公开(公告)号：US20220107458A1

公开(公告)日：2022-04-07

申请号：US17554342

申请日：2021-12-17

Applicant: Juniper Networks, Inc.

Inventor： John Parker ,  Gregory Alan Fish ,  Martin A. Spannagel ,  Antonio Labaro

IPC: G02B6/122 ,  H01L21/762 ,  H01L21/02 ,  H01L21/306 ,  G02B6/132 ,  G02B6/136

Abstract: Methods and systems are presented for heterogeneous integration of photonics and electronics with atomic layer deposition (ALD) bonding. One method includes operations for forming a compound semiconductor and for depositing (e.g., via atomic layer deposition) a continuous film of a protection material (e.g., Al2O3) on a first surface of the compound semiconductor. Further, the method includes an operation for forming a silicon on insulator (SOI) wafer, with the SOI wafer comprising one or more waveguides. The method further includes bonding the compound semiconductor at the first surface to the SOI wafer to form a bonded structure and processing the bonded structure. The protection material protects the compound semiconductor from acid etchants during further processing of the bonded structure.

公开(公告)号：US20220069917A1

公开(公告)日：2022-03-03

申请号：US17222200

申请日：2021-04-05

Applicant: Juniper Networks, Inc.

Inventor： John Parker

IPC: H04B10/516 ,  H04B10/40 ,  G02F1/015

Abstract: An optical modulator of an optical transceiver can be calibrated using intermediate frequency (IF) signals to generate accurate crossing point values (e.g., DC bias). A photodiode can measure output from the optical modulator at intermediate and high-speed frequencies to generate crossing point values that avoid crossing point errors. A target crossing point can be selected at any value (e.g., 40%, 50%) and bias values can be generated from IF signals and then stored in a lookup date for setting the modulator bias during operation.

公开(公告)号：US11153009B1

公开(公告)日：2021-10-19

申请号：US16934525

申请日：2020-07-21

Applicant: Juniper Networks, Inc.

Inventor： John Parker ,  John Garcia ,  Brandon Gomez ,  Molly Piels ,  Anand Ramaswamy

IPC: H04B10/079 ,  H04B10/40

Abstract: An optical device such as an optical transceiver can include a cascaded built-in self-test structure that can be configured in testing mode using an active power mode and can sufficiently attenuate light away from a loopback path in an inactive power mode. The optical device can include a wafer top emitter that can be used to tune a light source for testing and calibration of optical components while the built-in self-test structure is in active mode.

公开(公告)号：US20200252126A1

公开(公告)日：2020-08-06

申请号：US16854012

申请日：2020-04-21

Applicant: Juniper Networks, Inc.

Inventor： John Parker ,  Brian Robert Koch ,  Gregory Alan Fish ,  Hyundai Park

IPC: H04B10/077 ,  H01L31/0352 ,  H01L31/0232 ,  H01L31/105 ,  G02B6/12 ,  H01L31/0224 ,  H01L31/0304

Abstract: Photonically integrated normal incidence photodetectors (NIPDs) and associated in-plane waveguide structures optically coupled to the NIPDs can be configured to allow for both in-plane and normal-incidence detection. In photonic circuits with light-generation capabilities, such as integrated optical transceivers, the ability of the NIPDs to detect in-plane light is used, in accordance with some embodiments, to provide self-test functionality.

公开(公告)号：US10666353B1

公开(公告)日：2020-05-26

申请号：US16197041

申请日：2018-11-20

Applicant: Juniper Networks, Inc.

Inventor： John Parker ,  Brian Robert Koch ,  Gregory Alan Fish ,  Hyundai Park

IPC: H04B10/077 ,  H01L31/0224 ,  H01L31/0304 ,  H01L31/105 ,  H01L31/0352 ,  G02B6/12 ,  H01L31/0232 ,  H04B10/40

Abstract: Photonically integrated normal incidence photodetectors (NIPDs) and associated in-plane waveguide structures optically coupled to the NIPDs can be configured to allow for both in-plane and normal-incidence detection. In photonic circuits with light-generation capabilities, such as integrated optical transceivers, the ability of the NIPDs to detect in-plane light is used, in accordance with some embodiments, to provide self-test functionality.

公开(公告)号：US20200162156A1

公开(公告)日：2020-05-21

申请号：US16197041

申请日：2018-11-20

Applicant: Juniper Networks, Inc

Inventor： John Parker ,  Brian Robert Koch ,  Gregory Alan Fish ,  Hyundai Park

IPC: H04B10/077 ,  H01L31/0232 ,  H01L31/0224 ,  H01L31/0304 ,  H01L31/105 ,  H01L31/0352 ,  G02B6/12

Abstract: Photonically integrated normal incidence photodetectors (NIPDs) and associated in-plane waveguide structures optically coupled to the NIPDs can be configured to allow for both in-plane and normal-incidence detection. In photonic circuits with light-generation capabilities, such as integrated optical transceivers, the ability of the NIPDs to detect in-plane light is used, in accordance with some embodiments, to provide self-test functionality.

