PHOTOMASK AND METHOD OF FORMING FINE PATTERN USING THE SAME
    12.
    发明申请
    PHOTOMASK AND METHOD OF FORMING FINE PATTERN USING THE SAME 审中-公开
    照相机和使用其形成精细图案的方法

    公开(公告)号:US20160170295A1

    公开(公告)日:2016-06-16

    申请号:US14671822

    申请日:2015-03-27

    CPC classification number: G03F1/54 G03F7/2024 G03F7/203

    Abstract: A photomask is provided. A photomask, comprising: a transparent substrate; and a plurality of filter layers disposed on the transparent substrate, wherein the filter layers include a first filter layer, which selectively transmits first-wavelength light therethrough, and a second filter layer, which selectively transmits second-wavelength light therethrough.

    Abstract translation: 提供光掩模。 一种光掩模,包括:透明基板; 以及设置在所述透明基板上的多个滤光层,其中所述滤光层包括选择性地透射第一波长光的第一滤光层以及选择性地透过第二波长光的第二滤光层。

    OPTICAL MASK FOR FORMING PATTERN
    13.
    发明申请
    OPTICAL MASK FOR FORMING PATTERN 有权
    用于形成图案的光学掩模

    公开(公告)号:US20140162177A1

    公开(公告)日:2014-06-12

    申请号:US14180234

    申请日:2014-02-13

    CPC classification number: G03F1/32 G03F1/38

    Abstract: An optical mask for forming a pattern is provided. The optical mask includes: a substrate including a light blocking pattern formed on portions of the substrate, wherein the light blocking pattern includes a halftone layer and a light blocking layer formed on the halftone layer, and the halftone layer and the light blocking layer overlap such that at least an edge portion of the halftone layer is exposed. A pitch of the light blocking pattern may about 6 μm, and a transmission ratio of the halftone layer may range from about 10% to about 50%.

    Abstract translation: 提供了用于形成图案的光学掩模。 光掩模包括:基板,其包括形成在基板的部分上的遮光图案,其中遮光图案包括形成在半色调层上的半色调层和遮光层,并且半色调层和遮光层与该重叠部分重叠 至少露出半色调层的边缘部分。 遮光图案的间距可以为约6μm,并且网版层的透射率可以在约10%至约50%的范围内。

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