公开(公告)号：US20160258878A1

公开(公告)日：2016-09-08

申请号：US15055292

申请日：2016-02-26

Applicant: KLA-Tencor Corporation

Inventor： Shiyu Zhang ,  Wei Zhao

IPC: G01N21/88 ,  G01N21/95

CPC classification number: G01N21/8806 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/8845 ,  G02B13/143 ,  G02B17/0652 ,  G03F1/84 ,  G03F7/7065

Abstract: Disclosed are methods and apparatus for reflecting, towards a sensor, an Infrared to vacuum ultra-violet (VUV) light that is reflected from a target substrate. The system includes a first mirror arranged to receive and reflect the Infrared to VUV light that is reflected from the target substrate and a second mirror arranged to receive and reflect Infrared to VUV light that is reflected by the first mirror. The first and second mirrors are arranged and shaped so as to reflect Infrared to VUV light from the target substrate towards an optical axis of the apparatus. In another embodiment, the apparatus can also include a third mirror arranged to receive and reflect the Infrared to VUV light that is reflected by the second mirror and a fourth mirror arranged to receive and reflect such illuminating light that is reflected by the third mirror towards the sensor. In one more embodiment, a reflecting or refracting optics is used to relay the image by above optics to the sensor; various magnification is achieved by adjusting the distance between the intermediate image and the relay optics.

Abstract translation: 公开了一种用于向传感器反射从目标衬底反射的红外到真空紫外（VUV）光的方法和装置。 该系统包括：第一反射镜，被布置成接收和反射从目标基板反射的红外到VUV光;以及第二反射镜，布置成将红外接收并反射到由第一反射镜反射的VUV光。 第一和第二反射镜被布置和成形为将红外线反射到来自目标基板的VUV光朝向装置的光轴。 在另一个实施例中，该装置还可以包括第三反射镜，其布置成接收和反射由第二反射镜反射的红外至VUV光，第四反射镜被布置成接收和反射由第三反射镜反射的照明光朝向 传感器。 在另一个实施例中，使用反射或折射光学器件将上述光学器件的图像中继到传感器; 通过调整中间图像和中继光学器件之间的距离来实现各种放大倍率。

公开(公告)号：US20140291546A1

公开(公告)日：2014-10-02

申请号：US14224945

申请日：2014-03-25

Applicant: KLA-Tencor Corporation

Inventor： Ilya Bezel ,  Anatoly Shchemelinin ,  Matthew Derstine ,  Ken Gross ,  David W. Shortt ,  Wei Zhao ,  Anant Chimmalgi ,  Jincheng Wang

IPC: H05H1/24 ,  H01J65/00

CPC classification number: H01J65/042 ,  H01J61/28 ,  H01J61/523 ,  H01J65/00 ,  H05H1/24

Abstract: A system for controlling convective flow in a light-sustained plasma includes an illumination source configured to generate illumination, a plasma cell including a bulb for containing a volume of gas, a collector element arranged to focus illumination from the illumination source into the volume of gas in order to generate a plasma within the volume of gas contained within the bulb. Further, the plasma cell is disposed within a concave region of the collector element, where the collector element includes an opening for propagating a portion of a plume of the plasma to a region external to the concave region of the collect element.

Abstract translation: 用于控制光持久等离子体中的对流的系统包括被配置为产生照明的照明源，包括用于容纳一定体积的气体的灯泡的等离子体单元，被布置成将来自照明源的照明聚焦到气体体积中的集电器元件 以便在容纳在灯泡内的气体的体积内产生等离子体。 此外，等离子体单元设置在集电器元件的凹入区域内，其中集电器元件包括用于将等离子体的一部分羽流传播到收集元件的凹部区域外部的区域的开口。