公开(公告)号：US10168475B2

公开(公告)日：2019-01-01

申请号：US15408725

申请日：2017-01-18

Applicant: Juniper Networks, Inc.

Inventor： John Parker ,  Gregory Alan Fish ,  Martin A. Spannagel ,  Antonio Labaro

IPC: G02B6/122 ,  G02B6/136 ,  H01L21/762 ,  H01L21/02 ,  H01L21/306 ,  G02B6/132

Abstract: Methods and systems are presented for heterogeneous integration of photonics and electronics with atomic layer deposition (ALD) bonding. One method includes operations for forming a compound semiconductor and for depositing (e.g., via atomic layer deposition) a continuous film of a protection material (e.g., Al2O3) on a first surface of the compound semiconductor. Further, the method includes an operation for forming a silicon on insulator (SOI) wafer, with the SOI wafer comprising one or more waveguides. The method further includes bonding the compound semiconductor at the first surface to the SOI wafer to form a bonded structure and processing the bonded structure. The protection material protects the compound semiconductor from acid etchants during further processing of the bonded structure.

公开(公告)号：US10128634B2

公开(公告)日：2018-11-13

申请号：US15689352

申请日：2017-08-29

Applicant: Juniper Networks, Inc.

Inventor： John Parker ,  Jared Bauters ,  Jonathan Edgar Roth ,  Erik Norberg ,  Gregory Alan Fish

IPC: H01S5/068 ,  G02B6/293 ,  H01S5/0687 ,  H01S5/06

Abstract: Described are various configurations of integrated wavelength lockers including asymmetric Mach-Zehnder interferometers (AMZIs) and associated detectors. Various embodiments provide improved wavelength-locking accuracy by using an active tuning element in the AMZI to achieve an operational position with high locking sensitivity, a coherent receiver to reduce the frequency-dependence of the locking sensitivity, and/or a temperature sensor and/or strain gauge to computationally correct for the effect of temperature or strain changes.

公开(公告)号：US09964703B2

公开(公告)日：2018-05-08

申请号：US15689319

申请日：2017-08-29

Applicant: Juniper Networks, Inc.

Inventor： John Parker ,  Jared Bauters ,  Jonathan Edgar Roth ,  Erik Norberg ,  Gregory Alan Fish

IPC: G02B6/12 ,  H01S5/026 ,  H04B10/25 ,  H01S3/067

CPC classification number: G02B6/12019 ,  G01J9/0246 ,  G02B6/12004 ,  H01S3/06754 ,  H01S5/0078 ,  H01S5/0085 ,  H01S5/021 ,  H01S5/0265 ,  H01S5/0268 ,  H01S5/0687 ,  H04B10/25 ,  H04B10/572

Abstract: Described are various configurations of integrated wavelength lockers including asymmetric Mach-Zehnder interferometers (AMZIs) and associated detectors. Various embodiments provide improved wavelength-locking accuracy by using an active tuning element in the AMZI to achieve an operational position with high locking sensitivity, a coherent receiver to reduce the frequency-dependence of the locking sensitivity, and/or a temperature sensor and/or strain gauge to computationally correct for the effect of temperature or strain changes.

公开(公告)号：US20180102628A1

公开(公告)日：2018-04-12

申请号：US15689352

申请日：2017-08-29

Applicant: Juniper Networks, Inc.

Inventor： John Parker ,  Jared Bauters ,  Jonathan Edgar Roth ,  Erik Norberg ,  Gregory Alan Fish

IPC: H01S5/0687 ,  H01S5/06 ,  G02B6/293

CPC classification number: H01S5/06804 ,  G01J3/02 ,  G01J9/0246 ,  G02B6/29353 ,  G02B6/29395 ,  G02B6/29398 ,  H01S5/0607 ,  H01S5/0612 ,  H01S5/0617 ,  H01S5/0687

Abstract: Described are various configurations of integrated wavelength lockers including asymmetric Mach-Zehnder interferometers (AMZIs) and associated detectors. Various embodiments provide improved wavelength-locking accuracy by using an active tuning element in the AMZI to achieve an operational position with high locking sensitivity, a coherent receiver to reduce the frequency-dependence of the locking sensitivity, and/or a temperature sensor and/or strain gauge to computationally correct for the effect of temperature or strain changes.