公开(公告)号：US20220255049A1

公开(公告)日：2022-08-11

申请号：US17452279

申请日：2021-10-26

Applicant: Samsung Display Co., Ltd.

Inventor： YOUNGMIN MOON ,  MINHO MOON ,  JI-HEE SON ,  SEUNGYONG SONG ,  SUNGSOON IM ,  JUNHO JO

IPC: H01L51/56 ,  C23C14/04 ,  C23C14/24 ,  B23K26/244 ,  B23K26/364

Abstract: Provided is a mask including a mask frame including a base part in which cell openings are defined, and a coating part surrounding edges of the cell openings, covering at least a portion of an upper surface of the base part, and including a materials that is different from that of the base part, and unit masks on the mask frame, respectively corresponding to the cell openings, including a material that is different from that of the coating part, and in which openings are defined.

公开(公告)号：US20220026813A1

公开(公告)日：2022-01-27

申请号：US17198469

申请日：2021-03-11

Applicant: Samsung Display Co., Ltd.

Inventor： JUNHO JO ,  YOUNGHO PARK ,  SEUNGYONG SONG ,  YOUNGCHUL LEE ,  YOUNGSUCK CHOI

IPC: G03F7/20

Abstract: A mask chuck may include a base plate including a central region and an edge region surrounding the central region, a head part including a first surface connected to the edge region of the base plate and configured to move on the edge region to be close to the central region or away from the central region, and a pad part disposed on a second surface of the head part opposite to the first surface of the head part. The edge region may include a first edge region extending in a first direction, a second edge region extending in the first direction and spaced apart from the first edge region in a second direction crossing the first direction, a third edge region extending in the second direction, and a fourth edge region extending in the second direction and spaced apart from the third edge region in the first direction.

公开(公告)号：US20220025507A1

公开(公告)日：2022-01-27

申请号：US17197300

申请日：2021-03-10

Applicant: Samsung Display Co., Ltd.

Inventor： JUNHO JO ,  YOUNGHO PARK ,  SEUNGYONG SONG ,  YOUNGCHUL LEE ,  YOUNGSUCK CHOI

IPC: C23C14/04

Abstract: A method for manufacturing a mask includes providing, on a stage, a mask frame in which a plurality of cell openings is defined; providing each of the cell openings with a cell mask material in which a second area and a plurality of first areas are defined, where the second area is disposed around each of the first areas; emitting a laser beam to the second area to harden the second area; and removing the first areas, thereby forming a plurality of cell masks disposed in the cell openings, respectively.

公开(公告)号：US20220010421A1

公开(公告)日：2022-01-13

申请号：US17217489

申请日：2021-03-30

Applicant: Samsung Display Co., Ltd.

Inventor： YOUNGMIN MOON ,  MINHO MOON ,  SUNGSOON IM ,  JUNHO JO ,  SEUNGYONG SONG

IPC: C23C14/04 ,  H01L51/00

Abstract: A mask assembly includes a mask frame through which a plurality of openings is defined and a plurality of cell masks disposed to respectively correspond to the cell openings. Each of the cell masks includes a mask main body substantially parallel to a plane defined by a first direction and a second direction crossing the first direction, where a plurality of holes is defined through the mask main body, a bonding portion disposed along an edge of the mask main body, and a tensile portion extending from the bonding portion and disposed spaced apart from the mask main body. The tensile portion includes first tensile portions spaced apart from each other in the first direction and disposed at opposite sides of the mask main body and second tensile portions spaced apart from each other in the second direction and disposed at opposite sides of the mask main body.