公开(公告)号：US11764029B2

公开(公告)日：2023-09-19

申请号：US17576016

申请日：2022-01-14

Applicant: JEOL Ltd.

Inventor： Shigeyuki Morishita ,  Ryusuke Sagawa ,  Fuminori Uematsu ,  Tomohiro Nakamichi ,  Keito Aibara

IPC: H01J37/153 ,  H01J37/10 ,  H01J37/26

CPC classification number: H01J37/153 ,  H01J37/10 ,  H01J37/26 ,  H01J2237/1534

Abstract: A method of measuring an aberration in an electron microscope includes: acquiring an image for measuring the aberration in the electron microscope; and measuring the aberration by using the image. In measuring the aberration, a direction of defocusing is specified based on a residual aberration that is uniquely determined by a configuration of an optical system of the electron microscope and an optical condition of the optical system.

公开(公告)号：US20220230838A1

公开(公告)日：2022-07-21

申请号：US17576016

申请日：2022-01-14

Applicant: JEOL Ltd.

Inventor： Shigeyuki Morishita ,  Ryusuke Sagawa ,  Fuminori Uematsu ,  Tomohiro Nakamichi ,  Keito Aibara

IPC: H01J37/153 ,  H01J37/26 ,  H01J37/10

Abstract: A method of measuring an aberration in an electron microscope includes: acquiring an image for measuring the aberration in the electron microscope; and measuring the aberration by using the image. In measuring the aberration, a direction of defocusing is specified based on a residual aberration that is uniquely determined by a configuration of an optical system of the electron microscope and an optical condition of the optical system.

公开(公告)号：US20210335570A1

公开(公告)日：2021-10-28

申请号：US17236074

申请日：2021-04-21

Applicant: JEOL Ltd.

Inventor： Ryusuke Sagawa

IPC: H01J37/28 ,  H01J37/10 ,  H01J37/26 ,  H01J37/22 ,  H01J37/147

Abstract: A scanning transmission electron microscope that scans a specimen with an electron probe to acquire an image. The scanning transmission electron microscope includes: an optical system which includes a condenser lens and an objective lens; an imaging device which is arranged on a back focal plane or a plane conjugate to the back focal plane of the objective lens and which is capable of photographing a Ronchigram; and a control unit which performs adjustment of the optical system. The control unit is configured or programed to: acquire an image of a change in a Ronchigram that is attributable to a change in a relative positional relationship between the specimen and the electron probe; and determine a center of the Ronchigram based on the image of the change in the Ronchigram.