公开(公告)号：US10527556B2

公开(公告)日：2020-01-07

申请号：US15795592

申请日：2017-10-27

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Min-Ho Rim ,  Jung-Soo Kim ,  Young-Hoon Sohn ,  Yu-Sin Yang ,  Chung-Sam Jun ,  Yun-Jung Jee

IPC: G01N21/88 ,  H01L21/28 ,  G01N21/95 ,  G06T7/00 ,  H01L27/11556 ,  H01L21/66 ,  G02B27/09 ,  H01L27/11582 ,  G02B5/00

Abstract: An optical measuring method includes generating a Bessel beam, filtering the Bessel beam to generate a focused Bessel beam, vertically irradiating the focused Bessel beam onto a substrate in which an opening is formed, and detecting light reflected from the substrate to obtain an image of a bottom surface of the opening.

公开(公告)号：US09831626B2

公开(公告)日：2017-11-28

申请号：US14872228

申请日：2015-10-01

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Sung-Yoon Ryu ,  Woo-Seok Ko ,  Yu-Sin Yang ,  Sang-Kil Lee ,  Chung-Sam Jun ,  Seong-Jin Yun

IPC: H01S3/00 ,  G01N21/88 ,  G01N21/956

CPC classification number: H01S3/0071 ,  G01N21/8806 ,  G01N21/956

Abstract: A broadband light source includes a first electrodeless lamp to generate first broadband light from plasma, a first elliptical reflector having first and second focuses, the first elliptical reflector enclosing a rear portion of the first electrodeless lamp positioned at the first focus of the first elliptical reflector such that the first broadband light is reflected from the first elliptical reflector toward a light collector as a collective light, a symmetrically curved reflector having a third focus, the symmetrically curved reflector positioned such that the third focus is coincident with one of the first and second focuses, and a laser irradiator to provide a laser beam to the first electrodeless lamp.