all of the cryogenic refrigerators will be reduced accordingly so that detrimental or slowing effects are minimized based upon the current cooling function.
摘要:
A stationary point is set on a cold end of a cryocooler. An article is mounted on the stationary point to be cooled via the stationary point. In this case, the article can be cooled up to an extremely low temperature with isolation of vibration to the article.