Storage system and method for operating storage system based on buffer utilization

    公开(公告)号:US11755241B2

    公开(公告)日:2023-09-12

    申请号:US17548889

    申请日:2021-12-13

    Inventor: Junbum Park

    Abstract: A storage device includes a buffer memory configured to temporarily store data; a plurality of nonvolatile memory devices; a storage controller circuit configured to generate buffer memory status information by monitoring a status of the buffer memory and operating in a congestion control mode of setting a buffer memory data transmission authority of a nonvolatile memory based on the generated buffer memory status information; and a first interface circuit configured to communicate with the storage controller circuit and the plurality of nonvolatile memory devices, wherein the first interface circuit is connected to a network based on an Ethernet interface.

    Semiconductor substrate measuring apparatus and plasma treatment apparatus using the same

    公开(公告)号:US11488875B2

    公开(公告)日:2022-11-01

    申请号:US16847727

    申请日:2020-04-14

    Abstract: A semiconductor substrate measuring apparatus includes a light source to generate irradiation light having a sequence of on/off at a predetermined interval, the light source to provide the irradiation light to a chamber with an internal space for processing a semiconductor substrate using plasma, an optical device between the light source and the chamber, the optical device to split a first measurement light into a first optical path, condensed while the light source is turned on, to split a second measurement light into a second optical path, condensed while the light source is turned off, and to synchronize with the on/off sequence, and a photodetector connected to the first and second optical paths, the photodetector to subtract spectra of first and second measurement lights to detect spectrum of reflected light, and to detect plasma emission light emitted from the plasma based on the spectrum of the second measurement light.

    PROBE FOR DETECTING NEAR FIELD AND NEAR-FIELD DETECTING SYSTEM INCLUDING THE SAME

    公开(公告)号:US20220155340A1

    公开(公告)日:2022-05-19

    申请号:US17488657

    申请日:2021-09-29

    Abstract: Provided is a probe configured to detect a near field, the probe including a probe substrate having a tip region at an end portion of the probe substrate, a width of the tip region being less than a width of a remaining region of the probe substrate, a first electrode and a second electrode disposed on a surface of the probe substrate, the first electrode and the second electrode being spaced apart from each other and extending from the tip region along the probe substrate, an emitter and a detector disposed between the first electrode and the second electrode, the emitter and the detector being spaced apart from each other in a direction in which the probe substrate extends, and being configured to be photo switched, and a reflector disposed above the emitter and the detector in the direction in which the probe substrate extends opposite to the tip region, and configured to reflect an electromagnetic wave emitted from the emitter.

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